Edwards nEXT 55, Instruction Manual

Page: 44 / 116

Figure 19 Allowable pump orientation
4.2.3 Backing port connection
The pump is applicable to use with our rotary vane, scroll or diaphragm backing pumps.
System performance can change with the type of pump used. Contact us to select an
applicable backing pump for the application.
WARNING: PUMP OVER
‑
PRESSURE
Risk of injury or damage to equipment. To prevent over-pressure in the pump, do not
limit the exhaust line when you vent from a positive pressure gas supply.
CAUTION: BEARING LIFE
Risk of damage to equipment. Do not use the pump with a backing pressure less than
5 x 10
-4
mbar (5 x 10
-2
Pa). Lower backing pressures increases the evaporation rate of
the lubrication oil and can decrease the life of the bearings.
WARNING: UNSAFE DUCTING
Risk of injury or damage to equipment. Make sure that the ducting of the backing line
is safe to prevent leakage of oil mist or hazardous substances.
07/2021 - ©Edwards Limited Page 44 B8G000880_E
B8G000880_E - Installation