Operating Procedures
:
Patterning
C O N F I D E N T I A L – FEI Limited Rights Data
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Gas Injection Module (option)
Patterns have many associated parameters, such as the gas that
can optionally be used during patterning to deposit desired
material which is delivered by a Gas Injection System (GIS) on
the sample surface.
As different applications require different gases, there can be
more GIS’s installed on your system. One can select an
Application file for a given pattern in Patterning property editor. It
automatically sets the appropriate GIS, the dwell time and overlap, calculates the proper dose appropriate to the
beam chemistry. A pattern must be defined before the material file is selected.
The GIS can be selected manually, but note that overlap, dwell time and an appropriate gas type should be set
carefully to avoid disappointing results.
Setting up the GIS
The
Gas Injection
module enables to control installed GIS’s. A
Gas
type is allocated to each GIS (several injectors may be mounted
according to the configuration, its color depends on the gas type).
A tool tip info is given about the selected GIS line:
•
Port #
– GIS connection position
•
Lifetime –
time of GIS employment
A right-clicking on the installed GIS module line opens a context
menu.
Before the patterning with the GIS starts, the gas reservoir must
be heated by selecting the
Heat
column context menu /
Warm
item. The
Cold
status is replaced by a progress bar, which in turn
is replaced by the
Warm
status when the GIS is fully heated. To
cool down a reservoir, proceed in reverse order.
To insert the GIS needle manually click on the
Insert
check box (a
tick mark). A confirmation dialog appears. Clicking on the
Insert
check box again retracts (clear box) the GIS.
C a u t i o n !
Confirm the insertion if you know there is nothing obstructing its travel.
Beware of stage moves while GIS is inserted! The GIS needle can be damaged by incautious stage movements!
To open / close the GIS valve click on the
Flow
column /
Closed
/
Open
status. This will not be possible until the
Heat
column /
Warm
status is reached.
Note
If any Property tab module
/
Gas Type is chosen, the opening
/
closing of GIS valves is done automatically during patterning.
Some conditions must be fulfilled before the insertion is enabled,
user is notified by a tool tip.
When not in use, the GIS should be closed (to save lifetime), cold
and retracted. Leaving it closed, heated but retracted is also an option so that reheating is not necessary if it is to be
used over several patterns.
C a u t i o n !
Logging off an actual user does not change conditions of GIS’s.
It can be Warm, In and Opened even if the Microscope Control software is closed!
When the vacuum status is vented, GIS needles are retracted automatically. In spite of that retract it/them manually
before you start any activity inside the chamber (specimen exchange, detector mounting etc.).
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
