4-5
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Brooks
®
Digital MFC's and MFM's
Table 4-2 Troubleshooting
Trouble
Possible cause
Check/Corrective Action
Output stays at zero
Clogged Sensor
Clean sensor. Refer to cleaning procedures
(regardless of Setpoint) and
(Section 4-1-2).
there is flow through the
meter/controller
Defective electronic board
Contact Brooks Instrument
Flow cannot be achieved
Clogged Control Valve
Clean the control valve (Section 4-1-2) or
regardless of Setpoint.
return the device to the factory
(applicable to MFC)
Valve override input is grounded
Check the valve override input (Pin 12)
Defective electronic board
Contact Brooks Instrument.
Output signal stays at approx.
Valve leaks or is stuck open
Clean and/or adjust control valve
5.5 Vdc or 22 mA
(applicable to MFC)
(Section 4-1-2).
(regardless of Setpoint) and
there is flow through the
+15 V applied to the valve
Check the valve override terminal (Pin 12)
meter/controller
override input
(applicable to MFC)
Defective PC board
Contact Brooks Instrument
Output signal follows Setpoint
Control valve leaks or is stuck
Clean the control valve or return the device
at higher Setpoints but will not
open.
to the factory (Section 4-1-2).
go below 2%
Output signal follows Setpoint
Insufficient inlet pressure or
Adjust pressures, inspect in-line filters and
at lower Setpoints, but does
pressure drop
clean/replace as necessary.
not reach full scale
Partially clogged sensor
Clean sensor, see cleaning procedures
(Section 4-1-2).
Partially clogged valve
Clean the control valve (Section 4-1-2) or
(applicable to MFC)
return the device to the factory, see
cleaning procedures
Valve out of adjustment
Contact Brooks Instrument
(applicable to MFC)
Valve guide spring failure
Contact Brooks Instrument
(applicable to MFC)
Instrument grossly out of
Partially clogged sensor
Clean sensor, see cleaning procedures
calibration. Flow is higher than
(Section 4-1-2).
desired.
Instrument grossly out of
Partially clogged restrictor
Replace or clean restrictor
calibration. Flow is lower than
desired.
Controller oscillates
Pressure drop or inlet pressure
Adjust pressures to original specifications
(applicable to MFC)
deviates from calibrated values
Valve out of adjustment
Contact Brooks Instrument
Unstable inlet pressure
Check external pressure regulator
Defective PC board
Contact Brooks Instrument
