BUSCH 0659230708, Instruction Manual

Page: 76 / 80

Technical data and dimensions
Conversion table: gas throughput units
11.4 Dimensions
Torr
mm Hg
1.33 1.33 · 10
-3
133.32 1.33 0.133 1
1 Pa = 1 N/m
2
mbar·l/s Pa·m
3
/s sccm Torr·l/s atm·cm
3
/s
mbar·l/s 1 0.1 59.2 0.75 0.987
Pa·m
3
/s 10 1 592 7.5 9.87
sccm 1.69 · 10
-2
1.69 · 10
-3
1 1.27 · 10
-2
1.67 · 10
-2
Torr·l/s 1.33 0.133 78.9 1 1.32
atm·cm
3
/s 1.01 0.101 59.8 0.76 1
mbar bar Pa hPa kPa Torr
mm Hg
139 253
375
350
547
389
227
122
90
364
76
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