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ferrotec Temescal CV-6SLX, User Manual

The Ferrotec Temescal CV-6SLX is a high-quality thin film deposition system designed for precision coating applications. Unlock the full potential of this equipment by downloading the free user manual from our website. Learn to operate and maintain your CV-6SLX with ease using the comprehensive manual provided.

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4.3 FPS Theory of Operation 

Section 4: Theory of Operation 

CV-6SLX User Manual 

 

0101-8242-0, Rev. C 

4-6 

Figure 4-4  Component Location in Standard FPS Units (PN 0620-6604-0) 

 

Figure 4-5  Top Level Block Diagram for Standard FPS Units (PN 0620-6604-0) 

 

Summary of Contents for Temescal CV-6SLX

Page 1: ...0101 8242 0 CV 6SLX USER MANUAL Revision C April 2016 Temescal a division of Ferrotec USA Corporation 4569 C Las Positas Road Livermore CA 94551 Tel 1 800 522 1215 Fax 925 449 4096...

Page 2: ...1 for 400 volt units March 2014 IA B Corrections throughout to cross references Minor changes to technical data in Section 5 Deleted former section 5 6 Suggested Spare Parts lists Pursuant to Field Se...

Page 3: ...ents 2 3 2 6 Cable Installation 2 7 3 Power Supply Operation 3 1 3 1 Section Overview 3 1 3 2 HVPS Front Panel Controls and Indicators 3 1 3 3 Switches and LEDs on the FPS Front Panel 3 2 3 4 Power Up...

Page 4: ...CV 6SLX User Manual ii 0101 8242 0 Rev C...

Page 5: ...Figure 3 6 Operations E Beam Screen with Numeric Keypad Displayed 3 5 Figure 3 7 Operations E Beam Screen Beam on at 5 Power 3 6 Figure 3 8 The EBC s Diagnostics Screen 3 6 Figure 3 9 Remote Controlle...

Page 6: ...and FPS I O Cable PN 0620 6672 2 2 17 Table 5 1 No Input Power Indicated 5 16 Table 5 2 One or More Interlocks Not Made 5 17 Table 5 3 General Condition HVPS Powered Up But Fails to Achieve HV Ready S...

Page 7: ...te or local government including specifically but not exclusively any orders rules or regulations issued by an official or agency of any such government affecting the conduct of Seller s business with...

Page 8: ...ash 10 No implied License The sale of any product or material quoted herein does not give or imply any right or license to buyer to analyze or manufacture such product or material or to claim Buyer is...

Page 9: ...antor may repair the item at any of its worldwide service locations 5 Exclusions from coverage Warrantor expressly disclaims responsibility for any of the following each of which is expressly EXCLUDED...

Page 10: ...e local electrical codes Refer to the power supply portion of the documentation to determine the proper electrical ground for high voltage components 6 Before servicing any high voltage component swit...

Page 11: ...nsibility to set up suitable systems to safeguard the health and safety of employees according to the Health Safety at Work etc Act 1974 User Responsibility This equipment will perform in accordance w...

Page 12: ...e condensates deposited on the tank walls of a vacuum system are generally in the form of extremely fine particles The nature as well as the form of the materials poses the following potential health...

Page 13: ...enience for operating as well as service personnel The main components of CV 6SLX units are the HVPS see Figure 1 1 the filament power supply see Figure 1 2 and the control and high voltage cables req...

Page 14: ...g power to the HVPS and include the AC power required for the FPS whose power cable should always be connected to the HVPS rear panel not to a separate power drop High Voltage Output 6 kW at 10 kV max...

Page 15: ...iscellaneous Hardware and Interconnection Cables For a complete list of the components and cables included with the CV 6SLX see section 2 2 1 5 TemEBeam Controller EBC In systems without a PLC based s...

Page 16: ...1 5 TemEBeam Controller EBC Section 1 Introduction to the CV 6SLX CV 6SLX User Manual 0101 8242 0 Rev C 1 4...

Page 17: ...6 4 Connecting the Control Data Cables Section 2 6 5 Making I O Connections to the Vacuum System CAUTION Before beginning the installation procedure make sure that the facility circuit breaker supply...

Page 18: ...ugs and wiring The panel should be secured to the rack cabinet by the four mounting holes provided DANGER HIGH VOLTAGE Removal of the HVPS top cover can expose personnel to dangerous or lethal voltage...

Page 19: ...n in the pattern shown in Figure 2 1 Then place the holes in the bottom of the FPS module over the drilled holes and secure the FPS in place with the hardware provided DANGER HIGH VOLTAGE Removal of a...

Page 20: ...by connecting the vacuum chamber to the steel structure of the building Where copper straps are attached to frame members the copper must be bolted to clean bare patches of metal The length of copper...

Page 21: ...le s central grounding point the grounding stud labeled RF GND on the FPS front panel see Figure 2 5 to the vacuum cubicle s main grounding point the source tray to the vacuum cubicle s main grounding...

Page 22: ...frame The same fastener that secures the above copper strip to the frame should also secure one end of a length of 3 copper strap that connects to the vacuum cubicle s central grounding point as show...

Page 23: ...be made of nonmagnetic material The source must be securely bolted to the mounting surface 2 5 6 Mounting the Grounding Hook If your are installing the CV SLX unit in a system that does not already h...

Page 24: ...Connect using AWG 10 stranded UL1015 wire 400 V Model CV 6SLX PN 6024 7120 0 50 60 Hz 3 Phase wye 5 Wire with neutral Connect using AWG 12 stranded UL1015 wire The input power cable is user supplied a...

Page 25: ...The HV coaxial cable PN 0620 8684 1 conducts the high voltage output of the power module to the FPS module s Plug one end of this HV cable into HVPS rear panel connector J7 see Figure 2 4 Connect the...

Page 26: ...Panel 2 Insert the threaded end of the conduit elbow into the hole in the conduit panel and secure the elbow with the nut provided as shown in Figure 2 10 Figure 2 10 Conduit Properly Secured to FPS C...

Page 27: ...igh voltage power supply then before performing this procedure touch the source tray and the terminals on both HV feedthroughs with a properly connected grounding hook Step Action 1 Remove the nut tha...

Page 28: ...ction 1 Plug the male end of the HVPS FPS cable PN 0620 6672 0 into connector J5 on the power module rear panel see Figure 2 4 2 Plug the female end of the HVPS FPS cable for Gun 1 into connector J102...

Page 29: ...include both digital and analog signals Digital inputs require a simple contact closure and carry 24 V dc at approximately 20 mA All digital outputs are 24 V dc sourcing a maximum of 50 mA For detaile...

Page 30: ...PN 0620 6682 0 NOTE Because the interlock string is internally supplied with 24 V dc only contact closure must be supplied by the vacuum system Care must be taken not to allow voltages from other sour...

Page 31: ...ure between Pins 10 and 11 resets the HVPS RESET 11 DC voltage 24 dc output supplied Pin 10 via a normally open switch controlling HV IS ON INDICATOR 12 Digital output When high 24 V dc this output in...

Page 32: ...em I Os Exchanged via FPS Front Panel Connector J101 and the FPS I O Cable PN 0620 6672 2 NOTE DEPOSITION CONTROLLER INPUT On the CV 6SLX power supply the polarity of the emission current request inpu...

Page 33: ...terlock switch installed before the normally closed switch required between J101 Pins 6 and 8 GUN READY INDICATOR 7 Digital output This output goes high 24 V dc when the GUN ENABLE OFF COMMAND IN sign...

Page 34: ...2 6 Cable Installation Section 2 Installation CV 6SLX User Manual 0101 8242 0 Rev C 2 18...

Page 35: ...HVPS Front Panel Controls and Indicators Figure 3 1 shows the controls and indicators on the front panel of the CV 6SLX HVPS Those features are described in detail below Figure 3 1 CV 6SLX HVPS Front...

Page 36: ...green when the HV is switched on Fault Indicator LEDs For detailed information about fault indicator LEDs see sections 5 2 2 and 5 2 3 3 3 Switches and LEDs on the FPS Front Panel Figure 3 2 shows the...

Page 37: ...he CV 6SLX If not proceed to Step 2 1 Set the facility breaker switch to the ON position 2 Set the circuit breaker switch labeled AC MAINS on the power module front panel to the ON position 3 Set the...

Page 38: ...gun are off when the HV alone is on and when the gun alone is on Touching the E BEAM button when the beam is on switches the HV and the gun off Figure 3 4 shows the Operations E Beam screen when the...

Page 39: ...EBC will then display a keypad screen which you can use to enter a percent power setpoint After you do so and touch Enter to close the keypad the power supply will ramp up to that power setpoint In F...

Page 40: ...ed kV Set to open a numeric keypad 2 Use the keypad to enter the desired kV value 3 Touch the keypad s Enter button to close it If the HV is on when you perform this procedure the HVPS will begin oper...

Page 41: ...ing power supply fault has occurred For additional information about latching HVPS faults see section 5 2 Gun Section Is Ready LED Status of the IS READY input from the FPS Is ON LED Status of the IS...

Page 42: ...tem Controller 3 6 1 Switching Main Power On Off To switch on three phase input power to the power supply set the HVPS front panel s main power breaker to the ON position i e all the way up To switch...

Page 43: ...PS rear panel connector J4 see Table 2 1 Switching On the High Voltage Following a Latching Fault Condition Switching off the HV by pressing the HV OFF button on the power module front panel triggers...

Page 44: ...lt occurs If the REM LOC IN signal supplied via J4 Pin 5 is low the operator can switch off the HV by pressing the HV OFF button on the HVPS front panel see see Figure 3 1 If the REM LOC IN signal is...

Page 45: ...and 11 on HVPS rear panel connector J4 an HV ON input supplied via HVPS J4 Pins 8 and 9 The remote HV ON signal can be supplied either from an EBC see section 3 5 or from a PLC based system controller...

Page 46: ...urn green and the ART OUT OF REGULATION LED will no longer flash In addition the HV ON LED is extinguished as the fault condition causes the HV to be switched off This latched fault state is illustrat...

Page 47: ...t AC line transients at common levels The load side of LF1 feeds three phase circuit breaker CB1 see Figure 4 2 as well as the J2 the filtered rear panel IEC auxiliary outlet see Figure 4 1 Circuit br...

Page 48: ...e 4 2 CV 6SLX HVPS Internal Components Referenced in Section 4 2 Step Down Transformer T2 HV Output Transformer HV Regulator Board PS1 24 V dc Power Supply HV Inverter Board HV Output Board Line Filte...

Page 49: ...o the temperature of the heat sink near the Inverter board s IGBTs Both sensors feed the over temperature fault circuitry Cooling of internal components is provided by 24 VDC fan B1 mounted on the rea...

Page 50: ...eled J5 on rear panel provides the interface to the filament power supply J2 a 37 pin D sub connector labeled J3 on rear panel provides diagnostic signals to the user s system Appendix B provides a pi...

Page 51: ...the filament As Figure 4 5 shows the Filament Output section on standard FPS units consists of an HV vacuum relay and a filament transformer On FPS units with PN 0620 6604 2 the Filament Output secti...

Page 52: ...eration Section 4 Theory of Operation CV 6SLX User Manual 0101 8242 0 Rev C 4 6 Figure 4 4 Component Location in Standard FPS Units PN 0620 6604 0 Figure 4 5 Top Level Block Diagram for Standard FPS U...

Page 53: ...of Operation 4 3 FPS Theory of Operation 0101 8242 0 Rev C 4 7 CV 6SLX User Manual Figure 4 6 Component Location in FPS Units with PN 0620 6604 2 Figure 4 7 Top Level Block Diagram for FPS Units with...

Page 54: ...ed by inductors L 10 and L 11 in combination with rail capacitors C 11 and C 12 Low Voltage DC Supplies Low DC voltages of 24 V 12 V 5 V and 12V are supplied by T 102 via bridge rectifiers DB 14 and D...

Page 55: ...ch Q 11 The PWM is controlled by the filament current control circuits The filament current feedback circuit utilizes transformer CT 10 to measure the filament transformer primary current The signal i...

Page 56: ...buffer U205A to the summing junction of the emission current loop compensation circuit of U106A via R54 The emission current feedback signal Emission Monitor EM comes from the HV current transducer in...

Page 57: ...ck oscillator U203 allowing it to clock the counter The counter outputs drive the 8 bit D A converter U202 The D A output is Ref times the count divided by 256 volts This count up process continues un...

Page 58: ...routed to the vacuum relay K101 On such units K101 either connects the negative HV to the secondary of the filament transformer or applies a ground to the secondary of the filament transformer The rel...

Page 59: ...resolve a given problem by such simple measures as ensuring that cable connections are properly made or ensuring that the turret on multipocket sources can turn freely In other cases the information p...

Page 60: ...off this LED is yellow Turns green when HV is on Turns green when the HVPS is powered up Normally green turns red when a latching power supply fault has occurred 5 2 2 LEDs That Indicate Nonlatching F...

Page 61: ...ead the LEDs described in these illustrations are shown as red merely to highlight them Figure 5 4 Filament Load Fault and Filament Power LEDs LED is normally green when FPS is powered up Turns red to...

Page 62: ...s with Latching Fault LEDs Outlined Figure 5 6 Interlocks OK and Rail Undervoltage LEDs Turns red one or more interlocks internal or external are not met LED turns red if the rail voltage falls below...

Page 63: ...m nominal requested HV setpoint value by more than 5 LED turns red if the arc rate exceeds threshold value of 400 arcs sec or if threshold arcing above 300 Hz persists for more than 120 sec Figure 5 9...

Page 64: ...Beam After HV and Gun Are Switched ON 5 8 Ishikawa Diagram 4 HV Output Unstable 5 8 Ishikawa Diagram 5 HV Out of Regulation LED Lights Frequently 5 9 Ishikawa Diagram 6 Arc Out of Regulation LED Ligh...

Page 65: ...tactor defective not pulling in Mains Phase missing Incorrect mains supply voltage Interface I O cables missing or not correctly plugged in seated Interlock signal to HVPS J4 not correct Pin 24 Interl...

Page 66: ...ter incorrectly assembled HV relay defective Consequence Possible Causes HV and gun switched ON but no beam is emitted see Table 6 8 Loose or faulty connections Loose or faulty connections in emitter...

Page 67: ...onsequence Possible Causes Shorts loose connections on HV feedthrough s or HV connection path HV Out of Regulation LED lights frequently see Table 6 11 Other Mains Damaged emitter Short in HV path FPS...

Page 68: ...PCB Mains AC phase missing AC mains input not correct or low phase to phase phase to ground readings Rail to A3 HV Reg PCB incorrect A3 TP29 to ref 10V 1000 VDC for actual rail Blown F3 fuse on A1 HV...

Page 69: ...connection cable from A2 HV Output PCB to A3 HV Regulator PCB Other Emitter damaged Consequence Possible Causes Loose cables HV Overvoltage LED lights red see Table 6 14 Defective HV Output PCB Incorr...

Page 70: ...ath or output path HV feedthrough shorted damaged Faulty loose connections in FPS connections or chamber feedthrough Temp Sensors Connection J6 on inverter not made or brokern Power Supply Ambient tem...

Page 71: ...F2 on A1 HV Inverter PCB blown Consequence Possible Causes Aux Power Supply Low LED lights red see Table 6 20 A3 HV Regulator PCB defective HV Inverter PCB defective Consequence Possible Causes Power...

Page 72: ...see Table 6 22 HV feedthrough damaged or coated Dirty damaged emitter assembly Broken damaged filament Incorrect filament status signal from FPS 24 VDC from J102 Pin 6 Filament Load Fault and Filamen...

Page 73: ...3 Check the emitter assembly the HV leads the HV feedthroughs and the source tray for flakes and debris and clean as necessary 4 Check the emitter s filament for breaks and replace if necessary 5 Che...

Page 74: ...HVPS EXTERNAL CONTROL FAULT LED lights red 5 28 Table 5 22 HVPS FILAMENT LOAD FAULT LED lights red 5 28 Table 5 23 HV Is Switched On but FPS Front Panel HIGH VOLTAGE ON LED Fails To Light 5 29 Table 5...

Page 75: ...PN 0620 6672 0 is securely connected to HVPS rear panel connector J5 and to FPS connector J102 3 Fault condition s whose investigation requires removal of HVPS top cover 3 Contact Temescal Field Serv...

Page 76: ...meout Alarm HVPS Front Panel HV ON LED fails to light Green EBC issues HVPS Go On Failure alarm Possible Causes Procedure 1 HV READY signal is not present 1 See Table 5 3 2 After remote HV GO ON comma...

Page 77: ...re than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in th...

Page 78: ...Before performing the following procedure perform the procedure described in section 5 4 1 Table 5 9 HV Output Unstable Symptom HV fluctuates or sags from requested level For additional information a...

Page 79: ...conditions whose investigation requires removal of FPS top cover 4 Contact Temescal Field Service Table 5 11 HVPS ARC OUT OF REGULATION LED Flashes Excessively Condition indicated Subthreshold arcing...

Page 80: ...per manual 3 Incorrect line phase 3 Confirm line phase as per specifications 4 Faulty or loose cable connections 4 Make sure that all power module and FPS cable connections are correctly and securely...

Page 81: ...unded for HV 4 Make sure that grounding instructions in e gun manual have been correctly implemented If preceding steps have failed to correct the fault perform the following procedure 1 Switch off th...

Page 82: ...operly grounded for HV 4 Make sure that grounding instructions in e gun manual have been correctly implemented If preceding steps have failed to correct the fault perform the following procedure 1 Swi...

Page 83: ...red Condition indicated Latched PS fault due to either an arc duration 120 ms or arc rate 200 Hz Symptoms TCS issues PSU1_FAIL_ALM Power Supply Control Is On failure alarm HVPS Front Panel OUTPUT ARC...

Page 84: ...steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from HVPS J1 3 Switch on the power supply and the HV and leave them sw...

Page 85: ...ocedure 1 Incorrect or fluctuating line voltage 1 Check input line voltage 2 Fault condition s whose investigation requires removal of HVPS top cover 2 Contact Temescal Field Service DANGER HIGH VOLTA...

Page 86: ...PS J4 is below its minimum value 20 V dc Symptoms TCS displays PSU1_FAIL_ALM Power Supply Control Is On failure alarm HVPS Front Panel EXTERNAL CONTROL FAULT and POWER SUPPLY FAULT LEDs are lit EBC Fa...

Page 87: ...l information about this fault mode see Ishikawa Diagram 16 Possible Cause Procedure 1 HVPS rear panel connector J1 not supplying 208 V ac power 1 Disconnect FPS power cable from HVPS J1 and check J1...

Page 88: ...hown in Figure 5 11 Figure 5 11 Prying Open the Fuse Block Cover on FPS Front Panel 10 Using the same screwdriver pry the fuse block out of its holder as shown in Figure 5 12 Figure 5 13 shows the fus...

Page 89: ...242 0 Rev C 5 31 CV 6SLX User Manual 12 Push the fuse block all the way into its holder and snap its cover back into place 13 Reconnect the FPS input power cable 14 Switch on facility breaker supplyin...

Page 90: ...5 5 FPS Fuse Replacement Procedure Section 5 Troubleshooting CV 6SLX User Manual 5 32 0101 8242 0 Rev C...

Page 91: ...igital Controls 0 24 V dc 24 V dc Control Power 10 0 10 V dc 0 24 V dc Fault at below 19 5 V dc Overtemp Trip 11 0 24 V dc 0 V dc Fault Inverter temperature overload above 67 C or cooling fan failure...

Page 92: ...Appendix A Pinout Table for Rear Panel Diagnostic Port J3 CV 6SLX User Manual A 2 0101 8242 0 Rev C...

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