Dressler 13150 400 V, User Manual

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HPG 13150 400 V (A) Communication Interfaces 4-59
HPG™ 13150 400 V RF Power Generator
Prerelease version
162
report
process
status
Reports process status. The controller
returns the following packet arranged as
follows.
1st status byte (bit flags):
• 0 = Reserved
• 1 = Unassigned
• 2 = Recipe run is active
• 3 = Reserved
• 4 = Reserved
• 5 = Output power (0 = Off, 1 = On)
• 6 = RF on requested (0 = Off, 1 = On)
• 7 = Set point status (0 = Within
tolerance, 1 = Out of tolerance)
2nd status byte (bit flags):
• 0 = End of target life
• 1 = End of tube lifetime
• 2 = Tube lifetime warning
• 3 = Overtemperature
• 4 = Overtemperature warning
• 5 = Overtemperature HV supply
• 6 = Overtemperature HV supply
warning
• 7 = Interlock open
3rd status byte (bit flags):
• 0 = Reserved
• 1 = Bus fault
• 2 = High bus fault
• 3 = Reserved
• 4 = Low bus fault
• 5 = Out of set point
• 6 = Reserved
• 7 = Filament error
(continued on next page)
0 4
Table 4-13. Host port commands (Continued)
Command
Description
Number of
Host Data
Bytes
Number of
Response
Data Bytes