Edwards EXT75DX, Instruction Manual

Page: 16 / 72

B722-40-880 Issue H
Page 8 © Edwards Limited 2018. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
CAUTION
Do not use the DX pump to pump gases containing more than 20% oxygen unless the pump is gas purged. If gases
containing more than 20% oxygen are pumped, the lubricant will polymerise and the pump may fail prematurely.
Note: Concentrations of gases may be modified by the compression of the pump.
The pumps are designed to pump the following residual gases normally used in high-vacuum systems:
The pump can be used to pump oxygen and water vapour, subject to the following conditions:

Oxygen – when the pump is purged by an inert gas, oxygen can be pumped at concentrations above 20% by
volume. Refer to
Section 2.4 for Purge gas specification. However, if the pump is not purged, the oxygen
concentration must be less than 20% by volume.

Water vapour - ensure that water vapour does not condense inside the pump; refer to Section 3.9.3 .
If pumping a gas not in the list above, contact the supplier for advice. If the supplier is not contacted, the pump
warranty may be invalidated. The pump is not suitable for pumping aggressive or corrosive gases.

Air

Carbon dioxide

Methane

Neon

Propane

Krypton

Butane

Helium

Carbon monoxide

Ethane

Nitrogen

Argon

Hydrogen
Table 3 - DX pumps technical data
Parameter
EXT75DX
ISO63
EXT75DX
63CF
EXT75DX
NW40
EXT75DX
ISO100
Mass 3.0 kg 4.9 kg 2.9 kg 3.2 kg
Inlet flange DN63ISO-K DN63CF DN40NW DN100ISO-K
Outlet flange DN16NW DN16NW DN16NW DN16NW
Vent port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Purge port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Interstage port (optional) DN25NW and
DN16NW
- - -
Inlet pumping speed
N
2
61 l s
-1
61 l s
-1
42 l s
-1
66 l s
-1
He 57 l s
-1
57 l s
-1
49 l s
-1
59 l s
-1
H
2
53 l s
-1
53 l s
-1
48 l s
-1
54 l s
-1
Inlet compression ratio
N
2
>1 x 10
11
>1 x 10
11
>1 x 10
11
>1 x 10
11
He 1 x 10
6
1 x 10
6
1 x 10
6
1 x 10
6
H
2
5 x 10
4
5 x 10
4
5 x 10
4
5 x 10
4
Interstage pumping speed, for interstage
DX pumps with N
2
(DN16NW port)
70 sccm flow through interstage port 10 l s
-1
- - -
5 sccm flow through interstage port 3 l s
-1
- - -
Interstage pumping speed, for