Brooks SLAMf50, Installation And Operation Manual, Page: 6 / 60

ii
Brooks
®
Digital MFC's & MFM's
Contents
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Section 4 Maintenance & Troubleshooting
4-1 Maintenance and Troubleshooting ............................................................................................. 4-1
4-1-1 System Checks .......................................................................................................................... 4-2
4-1-2 Cleaning Procedures .................................................................................................................. 4-5
4-1-3 Calibration Procedure ................................................................................................................ 4-5
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................ A-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
Figures
Figure Page
Number Number
1-1 Open Collector Alarm Output. .................................................................................................... 1-6
1-2 General Wiring ........................................................................................................................... 1-6
1-3 Response Performance of Brooks Digital MFC ......................................................................... 1-7
1-4 Linear Ramp-up or Ramp-down from 200% per Second to 0.5% per Second Setpoint Change ..... 1-8
1-5 Analog, DeviceNet and F
OUNDATION
Fieldbus Terminal Layouts ................................................. 1-12
1-6 Model SLAMf50D Digital I/O DeviceNet MFC ............................................................................ 1-13
1-7 Model SLAMf50F Digital I/O F
OUNDATION
Fieldbus MFC ............................................................. 1-13
1-8 Model SLAMf51 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) ............................................... 1-14
1-9 Model SLAMf53 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) ............................................... 1-14
1-10 Model SLAMf60 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) ............................................... 1-15
1-11 Model SLAMf61 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) ............................................... 1-15
1-12 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) ............................................... 1-16
1-13 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) with Flanged Connections ........ 1-16
2-1 Analog I/O Pin Connctions, Top View Uncovered ....................................................................... 2-6
2-2 Common Electrical Hookups, Voltage I/O Version ...................................................................... 2-6
2-3 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ............ 2-7
2-4 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) .................... 2-7
3-1 Flow Sensor Operational Diagram (VCR TM End Connections Shown) ........................................ 3-4
3-2 Externally Accessable Adjustment for all Meters/Controllers ...................................................... 3-4
4-1 Bench Troubleshooting Circuit .................................................................................................... 4-3
Tables
Table Page
Number Number
1-1 Flow Ranges and Pressure Ratings ........................................................................................... 1-3
1-2 Calibration Select Signal ............................................................................................................ 1-8
1-3 Analog I/O Pin Connections ....................................................................................................... 1-8
2-1 Recommended Filter Size .......................................................................................................... 2-3
3-1 Typical Resistor Values for Calibration Selection ....................................................................... 3-5
4-1 Sensor Troubleshooting ............................................................................................................. 4-5
4-2 Troubleshooting .......................................................................................................................... 4-6