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INVUE GV148 LIQUID CHEMICAL CONCENTRATION MONITOR
User Guide | Entegris, Inc.
CONCENTRATION TAB
The
Concentration
page allows the user to calibrate
chemical concentration to the refractive index. There
are three methods to creating and saving calibration
tables: manually, directly, or from an existing file.
CAUTION: The GV148 monitor has a maximum
of 30 calibration points. It is recommended that a
minimum of five calibration points is set above and
below the target process concentration range with
the target concentration as mid-point. Concentra-
tion steps should be in increments of 0.1%.
Creating and Saving Manually
This process requires the user to run various chemical
concentrations through the monitor with correspond-
ing refractive index readings to create the interrelation
between concentration and the refractive index.
1. The default table has two rows. To expand the
table, select “Add Entry”. It is recommended that
a minimum of five concentration points be used.
2. Introduce the desired chemical concentration at
the temperature, pressure, and flow characteristics
of the manufacturing process.
3. When the concentration is stable, click on the
Copy/Paste
icon in the first edit cell to enter
the value.
4. Type the concentration value into the
Concentration
edit field.
5. Repeat the process for the desired number
of entries.
6. As the data is collected, the chart will populate
and create an algorithmic curve.
7. Different algorithms can be selected for optimum
design.
