Dressler 13150 400 V, User Manual

Page: 118 / 176

5-14 Installation, Setup, and Operation HPG 13150 400 V (A)
Dressler
®
HF-Technik GmbH
Prerelease version
To Select Load Power Regulation Through the User Port:
See pin 8 on the 25-pin User port , “RF forward/load power regulation” on
page 4-11 .
To Select Load Power Regulation through the Host Port:
If you are using RS-232 , PROFIBUS , or Ethernet to control and monitor the
HPG generator:
1. Select load power regulation mode:
Send one data byte for command 3 (see Table 4-13 on page 4-41 ).
4
7 = Load power regulation
2. Specify the output set point level for the regulation mode:
Send two data bytes, least significant byte first, for command 8
representing the set point level in watts (see Table 4-13 on page 4-41 ).
To Select Load Power Regulation Using the HPG Generator Front Panel:
Complete the following steps to select P
real
regulation mode using the front
panel:
1. Press the Program soft key. Control Settings appears on the display.
2. Press Change .
3. Press Control P
real
.
4. Select the desired power set point between 0 W and 15 kW into a 50
Ω
nonreactive load using the RF POWER rotary dial knob. Press the Increm
Auto soft key to toggle between dynamic increments (Auto) and several
fixed increments.
5. Press Ok to confirm.
6. Press Exit .
7. Press Execute .
The operating screen will then display the load power in watts, the reflected
power in watts, and the
Program and Display soft keys.
SETTING EXTERNAL POWER REGULATION MODE (DC
BIAS)
In external power regulation mode, the HPG Generator regulates RF power at
a constant DC self bias voltage in the plasma chamber. The RF output power
can be limited to protect your plasma chamber against high RF power. This
limitation is useful if there is no self bias voltage in the beginning of the
process.
This section explains how to select external power regulation using the User
Port , the Host port, or the front panel.