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Setting Station Information
The
Station Information
screen allows you keep track of each AMS run by entering operator name, tool and
station ID, and other relevant information about your AMS run. It is a good idea to 1) always fill in the
Set Station
Information
dialog
every
time you run the AMS through your wafer-manufacturing process, and 2) make filling in
this dialog part of your everyday record-keeping and quality-control procedures. If you need to refer to your log
files in the future, having this detailed information on file will make life much simpler.
Example
See the humidity example on page
Setting Station Information
To include user-specified information in your log files, do the following.
1)
Open MultiView and click the appropriate tab.
2)
Choose the
Settings
>
Set Station Information
menu item.
