Specifications
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Chapter 13
Specifications
Device Parameters
Density
0.10 to 99.999 [g/cm3]
Z-Factor
0.10 to 15.00
Coating
Density
0.100 to 99.999 [g/cm3]
Z-Factor
0.00 to 15.000
Rate Set-point
0.00 to 9999.99 [Å/s]
Thickness Set Point
0.00 to 9999.99 [KÅ]
Proportional Gain
0.00 to 9999.00 [s]
Integral Time
0.00 to 99.9 [s]
Derivative Time
0.0 to 99.9 [s]
Rise to Soak
0.10 to 9999.9 [s]
Soak Time
0.00 to 9999.99 [s]
Soak Power
0.00 to 100.00 [%]
Rise to Predeposit
0.00 to 999.99 [s]
Predeposit Time
0.00 to 9999.99 [s]
Predeposit Power
0.00 to 100.0 [%]
Dwell Time
0.0 to 9999.9 [s]