1-1
Section 1 - Introduction
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Brooks
®
Digital MFC's and MFM's
1-1 Scope
Thank you for purchasing a Brooks Instrument Digital Mass Fow Product.
This manual, X-TMF-SLAMf-MFC-eng is an installation and operation
manual for your instrument.
If you have purchased a Brooks
®
Digital Series with DeviceNet
Communications, a separate DeviceNet Instruction Manual shall also be
provided as part of the operating documentation.
1-2 Purpose
The Brooks Digital Series are mass flow measurement devices designed
for accurately measuring (MFM's) and rapidly controlling (MFC's) flows of
gases. This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks
®
MFC
and MFM. This manual is organized into the following sections:
Section 1
Introduction
Section 2
Installation
Section 3
Operation
Section 4
Maintenance & Troubleshooting
Section A
CE Certifications
Back Cover
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these Smart
II
Digital products.
1-3 Description
Brooks Instrument’s SLAMf Series is an elastomer sealed digital thermal
mass flow measurement and control instrument, which offers unparalleled
flexibility and performance. The SLAMf Series MFC is designed for use in
advanced gas handling systems. The result is the most accurate,
repeatable, and responsive MFC on the market today!
Wash-down Enclosure
The SLAMf Series comes equipped with an IP66 / NEMA4X rated
enclosure. This makes these instruments perfect for wash-down or outdoor
environments. So no matter how harsh the surroundings, the SLAMf Series
keeps the process under control.
Wide Flow Range
The SLAMf Series covers an extremely broad range of flowrates. Model
SLAMf50 can have a full scale flow as low as 3 ccm. With a high turndown
ratio of 50:1, accurate gas flow can be measured or controlled down to
0.06 ccm! Model SLAMf53 can meter or control gas flow up to 2500 lpm.
Fast response Performance
The all-digital electronics and superior mechanical configuration in the
SLAMf Series provide for ultra fast response characteristics. Settling times
are specified as less than one second, but Brooks’ Adaptive Valve Control
can achieve response times of 0.2 sec.
