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Auto Teaching System™ - (ATS)
Caution:
CyberOptics Corporation has made every effort to clean the Auto Teaching System (ATS)
and Charging Case. Removing it from its protective bag outside of a clean room will expose it to the
surrounding air. If you plan to use the ATS sensor in an ultra clean environment, you may have to
clean the wafer after removing it from its clean case.
Suitcase Contents
Teaching Unit
The WaferSense® ATS unit is designed with a wafer-like form factor, so it can fit in most wafer-handling
equipment. The unit is also vacuum compatible, so you can use it in vacuum process chambers.
Charging Case
The Charging Case provides a convenient place to store and protect the unit when not in use.
ATS Link & USB cable
The link is a Bluetooth® wireless transmitter/receiver that attaches to a laptop or personal computer with
a USB cable and communicates with the ATS unit.
Battery Charger
The battery charger is used for recharging the ATS Li-Ion battery. Only use the supplied power supply to
charge the ATS.
ATS unit
Charging Case
ATS Link and USB Cable
Battery Charger
