
4
4
4-80
4-80
Parts Replacement and Cleaning > Laser Exposure System > Removing the Laser Scanner Unit > Preparations
Parts Replacement and Cleaning > Laser Exposure System > Removing the Laser Scanner Unit > Preparations
Removing the Dust-blocking Glass Cleaning Pad
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Preparations
1) Open the Front Cover.
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Procedure
1) Remove the Glass Cleaning Tool.
2) Remove the Dust-blocking Glass Cleaning Pad.
F-4-84
F-4-85
Removing the Laser Scanner Unit
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Preparations
1) Open the Front Cover, Right Lower Cover and Right Upper Cover.
2) Remove the ITB Cover.
• 2 screws (loosen)
CAUTION:
• Do not touch the ITB surface.
• When installing the ITB Cover, be sure to push it to the left. If the pushing is
insufficient, the plate is not inserted to the slit of the ITB Cover, which may cause the
damage of the sensor.
F-4-86
F-4-87