CV-6SLX User Manual
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0101-8242-0, Rev. C
Guidelines And Good Practices
1.
Follow applicable clean room procedures (smocks, masks, gloves, etc.).
2.
Do not expose the vent and purge valves to excessive pressures. The nitrogen line regulator is factory set at
15 psi and must not be adjusted above 20 psi.
3.
Prevent oil, grease, water, sweat, etc. from getting into the vacuum chamber.
4.
Replace the source tray shield correctly to ensure that the ceramic parts or the high voltage feedthroughs are
protected from being coated.
5.
Clean all mechanical parts and seals with lint-free paper/cloth soaked with isopropyl alcohol (IPA). Dispose
all IPA-exposed cleaning paper/cloth in a fireproof container, while ensuring proper safety precautions are
being followed.
6.
Polish scratched surfaces with Scotch-Brite, taking care not to produce any cross scratches.
7.
Shaft seals are all ferromagnetic. No lubrication is required.
8.
Check the chamber door’s seal and sealing surfaces each time before closing it.
9.
Check and clean with IPA the source tray seals and sealing surfaces each time before raising the source tray
into place.
10.
Train staff by competent personnel. DO NOT allow staff to operate or do maintenance and recovery work on
the machine until they are trained by competent personnel.
11.
Document all alarms, deviations, breakdowns, and servicings done on either a hardcopy or an electronic
equipment-log system.
HEALTH HAZARD
The condensates deposited on the tank walls of a vacuum system are generally in the form of extremely fine
particles. The nature, as well as the form, of the materials poses the following potential health hazards:
a)
Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a protective
respirator mask with fine filter that has been approved by the National Institute for Occupational Safety and
Health (NIOSH) and the federal Mine Safety and Health Administration (MSHA).
b)
Some substances are toxic and inhaling them should be avoided. Take steps to ascertain whether or not the
material being deposited is a known toxic substance. Refer to the Material Safety Data Sheet(s) covering the
evaporant(s) in question.
c)
Certain powders (titanium, for instance) can cause flash fires when exposed to oxygen or other oxidizers.
Therefore, when opening the chamber door after a deposition cycle, exercise extreme caution and allow time
for the coating surface to oxidize. Breakage of some of the more reactive condensates may be hazardous,
even when the above precautions are observed. In this situation, fire-protective clothing should be worn.
d)
Certain powders (platinum, for instance) are known to catalyze methyl alcohol vapors upon contact,
generating heat in the process and possibly causing a fire to erupt. Therefore, never use methyl alcohol to
wipe down or clean any internal tank surfaces of a vacuum system. Use isopropyl alcohol (IPA), instead.
Dispose of all IPA-exposed lint-free paper/cloth into a fireproof container, while ensuring all proper safety
procedures and precautions are being followed.
