Edwards B756-51-991, Instruction Manual

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B756-50-880 Issue C
Page 4 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
TECHNICAL DATA
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times, vent the pump with dry, clean gases.
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulate 1 µm
Maximum concentration of oil 0.1 parts per million
Time for rotational speed to reach 50% >15 sec
Table 1 - Technical data
Parameter EXT70/70/200H Notes
Mass (system) >23 kg Eyebolt positions are supplied
for lifting and handling
Mass (Cartridge pump) 9 kg
Outlet flange DN25NW
Main inlet pumping speed (TOF)
N2
*
170 ls
-1
He
*
187 ls
-1
Ar
*
164 ls
-1
H2
*
169 ls
-1
Front-side inlet pumping speed (Transfer chamber)
N2
*
110 ls
-1
He
*
153 ls
-1
Ar
*
100 ls
-1
H
2
*
133 ls
-1
Back-side Inlet pumping speed (Tunnel optics)
N2
*
177 ls
-1
He
*
167 ls
-1
Ar
*
167 ls
-1
H
2
*
103 ls
-1
Maximum continuous inlet pressure
Air cooling at 35°C
†
Main inlet 1.6 x 10
-2
mbar (1.6 Pa) Air cooling is beneficial to the
EXDC160 controller
Transfer 3.36 x 10
-2
mbar (3.36 Pa)
Tunnel optics 3.62 x 10
-2
mbar (3.621 Pa)
Nominal rotational speed 60000 r min
-1
Starting time to 90% speed
EXDC160 115 sec
Noise level (at 1 metre) < 50 dB(A)
Recommended controller EXDC160 24 V
EXDC160 maximum VA input 250 VA
Quiescent power 25 W