CDX2000 / 13.56 MHz & 400 kHz Manual
© 2006 Comdel, Inc.
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Description / Specification
The CDX 2000's high frequency (HF) section provides up to 1000W of power, with optional frequencies anywhere
from 2 to 60 MHz. The low frequency (LF) section can deliver 1000W, with optional fixed or variable frequencies
ranging from 20 to 450 kHz. The LF section also features an optional phase locked output, which eliminates the
need for matching networks in many applications.
Sharing a common cooling system and DC power source, the CDX 2000 simplifies facility requirements and
reduces spare parts inventory. Each section responds to completely separate remote control commands.
The dual control board performs many functions, including: Pulse-width power control; protection circuitry; system
status indicators; power metering; remote interface; and protection circuitry.
A. Electrical
Specifications
Description
Specifications
AC Input Voltage:
187-229 VAC, no neutral, 3 Phase with PE ground
AC Line Frequency:
47-63 Hz
AC Input Current:
12 Amps max./Phase
Input Fusing:
20A circuit breaker
Output Characteristics:
(The following specifications, unless
otherwise stated, are for both 13.56 MHz
and 400 kHz outputs [for full AC input
voltage and frequency range])
•
0 to 1000 W continuous forward power at the units rear
bulkhead RF connector into a 1.25 VSWR load (all phases)
as reference to 50 ohms.
•
The unit shall be capable of simultaneously supplying
1000 W of power at 400 kHz into a 50 ohm power load and
1000 W of power at 13.56 MHz into a separate 50 ohm
power load.
•
The 13.56 MHz output shall deliver 0 to 1000 W
continuous forward power into a load which consists of a
50 ohm coaxial cable (any electrical length) feeding a
matching network that is connected to a nonlinear plasma
source.
•
The 400 kHz output shall deliver 0 to 1000 W continuous
forward power into a L-C parallel resonant load which is
inductively coupled to the above mentioned plasma. The
400 kHz RF feed is tapped into the inductor (of the L-C
resonator) so that the input impedance with the plasma
present is very close to 50 ohms at the resonance
frequency. The 400 kHz output will self tune to the
resonance of the L-C resonator by means of a
microprocessor controlled frequency tuning algorithm.
•
Each output section shall have at least 50 dB of isolation
from the other by means of internal DC power supply
isolation and RF shielding. This shall be measured with
each output loaded with a 50 ohm power load at full output
power.
•
The actual forward RF output power is to track the
command setpoint for any load conditions where the
reflected power is less than:
o
200 W for the 13.56 MHz output
o
200 W for the 400 kHz output
Accuracy/Regulation:
+/- 3.0% of setpoint, from 10% to 100% max output, as
measured by either the actual output power and/or the analog
read back signal on Pin 3.
