D397-53-880 Issue C
Page 22
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Operation
4.7.22
Module 995 - MB Speed Relative
This module will only be valid on inverter driven pumps.
Output Bytes: None
Input Bytes:
Bytes 1 & 2 form a 16-bit unsigned number for actual MB speed in 0.1% of configured full speed.
Byte 3 is condition byte (see
4.7.23
Module 698 - MB Speed Demand
This module should only be used on inverter driven pumps.
Output Bytes: 2 Bytes which are a 16-bit unsigned number for MB speed demand in 0.1% of configured full speed.
Input Bytes:
None
4.7.24
Module 54 - MB Body Temperature
Output Bytes: None
Input Bytes:
Bytes 1 & 2 are a 16-bit signed number for MB temperature in °C.
Byte 3 is condition byte (see
4.7.25
Module 34 - Nitrogen Flow Switch
Requires Gas Module with this feature. This object only gives valid readings when the pump is running.
Output Bytes: None
Input Bytes:
Byte 1 Nitrogen Flow state. 0=Inadequate flow; 1=Adequate flow.
Byte 2 is condition byte (see
4.7.26
Module 68 - Active Utility Control
Active Utility Control (also called Green Mode) is used to reduce pump speed (saving energy) and Nitrogen flow, when
the chamber is not processing. The Drypump may need to be set up to operate in this mode. The Profibus module
must have control of the pump to turn AUC on or off. (See
). If the pump is not warm it will be in AUC
mode regardless of demand.
Output Byte:
Single byte is AUC control. Values: 1=On (speed and flow reduced); 2=Off (Speed and flow normal);
Other values - ignored.
Note:
Demand value is only sent from the Profibus module to the pump on change of state.
Input Bytes:
Byte1 AUC state
Values: 0=Off (normal)
1=Off going On
2=On going off fast
3=On going off slow
4=on (reduced).
2nd input byte is condition byte (see
4.7.27
Module 39 - Exhaust Pressure
Requires Gas Module with this feature.
Output Bytes: None
Input Bytes:
Bytes 1 & 2 form a 16-bit signed number for exhaust pressure in mbar.
Byte 3 is condition byte (see
