1-2
Section 1 - Introduction
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Brooks
®
Digital MFC's and MFM's
Broad Array of Communication Options
Brooks
®
offers traditional 0-5 volt and 4-20mA analog options as well as
RS-485 digital communications (“S-protocol”, based on HART). Brooks also
offers control interface via digital network protocols like DeviceNet, a high-
speed (up to 500k baud) digital communication network, or FOUNDATION
®
Fieldbus. Brooks’ communication capabilities and device-profiles have been
certified by the ODVA (Open DeviceNet Vendor’s Association) and the ITK
(Interoperability Test Kit.) Other network protocols are in development. Talk to
your Brooks representative about your specific needs.
Reduced Cost of Ownership
The SLAMf Series allows multi-gas and multi-range capabilities to reduce
customer inventory. Storage and pre-programming of up to 10 gas
calibrations easily permits users to switch between different gases and
ranges on a single device.
1-4 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges
Models SLAMf50/SLAMf60
Any FS range from 0-3 ccm to 0-30 lpm N
2
eq.
Models SLAMf51/SLAMf61
Any FS range from 20 -100 lpm N
2
eq.
Up to 200 lpm H
2
flow possible
Models SLAMf53/SLAMf63
Any FS range from 100 -2500 lpm N
2
eq.
Control Range
Turndown 50:1
Accuracy
±1.0% of rate (20% - 100% FS)
±0.2% FS (below 20% FS) up to 1100 lpm (N
2
eq.).
Flow ranges above 1100 lpm and up to 2500 lpm (N
2
eq.): ±1.0% of full scale
(Optional: ±0.7% of rate ±0.2% FS ("S-Series") up to 1100 lpm (N
2
eq.).
Repeatability
±0.20% of rate
Settling Time/Response Time
< 1 second to within ±2% FS of final value for a
0-100% command step (better on request)
for flow rates up to 100 lpm N
2
eq.
< 3 seconds to within ±2% FS of final value for a
0-100% command step (better on request)
for flow rates greater than 100 lpm N
2
eq. up to 2500 lpm N
2
eq.
