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Edwards nEXT200200, Instruction Manual

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Edwards nEXT200200 Instruction Manual Download Page 25

Figure 4 nEXT200200 dimensions (mm)

CS

/5277/

A

10

293.2

Ø159.4

134.1

10.9

237 201.2

131

105.4

226

80.2

160

51.2

51.2

51.2

51.2

3

4

2

1

9

6

8

7

5

1. Envelope vent

2. LED indicators on drive unit

3. Booster port B

4. Removable cap RS485/RS232 switch vent

valve socket

5. Booster port A

6. Base mounting holes and fan mountings

7. Earth point

8. Electrical drive unit

9. Body purge port

10. Backing port

1. Envelope vent

2. LED indicators on drive unit

3. Booster port B

4. Removable cap RS485/RS232 switch vent

valve socket

5. Booster port A

6. Base mounting holes and fan mountings

7. Earth point

8. Electrical drive unit

9. Body purge port

10. Backing port

Page 21

B85200880_D - Technical data

Summary of Contents for nEXT200200

Page 1: ...nEXT Turbomolecular Pumps nEXT200200 INSTRUCTION MANUAL B85200880_D Original instructions edwardsvacuum com...

Page 2: ...ontent As far as practical we have ensured that the products have been designed and constructed to be safe and without risks when properly installed and used in accordance with their operating instruc...

Page 3: ...ty requirements Vacuum pumps EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use General requirements EN 61326 1 2013 Electrical equipment for measu...

Page 4: ...osal of the product including any substance based requirements Article 33 1 Declaration This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0...

Page 5: ...hers PBDE Aluminium alloys X O O O O O Brass pipe fitting X O O O O O Brass connectors X O O O O O PCA Printed Circuit Assembly PCA X O X O O O O GB T 26572 O Indicates that the hazardous substance co...

Page 6: ...This page has been intentionally left blank...

Page 7: ...parallel monitoring 15 2 4 4 Parallel control with serial monitoring or serial configuration 15 2 4 5 Controller configuration serial configuration 16 3 Technical data 17 3 1 General technical data 1...

Page 8: ...col 44 4 7 4 Message structure 46 4 7 5 Command set 46 4 7 6 Multi drop operation 50 4 8 Connection for mixed parallel and serial operation 50 4 9 Vent options vent valve connection and control 52 4 9...

Page 9: ...with high inlet pressure 70 6 7 2 Operation at high temperatures 70 6 7 3 Protection against over speed 70 6 7 4 Electrical supply failure 71 6 8 Bakeout 73 7 Maintenance 74 7 1 Introduction 74 7 2 Be...

Page 10: ...83 8 23 Useful service information 85 9 Storage 87 10 Disposal 88 11 Service 89 11 1 Return the equipment or components for service 89 11 2 Bearing and oil cartridge on site maintenance 90 12 Spares...

Page 11: ...ing pin numbers 30 Figure 9 Typical pumping system with a nEXT pump 34 Figure 10 Logic interface connections parallel control 40 Figure 11 Controller status information 42 Figure 12 Logic interface co...

Page 12: ...r nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instructions WARNING If you do not obey a warning there is a risk of injury or death Dif...

Page 13: ...ial hazard from a hot surface Warning Protective earth ground The equipment must be grounded 1 3 Trained personnel Trained personnel for the operation of this pump are skilled workers with knowledge i...

Page 14: ...this will cause damage to the electrical connections A nEXT pump has a turbomolecular pump with a permanently attached controller which has drive electronics The controller controls the electrical su...

Page 15: ...curs Refer to Indicator LED s on page 30 The drive electronics system has a number of built in safety features to prevent the pump from damage during sustained high pressure or temperature The electro...

Page 16: ...e the pump rotational speed is lower than the full rotational speed The default setting for standby speed is 70 of the full speed To operate the pump at standby speed it must be in the start condition...

Page 17: ...plicable meter or indicator to display the applicable system parameter or connect it to the customer control equipment for example to operate other components in the pumping system at set values The a...

Page 18: ...interface supports the serial control and the parallel control to monitor and control through one connector For serial control RS232 default or RS485 can be selected using the RS485 RS232 slide switc...

Page 19: ...page 41 for more information about the serial interface 2 4 3 Serial control with parallel monitoring Normal and analogue signals stay available when using serial control You can control the pump thr...

Page 20: ...a pump s configuration You can download the configuration to another pump This is useful when you configure a number of pumps with the same settings before they are installed at a system Note The RS48...

Page 21: ...nt for indoor use only Enclosure protection installed IP40 Reduce gas load when operating in the magnetic field Table 3 nEXT pumps technical data Parameter nEXT200200D nEXT200200iD nEXT200200T nEXT200...

Page 22: ...x 104 Interstage pumping speed N2 13 l s 13 l s He 13 l s 13 l s H2 11 l s 11 l s Peak booster Pumping speed nitrogen RV12 backing pump 26 m3h 1 26 m3h 1 XDS10 backing pump 24 m3h 1 24 m3h 1 Recommend...

Page 23: ...Figure 1 nEXT200200 main inlet performance curve Figure 2 nEXT200200 side inlet performance curve Page 19 B85200880_D Technical data...

Page 24: ...Figure 3 nEXT 200200 NW25 interstage port pumping speed Page 20 B85200880_D Technical data...

Page 25: ...witch vent valve socket 5 Booster port A 6 Base mounting holes and fan mountings 7 Earth point 8 Electrical drive unit 9 Body purge port 10 Backing port 1 Envelope vent 2 LED indicators on drive unit...

Page 26: ...ster port A 6 Base mounting holes and fan mountings 7 Earth point 8 Electrical drive unit 9 Body purge port 10 Backing port 3 2 Operation and storage environment Table 4 Operation and storage environm...

Page 27: ...ecommended time for the rotational speed to reach 50 15 seconds Maximum permitted rate of increase of pressure Refer to Figure Maximum allowed rate of increase in pressure during venting pressure agai...

Page 28: ...n 4 parts per million Minimum cooling water flow rate at 15 C 15 l hr 1 Water temperature 10 to 20 C Maximum water pressure 5 bar gauge 73 5 psig 6 x 105 Pa Materials exposed to the cooling water Nick...

Page 29: ...ntain an explosion WARNING DANGEROUS GASES Risk of damage to equipment In the interstage and booster versions of the nEXT pumps gas pumped through the interstage port will mix with gas pumped through...

Page 30: ...concentration above 20 by volume Refer to Purge gas specification on page 23 for purge gas specification If the pump is not purged the oxygen concentration must be less than 20 by volume Water vapour...

Page 31: ...with ripple 24 48 V d c 5 10 21 6 to 50 4 V d c Maximum voltage ripple 0 5 V r m s Fuse rating 10 A for 24 V d c supply 5 A to 10 A for 48 V d c supply Type T IEC approved or Time delay fuse UL CSA ap...

Page 32: ...voltage Mating half of connector not supplied Table 9 Logic interface connector pins Pin Number Signal Polarity Use 2 0 V Control reference 0 V reference for all control and status signals below 3 ST...

Page 33: ...urbo pump controllers 3 10 Controller connector socket The pump has a 3 way controller connector socket at the side of the controller When the pump is shipped the 3 way controller connector is conceal...

Page 34: ...data on page 30 For higher currents the output voltage will decrease and can set to off to limit the current Table 10 Controller technical data Description Data Connector plug Phoenix part number FK...

Page 35: ...the LED flashes in a sequence to show which service operation is necessary Refer to Fault finding on page 76 Alarm LED The red LED flashes in a sequence to show an error code if a fail condition prev...

Page 36: ...vent the entry of dust and vapour 3 Do not remove the seals until the pump is installed on the vacuum system 4 Remove the packing materials from the pump 5 Check the pump 6 Keep all the packing materi...

Page 37: ...view on page 92 4 3 Connect to the vacuum system WARNING TRIP HAZARD Risk of injury and damage to equipment Make sure that the cable and pipe work attached to the pump are carefully routed Failure to...

Page 38: ...uge 2 Vacuum system 3 Differential aperture 4 Foreline trap 5 Backing pump 6 Mist filter 7 Flexible bellows 8 Vacuum gauge 9 nEXT split flow pump 10 Backing valve 11 WCX water cooler and connections 1...

Page 39: ...he pump 4 3 3 Inlet connection and orientation The pump can be installed at the vacuum system through the inlet flange You can mount the pump in vertical and upright through to horizontal 2 If the pum...

Page 40: ...a backing pressure less than 5 x 10 4 mbar 5 x 10 2 Pa Lower backing pressures increases the evaporation rate of the lubrication oil and can decrease the life of the bearings Note Make sure that the d...

Page 41: ...urge gas specification on page 23 1 To supply the purge gas to the pump remove the plug installed in the purge port 2 To install a vent port adaptor refer to Accessories on page 92 3 Connect the purge...

Page 42: ...that shows the pump type as nEXTp the serial connection is disabled start and stop is possible 4 5 3 Connect the logic interface to the customer control equipment If you operate the pump with the cust...

Page 43: ...n you connect the pump to the power supply make sure that all 3 pins for the 24 48 V connection and all 3 pins for the 0 V connection on the customer connector mating half are connected to the power s...

Page 44: ...Connect the parallel control and monitoring To make the connections for the parallel control and monitoring use an applicable mating half not supplied CAUTION BACK EMF SUPPRESSION DIODE Risk of damag...

Page 45: ...relay of up to 24 V d c coil rating up to 20 mA 3 To monitor the fail status output connect the customer control equipment to the fail output pin 7 and to the pin 2 of the customer logic interface ma...

Page 46: ...control on page 43 and Figure Logic interface connections RS485 serial control on page 43 In given configuration the PC is the serial link master and the pump is the slave The distance over which the...

Page 47: ...electrical supply 3 Fuse 4 nEXT pump logic interface 4 7 2 Serial enable To send a serial message over the serial link activate the serial enable To activate the serial enable link the serial enable...

Page 48: ...command message sent will receive a response that follows status code or data return The pump accepts one message at a time The pump will only accept a new message when the response to the previous me...

Page 49: ...diagram for multi drop connection using RS232 interface 1 RS232 interface on control equipment 2 Buffer 3 pump 4 OR gate 1 RS232 interface on control equipment 2 Buffer 3 pump 4 OR gate Page 45 B8520...

Page 50: ...s as follows a valid start character character for a store operation or character for a query operation followed by a command an upper case alphabetical character followed by an object number has thre...

Page 51: ...cimal hex RPS flags Measured motor speed System status word Vent options S853 0 0 decimal Hard vent only when 50 speed S853 1 Controlled vent if 50 speed or hard vent if 50 speed 2 Hard vent if stop o...

Page 52: ...o full speed Set target speed to standby speed Timer options S870 S870 0 1 1 decimal Timer disabled Timer enabled Note that the timer is permanently enabled on ramp up Analogue signal options S871 S87...

Page 53: ...ASCII character r Returned error code Refer to Table Summary of commands that can be sent to the nEXT pump on page 47 sp space character string can have several ASCII characters X multi drop decimal A...

Page 54: ...to control the pump At the same time you can use the serial interface or the USB service port using the manufacturer s nST PC software to monitor different pump parameters Alternatively you can use t...

Page 55: ...stem OK 5 Optional LED indicator normal speed 6 Current limit resistor for LED 7 Optional serial link selector 8 pump 9 Optional voltmeter 10 Optional serial enable switch 11 Optional standby switch 1...

Page 56: ...ernative valve connected to the vacuum system on page 54 4 9 1 Manual vent valve A manual vent valve is supplied with the pump Do not open the manual vent valve too quickly as it is not possible to pr...

Page 57: ...the electrical connection instructions given in the Accessories Manual supplied with the TAV valve and refer to Figure Controller connector showing pin numbers on page 30 3 Connect the connector into...

Page 58: ...TAV solenoid valve can be operated from the TIC Refer to the TIC Instruction Manuals for more information 4 9 4 Alternative valve connected to the vacuum system If you use different vent valve make s...

Page 59: ...troller or Turbo Controller Air cooling accessories are available for the pump refer to Accessories on page 92 Install the air cooler as given in the instruction manual supplied with it If you use an...

Page 60: ...ity of the cooling water supply If necessary do the treatment and filtration 1 Connect the cooling water supply to the water cooler at the pump Use one of the two push fit connectors on the water cool...

Page 61: ...sary commands to configure the motor controller Use manufacturer s TIC Turbo and Instrument Controller or TIC Turbo Controller Refer to Configuring the nEXT pump using a TIC on page 62 for more inform...

Page 62: ...s follows Reply S 8 5 3 sp r cr The permanently enabled fan setting is now stored in the memory of the pump When the pump is shipped it is set up to operate a vent valve Send a query that follows to f...

Page 63: ...command To change the standby speed setting using a serial command send the command that follows characters d shows the value as a percentage of full rotational speed Command S 8 5 7 sp d d d cr The...

Page 64: ...emory of the pump To check what timeout period is set send a query as follows Command S 8 5 4 cr The reply will be as follows Reply S 8 5 4 sp d d cr The timer is permanently enabled during ramp up It...

Page 65: ...1 sp d cr The analogue output signal setting is now stored in memory of the pump To check which analogue output signal setting is enabled send a query as follows Command S 8 7 1 cr The reply will be a...

Page 66: ...and multi drop message protocol To check the multi drop address of the pump send the query as follows using wild card address 99 which means any node Command 9 9 9 9 S 8 5 0 cr The reply will be as fo...

Page 67: ...ls for information on how to do the settings Note You cannot configure the Analogue Output Options using the TIC You cannot assign a multi drop address to the pump with TIC Option is available to conn...

Page 68: ...pump Close the vent valve before you start the backing pump When you use the controller to control a TAV solenoid valve and operate with parallel control and monitoring you cannot close the valve bef...

Page 69: ...andby control input from the 0 V control reference on the logic interface connector 6 2 3 Stop the pump To stop the pump disconnect the start stop control input from the 0 V control reference on the l...

Page 70: ...e selected to suit the application 6 3 3 Standby speed If the pump operates at less than or more than the standby speed it will accelerate or decelerate until standby speed is reached To operate the p...

Page 71: ...d cr Here first number shows the voltage measured in 0 1 Volts i e divide the number by 10 to get the answer in Volts second number shows the current measured in 0 1 Amps third number shows the motor...

Page 72: ...rallel standby control and fail indication are disabled Serial communications are disabled RS485 Standby and fail lines are used for RS485 data Standby and fail lines are in RS485 high impedance state...

Page 73: ...bo Controller can be found on CD ROM part number D39700879 which is supplied with the TIC or TIC Turbo Controller 6 6 Decelerating and venting Switch off the backing pump immediately after applying th...

Page 74: ...data on page 17 for maximum permitted inlet pressure 6 7 2 Operation at high temperatures Temperature sensors in the pump mechanism and electronics are monitored by an internal system If the system d...

Page 75: ...l the vent valve if installed As the rotational speed of the pump decreases the power generated from the motor also decreases until it is no longer able to keep power to the logic interface or LEDs Th...

Page 76: ...ored before the timer period expires the pump will speed up to designated speed If the timer period expires the controller will go into fail condition and will display flashing error code 3 As above w...

Page 77: ...6 8 Bakeout nEXT200200 split flow pumps are not applicable for bakeout Page 73 B85200880_D Operation...

Page 78: ...en in the sections that follows The inlet screens inlet strainer and inlet flange seals are available as spares Refer to Spares on page 91 7 2 Bearing and oil cartridge maintenance Replace the oil car...

Page 79: ...rnal pump components Do not use abrasive materials to clean the pump parts If the inner side of the pump is contaminated it cannot be possible to get the necessary ultimate vacuum performance or the p...

Page 80: ...or both on page 78 No serial comms on page 78 Fail signal or standby signal not working on page 79 Yellow service LED is flashing a repeated sequence on page 79 The red alarm LED is on on page 79 The...

Page 81: ...rease cooling water flow or decrease the water temperature or do both Check that external heat sources such as system bakeout heaters are not excessive Cause The rotor does not rotate freely Remedy Th...

Page 82: ...llows or a vibration isolator in the backing line Cause The noise is irregular and increasing Remedy A defective bearing Contact us or the supplier Cause The pump makes a constant high pitched noise R...

Page 83: ...LED is on at other times restart the system upgrade the software if restarting the system does not correct the fault Fault The red alarm LED is flashing Cause A fail condition has activated Remedy No...

Page 84: ...follows Reply V 8 8 1 sp h h h h h h h h cr The service status word is made up of 8 hexidecimal digits To decode this word convert each digit into a 4 digit binary number as described in Decoding sys...

Page 85: ...or less than 1 hour per hour Decreased pump temperature is the primary factor in extending the controller life 8 4 Pump run time The run hours and recommended service time of the impeller in the pump...

Page 86: ...ts continuously or shows a flashing sequence If the error light is on continuously this shows a problem with the embedded software Restart the system If restarting the system does not clear the fault...

Page 87: ...ple fail conditions For example error flash code sLssLs signifies error 2 controller failed internal configuration and calibration operation and error 5 pump internal measurement system disconnected o...

Page 88: ...16 status flags are reserved by us Binary digits 0 0 1 0 0 0 1 0 1 0 0 0 0 0 1 1 0 0 0 0 0 0 0 0 0 0 1 0 0 0 1 0 3 1 3 0 2 9 2 8 2 7 2 6 2 5 2 4 2 3 2 2 2 1 2 0 1 9 1 8 1 7 1 6 1 5 1 4 1 3 1 2 1 1 1...

Page 89: ...example Indication 0 0 The pump has not failed 1 1 The pump is at rest 2 0 Speed is below normal speed 3 0 The vent valve is open 4 0 There is no active start command 5 1 Serial enable is active 6 0 S...

Page 90: ...signated full speed of the pump in revolutions per second Reply S 8 5 1 sp String 1 String 2 String 3 cr Send the query that follows to find out the boot loader software version Command S 8 6 8 cr The...

Page 91: ...2 Put the pump in its packing materials Seal the pump in a plastic bag with a applicable desiccant for fastest pump down when the pump is put back into service 3 Store the pump in cool dry conditions...

Page 92: ...tlets are capped off before disposal Dispose of the pump components and accessories safely and in accordance with all local and national safety and environmental requirements Be careful from the compo...

Page 93: ...your equipment to us for service or for any other reason you must send us a completed Declaration of Contamination of Vacuum Equipment and Components Form HS2 The HS2 form tells us if any substances f...

Page 94: ...follows and service parts are available Table 29 Service tool kits Service tool kit Item number Oil cartridge tool kit B80000812 Bearing tool kit B80000805 Table 30 Service kits Service kit Item numbe...

Page 95: ...ge seals and integrated inlet screens The pumps are supplied with an inlet seal The Item Numbers of replacement seals are given in Table Inlet flange seals and integrated inlet screens on page 91 Tabl...

Page 96: ...tor 10 Manual vent valve fitted 1 VRX vent restrictor 2 TAV solenoid vent valve 3 Purge plug fitted 4 PRX purge restrictor 5 DN10NW adaptor 6 WCX water cooling accessory 7 ACX nEXT air cooler axial 8...

Page 97: ...ctance and is applicable for larger vacuum systems with volume more than 10 litres Table 36 TAV vent valve and vent port adaptor Product Orifice Diameter Item Number TAV5 vent valve 0 5 mm B58066010 T...

Page 98: ...rge restrictor to the pump Table 39 PRX purge restrictor Item Item Number PRX10 purge restrictor B58065001 13 9 C clamp adaptor kit The NW25 exhaust and booster port of the pump can be removed and rep...

Page 99: ...TIC PC program is a PC based software that can be used to retrieve and set the user configurable parameters in the pump TIC PC program enables monitoring and data logging of the pumping system Page 95...

Page 100: ...edwardsvacuum com...

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