© Edwards Limited 2015. All rights reserved.
Page 1
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Introduction
D146-71-880 Issue E
1
Introduction
1.1
Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards Industrial Active
Inverted Magnetron Gauge. You must use the gauge as specified in this manual.
Read this manual before you install and operate the gauge. Important safety information is highlighted as WARNING
and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement.
The following symbol appears on the AIM Gauge:
1.2
General description
The AIM Gauge, shown in
, is an inverted magnetron gauge head and gauge controller in a single compact
unit. The gauge operates as a cold cathode ionisation gauge, in which the pressure is measured indirectly as function
of the current which flows in a Townsend discharge maintained in the body tube.
The measurement range of the gauge is 1 x 10
-8
to 1 x 10
-2
mbar (AIM-SI1/AIM-SLI1) and 1 x 10
-9
to 1 x 10
-2
mbar
(AIM-XI1 /AIM-XLI1). The AIM Gauge vacuum connection is a NW25 flange.
The AIM Gauge requires a 13.5 to 36 V d.c. power supply; it has a 2 to 10 V d.c. analogue output which is related to
pressure. The AIM Gauge is compatible with all of the Edwards TIC (Turbo Instrument Controller), ADD (Active Digital
Display) and with the appropriate versions of the Edwards AGD’s (Active Gauge Displays). Alternatively, you can read
the AIM Gauge output signal with a voltmeter or analogue-to-digital converter.
We recommend that you do not operate the AIM Gauge unless the pressure in the vacuum system is 1 x 10
-2
mbar or
lower. A gauge enable signal is used to control the operation of the AIM Gauge; refer to
for more
information.
An 8-way electrical connector socket on the AIM Gauge (
, item 7) is used to connect the AIM Gauge to your
TIC, ADD, AGD or electrical supply and voltmeter. Electrical cables fitted with suitable connector plugs are available
as accessories.
A gauge identification signal is available on the electrical connector; this signal is used by Edwards Controllers to
identify which type of Active Gauge is connected.
The AIM Gauge has a set-point facility; the set-point signal is an open drain transistor (FET) output, which is on when
the pressure measured by the Gauge is below a pre-set pressure. You can adjust the pressure at which the set-point
output goes on; refer to
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Edwards offer European customers a recycling service.