Adjustment of a Chamber on the D8
DOC-M88-EXX268_V1_12.2016
43
Alignment - Continuation
1. Perform a rocking curve scan from -2° to 2°, with a 0.01° step size.
Figure 4.6: Rocking curve at correct sample height
2. Determine the ZI-value (figure
Rocking curve to check chamber rotation error [
and insert it as a deflection angle in
CONFIGURATION | Basic instrument
information | Device | Goniometer | Center | PAAR_Z_HTK1200
for the
temperature stage (see figure above).
3. Save the configuration and activate it.
4. Repeat point 1 and 2 and check if the deviation is within the range of 0° ± 0.02°.
5. Repeat step
Height check
for a final height check.
Summary of Contents for Anton Paar
Page 6: ...Contents 6 DOC M88 EXX268_V1_12 2016 ...
Page 12: ...List of Figures 12 DOC M88 EXX268_V1_12 2016 ...
Page 26: ...General Remarks 26 DOC M88 EXX268_V1_12 2016 ...
Page 34: ...Vacuum Equipment 34 DOC M88 EXX268_V1_12 2016 ...
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