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Chapter 11

Lock Screen

Clicking OK saves screen lock and password settings.

Resetting Password

To reset the Screen Lock controls password, click on the Screen Lock button and
enter the following code into password prompt:

45647kyswx94272fyshq

When the Screen Lock screen appears, enter a new password into the password fields.

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Summary of Contents for Eon

Page 1: ...user guide eon pc based controller for vers 3 0 10 software TM ...

Page 2: ...een Process List Layer List Layer Properties List Layer Properties Defined Chapter 4 Heater Control Heater Control Screen Heating Cycle List Heater Settings List Heater Control Buttons Heater Thermostat Temperature Power Indicators Advanced Settings Chapter 5 Settings Settings Screen Backup Restore Restore Defaults Period Control Relay Control Sensor Zeroing Log Sensor Alerts Select Sensor Type Au...

Page 3: ...rt an Aborted Process Logging Eon Status Zeroing the Sensors Activating Relay 1 and Relay 2 Switching to Manual Mode Exiting Eon Software Chapter 8 Status Status Screen Health Layer Material Frequency Rate and Thickness Zero Sensor Percentage Complete Source Power Temperatures Manually Zeroing Individual Sensors Chapter 9 Green Status Bar Status Indicators and Remote Process Control Chapter 10 Gra...

Page 4: ...ssword Protect Eon Screens Screen Lock Button Locking a Screen Setting a New Password Resetting the Password Chapter 12 Troubleshooting Chapter 13 Specifications Device Parameters Coating Measurement Process Display Communications Inputs and Outputs Contents 4 Contents ...

Page 5: ...Thickness of a Process Adding a Layer to a Process Copy a Layer Re ordering the Layers Changing Properties of a Layer Layer Properties List Removing a Layer Deleting a Layer Changing the Material for a Layer Selecting Sensor Heater Control Creating a Heater Cycle Cleaning the Sensor with a Heater Clean Settings Vertical Tool Bar Settings Appendix C About Eon LabVIEW Interface Software Updates Insp...

Page 6: ...72 Index Miscellaneous 6 Miscellaneous ...

Page 7: ... using thermocouples BNC Sensor Inputs Connects to sensor head via external oscillator Heater and RTD Input Output Controls Tempe sensor head 0 5 VDC Relay Output Connects the 0 5 VDC output for the deposition source the 24 VDC Mirage and the relay control Power Input Connects to 24 VDC power input RS 232 Connects Eon to PC Always use the provided USB to RS232 cable LED Indicator Displays status E...

Page 8: ...utputs See proper setup procedures in this manual and in the Tempe Eon quick reference guide Warning Only the provided power supply should be used with Eon Not doing so will damage product and void warranty Make sure power supply has a 24 VDC 8 Chapter 1 Eon at a Glance ...

Page 9: ...ation system this cooling accessory channels compressed cold air into the Tempe sensor in order to maintain consistent temperatures inside crystal compartment Chapter 1 Eon at a Glance Mirage power adapter Combines Mirage power supply and relay cables Mirage air cooling tube Delivers cold air into sensor head cooling tubes ...

Page 10: ...r supply and cable Input 100 200 VAC 50 60Hz 2 A Output 24V 3 75 A 90W Max 10 USB to RS 232 adapter Connects RS 232 cable and PC RS 232 extension cable Male to female serial cable Chapter 1 Eon at a Glance ...

Page 11: ...or Replaces the Eon internal oscillator 11 Software CD Contains Eon software suite Tempe Eon quick reference guide Instructs user in quickly assembling and integrating Eon into existing system Chapter 1 Eon at a Glance ...

Page 12: ...ed temperature the Mirage is triggered blasting the crystal compartment with cold air and returning the crystal surface to the desired temperature This type of regulated hot to cold ratio control mechanism is capable of sustaining a tolerance of 1 C Because it is triggered by a simple relay input the Mirage can be used as a cooling device in other applications Exhaust Port Quietly expels and dispe...

Page 13: ...perature allowing the Tempe sensor head to maintain any temperature within 50 500 C Quiet Operation While the cold air output is connected to the Tempe sensor head through a cooling line the Mirage reduces noise by muffling and dispersing the hot air output Versatility of Application Working from a simple relay input the Mirage can be used as a cooling device in alternative applications Warning Op...

Page 14: ...p of a fully assembled Tempe Eon system 2 Heater Control Cable to QCM The 4 pin LEMO connector provides heater control and TC measurement To install push until it clicks in place The other end is a DB 15 that connects to the DB 15 heater port on the Eon deposition controller Connecting to QCM 1 BNC Coaxial Cable to QCM Spin cable in place using cable shaft until resistance is felt Twisting cable s...

Page 15: ...M flange Featuring an interior detent cooling tube will snap securely in place 15 Chapter 2 Getting Started Connecting to Eon 1 BNC Coaxial Cable to Eon Slide coaxial connector onto BNC 2 Heater Control Cable DB 15 Connector to Eon Plug DB 15 connector into the Eon 15 pin male heater port Warning DO NOT allow operating temperature to exceed 500 C Equipment damage will likely result ...

Page 16: ...n 3 Eon Supplies Power to Mirage through Power Module The 3 pin solenoid module provides power to Mirage Tighten integrated screw after mating to Mirage The DB 9 connector on other end attaches to male I O port on Eon 1 Cold Air Output from Mirage to Tempe Slide the 3 16 tube onto the push to connect fitting on rear of the Mirage cooling system The Mirage provides a maximum output of 28 C 50 F bel...

Page 17: ...port 5 Relay Cable from Eon to Mirage Part of the DB 9 connector cable bundle that plugs into the Eon I O port and relay provides a 2 wire interface for switching Connecting Eon to PC 1 Install Eon Software onto PC Insert the accompanying Eon software CD into disc drive Follow prompts to install software onto PC ...

Page 18: ...anel Tighten integrated screws 3 RS 232 cable to USB Adapter Plug the other end of the RS 232 cable into the USB to RS 232 adapter Tighten integrated screws 4 Plug USB to RS 232 Adapter into PC Plug USB end of the USB to RS 232 adapter into PC 18 Chapter 2 Getting Started ...

Page 19: ...art Eon software and navigate to the Program Control screen to begin creating your processes See Chapter 3 If drivers are already installed simply update the drivers when installing software Use only the provided USB cable Ensure that the software has been fully installed before connecting Eon to your PC Reboot PC following Eon software installation ...

Page 20: ... of the available processes Create a new process Selecting the New button located below the Process List allows you to create and name a new process Choose either Sequential or Co Deposition enter name and press OK The process now appears on the Process List Delete a process Pressing delete will permanently delete a process Once deleted a process is only recoverable if it was backed up prior Proce...

Page 21: ...r Modify the name rate and or thickness Click OK 21 Chapter 3 Program Control Renaming a process Double click a process in the Process Layers List Copy Layer Select an existing layer and press Copy to produce a copy in the list Change order of layers On the Layers List click and hold a layer drag the layer up or down the list and release the layer where desired Remove Layer On the Layers List clic...

Page 22: ...change values for layers The Layer Property Value window allows you to enter or change the value of a layer property Note Material Source and Sensor operate differently than the other items listed on the Layer Properties List Open Layer Property Value window Double click a layer property at any time even during a process run Create new layer Select New button located below the Layers List You can ...

Page 23: ...ck the image to configure which sensors and sources will be used during deposition Select one of four configurations Source 1 è Sensor 1 Source 2 è Sensor 1 Source 1 è Sensor 2 Source 2 è Sensor 2 If the material being applied in your process is unlisted select Custom and click OK You can then manually enter your custom Density and Z Factor settings in the Layer Properties List Note also that when...

Page 24: ...e constant that controls the material deposition rate during PID phase Derivative The derivative time constant that controls the material deposition rate during the PID phase Dwell Time The time specified that follows the completion the predeposition process before activation of the PID This delay prevents the PID from engaging the source power prematurely giving the material a chance to reach the...

Page 25: ...e power percentage set for Predeposit Predeposit Time The time specifying how long Eon will maintain the set Predeposit Power before moving into dwell Predeposit Power The power percentage that the source will achieve during the Predeposit process Source The source Eon uses to control the selected layer material The Eon has two sources Source 1 and Source 2 Sensor Determines which sensor should be...

Page 26: ... Heater Settings List Activate heating cycle heater or heater shutoff Adding heater constants Before the heater can be engaged the heater constants specific to each sensor must be entered into the heater constant fields on the Settings screen Click the Settings button in the Screen Selection tool bar Under the Heater tab on the Settings screen enter the heater constant data into the Heater Constan...

Page 27: ...onent in this system be made fully operational In order to activate the heater the user must first enable the Mirage To do so first click Settings on the Screen Selection tool bar and then the Relay Control tab Select Mirage under Relay 2 in the Relay Control area The Mirage will now respond to commands issued from the Heater Control screen Enable Mirage Selecting correct sensor The Temperature Se...

Page 28: ...body temperature clean time and heater initialization Change a value on the Heater Settings List Double clicking on a selection brings up the Heater Settings Value window which allows the user to edit the value of the setting Entering an improper value raises a warning prompt requiring that the user correct the error or leave the original value in place ...

Page 29: ...The integral time constant that controls the rate during the PID phase Derivative The derivative time constant that controls the rate during PID phase Predeposition process vs time Soak 2 Rise to Soak Time The time specifying how long it takes Eon to raise heater power from 0 to desired soak power Soak Time Once the soak power is reached this is the time specified that the Eon sits at soak power b...

Page 30: ...e Activate Heater button provides no automated control over clean and cool times Otherwise just as with the Clean command the Activate Heater command engages Soak and Soak 2 and triggers the heater Selecting Heater Shutoff deactivates the Activate Heater command The Heater Shutoff button instantly deactivates the heater regardless of current process or cycle status Note If selection of Heater Shut...

Page 31: ...mperature The Set Point Temperature indicator displays the target temperature chosen by the user in the Heater Settings list The heater will engage or disengage as needed to reach this desired temperature The Sensor Temperature indicator displays the current temperature of the sensor The Heater Power indicator monitors the power levels the Eon is issuing the heater in order to raise or lower heate...

Page 32: ...ollowing settings will allow the heater to enter PID mode to achieve the desired temperature in this instance a temperature of 125 C Clean Settings Max Power 100 Proportional 15 Integral 5 Derivative 0 Rise to Soak Time s 1 Soak Time s 0 Soak Power 0 Rise to Soak 2 Time s 1 Soak 2 Time s 0 Soak 2 Power 0 Stabilization Time s 0 Heater Set Point C 125 Clean Time s 60 Cool Time s 30 Bypass settings ...

Page 33: ...orm numerous tasks such as backing up and restoring settings opening the log folder adjusting period and managing relays and sensor zeroing settings Backup Restore The Backup and Restore commands enable the user to save deposition processes heating cycles and general settings in Eon software Selecting Backup brings up the Backup screen Screen Selection Tool Bar Vertical Tool bar Settings Screen Ta...

Page 34: ...desired results Period Control The Period control tuner is used to adjust data collection frequency in increments of 0 1 seconds The period range is 100 milliseconds to 1 second For precision adjustment moving the slider produces an indicator showing the current value Value can also be entered using the number control The user can now restore deposition processes heating cycles and general setting...

Page 35: ...re the deposition process begins If Start Shutoff is disabled the relay remains in its present state when a deposition process begins 35 Chapter 5 Settings Relay Control The Relay Control panel features two relays with independent settings Applies during deposition only automatic control Entering a period value below 100 miliseconds produces the following warning screen Changing the measurement ma...

Page 36: ...is initiated Once Dwell Time concludes Auto Deposition begins This process is designed to prevent the Automatic Deposition from engaging prematurely providing a window of time between the shutter opening and the material reaching the substrate This selection is specifically designed for shutters Mirage Relay 2 Only When the heater is active Eon uses Relay 2 to control Mirage In order to activate t...

Page 37: ...user that the name is invalid Log files with incorrect characters in the name will not save 37 Chapter 5 Settings Opening saved log files Selecting the Open Log Folder opens the folder to which the logs are currently being saved By default this location is Public Documents EON_LOGS Warning Failing to zero a sensor before each layer or PID can produce flawed data Selecting Before Layer or Before PI...

Page 38: ...re alerts which occur when the crystal frequency drifts out of the 5 MHz 6 MHz range Although it is recommended that the sensor alerts generally remain enabled the user can disable the notifications in the instance that the crystal is being used in a testing environment 38 Chapter 5 Settings Using the Sensor Selector users must manually select the type of temperature sensor that is used inside the...

Page 39: ...tances undesireable results may occur To prevent this from occuring Eon has the ability to abort the process when rate fluctuations develop If the the current rate of the deposition goes above the maximum threshold or below the minimum threshold for longer than the specifed delay times the process will automatically abort so that if your preset rate is 25 Å s your Max Threshhold rate is 6 Å s and ...

Page 40: ...lick on the Source Selection Control to select the source that needs to be manually controlled 3 Clicking on the Source Selection control produces a dropdown list from which the user can select from available sources 4 Use the Source Power adjustment buttons to increase or decrease the power of the selected source in increments of 0 1 OR click directly onto the Source Power indicator and enter a s...

Page 41: ...be controlled by the PID regardless of the current process If a source is adjusted during a deposition the Eon will no longer control the source controlling the PID or the predeposition processes as the user has taken full control over the source This also applies to the heater Adjusting source power to the heater disables the feature in Eon that automatically regulates the temperature of the sens...

Page 42: ...enter Manual Mode or exit Eon software Starting a Deposition A deposition process can be started from any screen The process selected in the Process List on the Program Control screen or through the Remote Process Control panel is the process that will run Press the Start button to begin the process When the process is complete a Process Complete notification will appear Tip To create a new proces...

Page 43: ... the process to the process log folder Public eon_logs processes If a process is started while an Eon monitor log recording is in process Eon will automatically stop recording to the monitor log and begin recording to the process log Zeroing the Sensors The sensors can be zeroed from any screen Pressing the Zero All Thickness button zeros Sensor 1 and Sensor 2 at once Activating Relay 1 and Relay ...

Page 44: ...oftware Eon software can be exited from any screen Simply press the Exit button and when prompted press Exit again Warning The Abort button DOES NOT shut off the heater The Abort button is used to cancel a process in progress or manual mode only ...

Page 45: ...on on the progress of the process Data for each sensor is represented health layer frequency material rate thickness and percentage complete Important information such as source power and temperature is also displayed Zero Sensor Percentage Complete Health Layer Material Frequency Rate Thickness Source Heater Power Temperatures Status Bar Vertical Tool bar Screen Selection Tool bar ...

Page 46: ...material being applied During this process the material being applied is also displayed Frequency Sensor frequency Rate Rate of deposition Thickness Thickness of deposition applied to sensor Zero Sensor The Zero Sensor buttons zero corresponding sensor thickness to zero Percentage Complete The Percentage Complete indicators corresponding sensor thickness to zero Source Power The Source Power indic...

Page 47: ...es Body Temp The current temperature of the sensor body which is connected through TC1 TC2 Axillary thermocouple connection Manually Zeroing Individual Sensors Click the Zero Sensor button that corresponds to the sensor to be zeroed ...

Page 48: ... as Eon performs each task Status Bar Heater Indicator Displays the current status of the heater When Eon is supplying power to the heater the indicator turns bright red Time Indicator Displays the run time of the current active process The Time Indicator also retains the run time of the last completed or aborted process Remote Process Control When a process is selected the Status screen will disp...

Page 49: ...ck on Graphs in the Screen Selection tool bar The Graphs screen features line graphs for frequency temperature rate power and thickness Unlike real time data data in graph form can provide the user with a comprehensive historical perspective on a developing deposition process Frequency Temperature Color Key Power Rate Thickness Vertical Tool bar Screen Selection Tool Bar ...

Page 50: ...z Rate Displays the rate of the material application over time in Å s Thickness Displays the thickness of material application over time in kÅ Temperature Displays the temperature over time in C Power Displays the power of the sources and heater over time in percentages in Color Key The Color Key displays the color values representing the various devices being depicted on each graph ...

Page 51: ... Selection tool bar Locking a screen helps ensure that the controls and settings on each screen remain secure and under password protection Screen Lock Button To access the Screen Lock controls click on the Screen Lock button If a password is already in place the password prompt appears Entering the correct password will exit to the Screen Lock screen ...

Page 52: ...and Re Type Password fields must contain the same password Click OK to save new Screen Lock screen settings or Cancel to return to original settings If a password is NOT already in place the Screen Lock screen appears Use these controls to lock and unlock screens and change the Screen Lock password 52 Chapter 11 Lock Screen important Leaving password fields empty DOES NOT disable the Screen Lock A...

Page 53: ...assword settings Resetting Password To reset the Screen Lock controls password click on the Screen Lock button and enter the following code into password prompt 45647kyswx94272fyshq When the Screen Lock screen appears enter a new password into the password fields ...

Page 54: ...r Heater shuts off prematurely Clean command improperly selected Use Activate Heater command for your heating cycle Heater runs without stopping Activate Heater improperly selected Use Clean command for your heating cycle At program start a Wrong Firmware notification appears even though the firmware is current Noise in the RS232 line Make sure the RS232 line is connected and secure Separate the R...

Page 55: ...Rate Set point 0 00 to 9999 99 Å s Thickness Set Point 0 00 to 9999 99 KÅ Proportional Gain 0 00 to 9999 00 s Integral Time 0 00 to 99 9 s Derivative Time 0 0 to 99 9 s Rise to Soak 0 10 to 9999 9 s Soak Time 0 00 to 9999 99 s Soak Power 0 00 to 100 00 Rise to Predeposit 0 00 to 999 99 s Predeposit Time 0 00 to 9999 99 s Predeposit Power 0 00 to 100 0 Dwell Time 0 0 to 9999 9 s ...

Page 56: ... Crystal Frequency Range 6 MHz Filter 0 1 Alpha 0 1 Process Display Film Selected Material Layer Layer Being Deposited Rate 0 00 to 99 9 Å s Thickness 0 00 to 999 9 KÅ Frequency 3 00 to 6 500 000 Hz Run Time Hh mm ss Temperature 0 to 999 9 C Health 0 00 to 100 Communications Factory Set RS 232 PC version ...

Page 57: ...ter 13 Specifications Inputs and Outputs Voltage input 24 VDC RS232 Input One Half Duplex Sensor Input Two BNC Connector TC Output 2 Type K Connectors 0 5 VDC Control Output One DB9 Connector Dual Relay Output ...

Page 58: ... Tempe Eon System Configuration Rendering illustrates basic connections of Tempe Eon system Mirage Air Cooling System Eon Controller substrate source shutter Tempe Self Cleaning Sensor Eon software installed on your PC Remote oscillator TC cable Relay Source 2 ...

Page 59: ...n 5 Click OK 6 This process is now selectable through the Process List or the Remote Process Control panel on the Green Status bar Note In order for the program to update the source power the user must enter a new value and then click away from the Source Power indicator Renaming a process 1 Press the Program button on the Screen Selection tool bar 2 Double click the process you wish to rename 3 I...

Page 60: ...rical order from top to bottom Changing properties of a layer 1 Press the Program button on the bottom of the screen 2 Select the process in the Process List containing the layer that requires editing 3 From the Process Layers list select the layer to be edited 4 Double click on the Property to be edited 5 In the new window that opens enter the new value for the property 6 Press OK Note If an inco...

Page 61: ... of the PID This delay prevents the PID from engaging the source power prematurely allowing the material to reach the sensor No material is applied to the sensor directly after the predisposition process finishes for the brief time it takes for the material to initially transition from the source to the crystal in the event that a shutter is present Rise to Soak Time The time specifying how long i...

Page 62: ...elect the layer that needs to be removed 4 Press Remove directly beneath the Process Layers list Note Removing the layer only removes the layer from the Process Layers list The layer can be re added to the list by pressing New and selecting the layer from the dropdown menu See Adding a process on the first page of this appendix Deleting a Layer 1 Press the Program button on Screen Selection tool b...

Page 63: ...ource setup is displayed 6 Click OK Heater control Activating the heater 1 Press the Heater Control button to enter the Heater Control screen 2 Select the Process list and then the heater process to be run 3 Press the Activate Heater button under the Settings list Shutting off the heater 1 Press the Heater Control button to enter the Heater Control screen 2 Press the Heater Shutoff button under th...

Page 64: ...n that the Eon will raise the source power from 0 to the desired soak power Soak Time Once the soak power is reached this is the time the Eon will sit at soak power before continuing to Rise to Predeposit Soak Power This is power percentage that the source will achieve during the soak process Rise to Soak 2 Time This is the amount of time that the Eon will take to change the current source power t...

Page 65: ... When prompted to Resume or Restart press Resume Logging the status of the Eon 1 Press the Log button on the vertical tool bar Note Eon status can be logged to a monitor log from any screen Pressing the Log button saves a monitor log to the monitor log save folder MyDocuments eon_logs monitoring When a process is initiated Eon software will automatically begin recording the real time status of the...

Page 66: ...es by unselecting the box or pressing enter Note The heater constants ensure that the heater functions correctly Each heater has its own unique values These values can be found in the documentation that ships with the product If these values are unavailable please contact Colnatec Support at support colnatec com or call 480 634 1449 Disable Enable Sensor Failure Alerts 1 Press the Settings button ...

Page 67: ...nd will deactivate at the end of each material Predeposit The relay will activate during the predeposit phase of the deposition process for each layer material The relay will then shutoff at the end of the deposition process Auto Deposition The relay will activate during the dwell phase just before the PID activation This allows the dwell time to occur between shutters release and PID activation M...

Page 68: ...e for any injury resulting from product misuse modification or disassembly Warranty Label If the warranty label has been tampered with VOID will appear where the warranty label was originally placed If this is visible at the time of arrival it is important that you contact Colnatec immediately after receiving the product 68 Appendix C Safety Handling Support ...

Page 69: ...rs a simple LabVIEW interface that provides an operating environment that is intuitive efficient and impressive The Eon is easy to set up right out of the box Software Updates The Eon interface software can be upgraded on site to provide software improvements There will be notifications when these updates become available Inspection and Initial Setup Examine Eon for any signs of physical damage Al...

Page 70: ...511 W Guadalupe Road Suite 23 Gilbert AZ 85233 480 634 1449 support colnatec com www colnatec com 70 Appendix C Safety Handling Support Contact Colnatec Support ...

Page 71: ...Tooling Factor D Appendix 71 Appendix D Tooling Factor Crystal Source ...

Page 72: ... Backup Restore 33 Body temperature 28 31 C Clean 30 32 54 64 Clean Settings 32 64 Coating 55 Color Key 49 50 Communications 56 Copyright 77 D Delete Layer 62 Deleting a Layer 62 Deleting a Process 59 Drivers 19 E Eon at a Glance 7 8 9 10 11 12 13 Eon Connectors 7 Eon System Assembly 14 Exiting 41 44 Exiting Eon Software 44 Exiting Manual Mode 41 F Frequency 34 38 45 46 49 50 Index 72 Index ...

Page 73: ...2 59 63 64 Control Buttons 30 Control Screen 26 Power 31 40 46 Settings 26 28 29 30 31 Settings List 26 28 29 30 Shutoff 26 Thermostat 26 31 Heating Cycle 26 27 30 32 54 Heating Cycle List 26 27 I Inputs and Outputs 57 Inspection Initial Setup 69 L Layer 20 21 22 25 37 45 46 54 60 61 62 63 67 New 22 37 60 67 Deleting 61 Moving change order 21 Layer Properties Defined 24 Layer Properties List 20 21...

Page 74: ...rotect Eon Screens 51 Percentage Complete 45 46 Period Control 34 Predeposition 36 41 Process Display 56 Process List 20 42 59 60 Program 20 21 22 23 24 25 42 59 60 62 63 Program Control 20 21 22 23 24 25 42 Program Control Screen 20 Q Quick Info 59 R Rate 21 24 29 45 49 50 60 61 64 Relay Control 27 35 67 Removing a Layer 62 Restore 33 34 67 Restore Defaults 34 67 Resume or Restart an Aborted Proc...

Page 75: ... 46 59 61 63 64 Source Power 40 45 46 59 Starting a Deposition 42 Status 30 43 48 65 Status 35 43 45 46 47 48 59 65 Status Indicators and Remote Process Control 48 Status Screen 45 Support 38 66 68 69 70 Manual Mode 40 T TC Thermocouple 47 57 Tempe Eon System 58 Tempe Eon System Configuration 58 Temperature Power Indicators 26 31 Temperatures 45 47 Thickness 21 45 46 49 50 60 66 67 Time 22 24 25 2...

Page 76: ...Index 76 Index V Vertical Tool Bar 42 43 44 W Warranty 68 69 Z Zeroing the Sensors 43 Zero Sensor 45 46 47 ...

Page 77: ...s no condition or warranty expressed or implied about the fitness of this technical manual or accompanying hardware product Colnatec reserves the right to make changes to this technical manual or accompanying hardware or design without notice to any person or company Colnatec shall not be liable for any indirect special consequential or incidental damages resulting from the use of this technical m...

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