Dressler 13150 400 V, User Manual

Page: 116 / 176

5-12 Installation, Setup, and Operation HPG 13150 400 V (A)
Dressler
®
HF-Technik GmbH
Prerelease version
• External power regulation (DC Bias)
In external power regulation mode, the HPG Generator regulates RF
power at a constant DC self bias voltage in the chamber. The RF output
power can be limited to protect your plasma chamber against high RF
power. This limitation is useful if there is no self bias voltage in the
beginning of the process.
The regulation mode setting is retained in nonvolatile memory.
DETERMINING THE REGULATION MODE SETTING
The following procedures explain how to determine the regulation mode using
either the
Host port or the front panel.
To Determine the Regulation Mode Through the Host Port:
If you are using RS-232 , PROFIBUS , or Ethernet to control and monitor the
HPG generator, send command 154 (see Table 4-13 on page 4-41 ). The
controller will return one byte representing the regulation mode:
• 6 = Forward power regulation (P
forward
)
• 7 = Load power regulation (P
real
)
• 8 = External power regulation (DC Bias)
To Determine the Current Regulation Mode on the HPG Generator Front Panel
Display:
A description of the regulation mode setting will appear on the display, next to
either the power value in watts or the DC bias value in volts:
• f indicates forward power regulation
• real indicates load power regulation
• bias indicates external power regulation
For example, forward power regulation is selected in the following illustration.
The “f” indicates forward power regulation mode