i
Brooks
®
Digital MFC's & MFM's
Contents
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Page
Number
Section 1 Introduction
1-1
Scope ......................................................................................................................................... 1-1
1-2
Purpose ...................................................................................................................................... 1-1
1-3
Description ................................................................................................................................. 1-1
1-4
Specifications ............................................................................................................................. 1-2
Section 2 Installation
2-1
General ...................................................................................................................................... 2-1
2-2
Receipt of Equipment ................................................................................................................. 2-1
2-3
Recommended Storage Practice ............................................................................................... 2-1
2-4
Return Shipment ........................................................................................................................ 2-2
2-5
Transit Precautions .................................................................................................................... 2-2
2-6
Removal from Storage ............................................................................................................... 2-2
2-7
Gas Connections ........................................................................................................................ 2-2
2-8
In-Line Filter ............................................................................................................................... 2-3
2-9
Installation .................................................................................................................................. 2-3
2-10
Electrical Interface ...................................................................................................................... 2-5
2-11
Operation Check Procedure (Analog I/O) .................................................................................. 2-8
2-12
Digital I/O: DeviceNet or F
OUNDATION
Fieldbus .......................................................................... 2-9
2-13
DeviceNet I/O Assemblies .......................................................................................................... 2-9
Section 3 Operation
3-1
Overview .................................................................................................................................... 3-1
3-2
Theory of Operation for Flow Measurement .............................................................................. 3-1
3-3
Features ..................................................................................................................................... 3-2
3-4
Analog I/O Mode of Operation .................................................................................................... 3-3
3-5
Communications Features ......................................................................................................... 3-6
3-5-1 RS-485 Communications Features (Analog versions only) ........................................................ 3-6
3-5-2 DeviceNet Communications Features ........................................................................................ 3-6
3-5-3 F
OUNDATION
Fieldbus Communications Features ...................................................................... 3-7
3-6
Alarms and Warnings (Analog versions only) ............................................................................ 3-7
3-6-1 Alarms and Warnings (Analog versions only) ............................................................................ 3-8
3-6-2 Diagnostic Alarms (Analog versions only) .................................................................................. 3-9
3-6-3 General Alarms and Warnings (Analog versions only) .............................................................. 3-10
3-7
Calibration/Configuration Sets ................................................................................................... 3-12
3-8
Special Features ....................................................................................................................... 3-12
3-8-1 Setpoint Ramping ...................................................................................................................... 3-12
3-8-2 Low Setpoint Command Cutoff ................................................................................................. 3-13
3-8-3 Low Flow Output Cutoff ............................................................................................................. 3-13
3-8-4 Flow Output Damping ............................................................................................................... 3-13
3-8-5 Adaptive Control ........................................................................................................................ 3-13
3-8-6 Flow Totalizer ............................................................................................................................ 3-13
3-8-7 Flow Output Conditioning .......................................................................................................... 3-13
3-8-8 Flow Signal Lock-in ................................................................................................................... 3-13
3-9
PC-based Support Tools ........................................................................................................... 3-13