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Section 1 - Introduction

Installation and Operation Manual

X-TMF-SLAMf-MFC-eng

Part Number: 541B032AAG

August, 2009

Brooks

®

Digital MFC's and MFM's

Figure 1-13 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) with Flanged Connections

Figure 1-12 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)

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Summary of Contents for SLAMf50

Page 1: ...s and MFM s Model SLAMf50S Analog I O MFC with RS 485 Model SLAMf53D Digital I O DeviceNetTM MFC Brooks Models SLAMf50 SLAMf51 SLAMf53 Mass Flow Controllers and Models SLAMf60 SLAMf61 SLAMf63 Mass Flo...

Page 2: ...ke substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by...

Page 3: ...arch and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior pe...

Page 4: ...Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 5: ...3 1 Overview 3 1 3 2 Theory of Operation for Flow Measurement 3 1 3 3 Features 3 2 3 4 Analog I O Mode of Operation 3 3 3 5 Communications Features 3 6 3 5 1 RS 485 Communications Features Analog ver...

Page 6: ...1 14 1 9 Model SLAMf53 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 14 1 10 Model SLAMf60 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 15 1 11 Model SLAMf61 with Cable Gland PG11 M20 x 1 5 1 2 NPT 1 15 1 1...

Page 7: ...anual be read in its entirety before attempting to operate or repair these Smart II Digital products 1 3 Description Brooks Instrument s SLAMf Series is an elastomer sealed digital thermal mass flow m...

Page 8: ...range capabilities to reduce customer inventory Storage and pre programming of up to 10 gas calibrations easily permits users to switch between different gases and ranges on a single device 1 4 Specif...

Page 9: ...41 bar at 2500 lpm N2 eq consult factory for details High DP valve 30 to 290 psi 20 bar maximum Low DP valve 7 5 to 30 psid 2 bar max Minimum pressure drop depends on gas and FS flow rate consult fact...

Page 10: ...itions must be used when reporting volumetric flow rates in mass flow terms For example the unit of measure SCCM standard cubic centimeters per minute refers to a volumetric gas flow at a standard ref...

Page 11: ...g I O version only Voltage and current type outputs but not both simultaneously are supported Flow output types are selectable as follows 0 5 Vdc 1 5 Vdc 0 20 mA 4 20 mA Flow Output Voltage Specificat...

Page 12: ...erride Signal Specifications Analog I O Versions only Input Impedence 800 k Absolute Max Input 25 Vdc VOR 25 Vdc without damage 5 Volt Reference Signal Analog I O versions only A 5 Vdc reference outpu...

Page 13: ...eature adaptive optimized PID control including fast response and linear ramp up and or ramp down control characteristics Calibration Selection Signal Analog I O versions only Select one of ten gases...

Page 14: ...t Installed 6 124 2 Shorted 7 80 6 3 665 8 52 3 4 324 9 30 9 5 191 10 15 Table 1 3 Analog I O Pin Connections Table 1 2 Calibration Select Signal Function PIN Setpoint Command Input 1 Flow Signal 0 1...

Page 15: ...not equipped with RS 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an RS 485 network to a standard pc The RS 485 bus a daisy chain netw...

Page 16: ...for Internal firmware integrity Non volatile memory Check for non volatile memory integrity RAM Check for RAM integrity Zero Drift Valve Leak by Check for flow leak by or sensor zero drift Device Over...

Page 17: ...290X II 3 G Ex nA II T4 II 3 D Ex tD A22 IP66 T 850 C Per EN 60079 0 2006 EN 60079 15 2005 EN 61241 0 2006 EN 61241 1 2004 IECEx Non Sparking KEM 08 0043X Ex nA II T4 Ex tD IP66 T 850 C Per IEC 60079...

Page 18: ...rence 5 Vdc Output 11 Valve Override Input 12 Calibration Select Input 13 RS 485 Common B 14 RS 485 Common A 15 DeviceNet Terminal Layout PC based Support Tools Brooks Instrument offers a variety of P...

Page 19: ...tallation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s Figure 1 7 Model SLAMf50F Digital I O FOUNDATION Fieldbus MFC Figure 1 6 Model SLAM...

Page 20: ...n and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s Figure 1 8 Model SLAMf51 with Cable Gland PG11 M20 x 1 5 1 2 NPT Figure 1 9 Model SLAMf53 w...

Page 21: ...and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s Figure 1 10 Model SLAMf60 with Cable Gland PG11 M20 x 1 5 1 2 NPT Figure 1 11 Model SLAMf61...

Page 22: ...on Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s Figure 1 13 Model SLAMf63 with Cable Gland PG11 M20 x 1 5 1 2 NPT with Flanged Connections Figure 1 12 M...

Page 23: ...BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710...

Page 24: ...rned to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the instrument This is required bef...

Page 25: ...ry atmosphere relatively free from shock and vibration b Leave sufficient room for access to Self zero function push button c Install in such a manner that permits easy removal if the instrument requi...

Page 26: ...e spike to the bellows spring and main valve diaphragm A pressure spike could deform the bellows damage the diaphragm or blow out the bellows O ring seal This typically results in a failure to shutoff...

Page 27: ...and the power supply These commons are electrically connected together on the PC board Analog I O Versions Signal Common Signal Output Voltage or Current 13 5 27 Vdc Supply Setpoint Input Voltage or...

Page 28: ...nt Common BLACK 10 2 Flow Signal 0 1 5 volt Output WHITE 9 3 TTL Alarm Open Collector Output RED 2 4 Flow Signal 0 4 20 mA Output GREEN 13 5 Power Supply 13 5 Vdc to 27 Vdc ORANGE N A 6 Not Connected...

Page 29: ...F SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s Figure 2 3 Recommended I O Wiring Configuration for Current Signals Non Isolated Power Supply Figure 2 4 Recommended I...

Page 30: ...setpoint 0 000 mA 100 A 0 20 mA setpoint 4 000 mA 100 A 4 20 mA setpoint e If the zero exceeds one of these limits follow the re zeroing procedure in Section 3 4 The analog output signal should be 0 0...

Page 31: ...When checking with a surrogate gas ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas Example Checking an MFC calibrated for 100 ccm SF6 sulfur he...

Page 32: ...2 10 Section 2 Installation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 33: ...aight through the restrictor and the other through the flow sensor This is represented in Figure 3 1 where the total flow A B enters the MFC MFM and is separated into streams A and B The streams are j...

Page 34: ...retrofitted into tools using analog MFCs Other versions of the SLAMf Series can provide a variety of digital protocols for example DeviceNet and RS 485 The Brooks SLAMf Digital equipment is capable of...

Page 35: ...brations The contents of the ten calibrations are determined from the customer order Only those calibrations ordered will be available in the instrument Unless otherwise specified a Brooks SLAMf Digit...

Page 36: ...eration Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s Figure 3 2 Externally Accessible Adjustment for all Meters Controllers Figure 3 1 Flow Sensor Opera...

Page 37: ...uired processing to change the calibration then returns to normal operation If the device determines that the selected calibration is not valid where applicable the valve is driven to the closed state...

Page 38: ...atures The Brooks SLAMf Digital Series is also available with DeviceNetTM communication capability DeviceNet is an open digital protocol capable of high speeds and easy system connectivity Brooks Inst...

Page 39: ...y Check for flow leak by or sensor zero drift Device Overhaul due Preventive Maintenance Calibration Due Preventive Maintenance Valve spring life Preventive Maintenance No Flow No flow detected when s...

Page 40: ...n has occurred When more than one alarm warning is active then the LED will indicate the most severe alarm with the highest Alarm Code An Alarm is more severe than a Warning Alarm Codes do not have to...

Page 41: ...0 No Flow Indication Alarm 9 Off Off 2 n a 1 0 Setpoint Deviation Alarm 8 Off Off 10 10 1 0 Totalizer Overflow Off 7 n a Off n a n a n a User Power Supply Alarm 6 Off Off 13 5 27 0 1 0 Setpoint Input...

Page 42: ...ormally Open valves the valve will stay open 3 6 3 General Alarms and Warnings Analog versions only Several alarms are available to indicate unexpected process control events as follows Flow Alarms Tw...

Page 43: ...m to occur Totalizer Overflow Alarm The Totalizer Overflow Alarm will occur when the Flow Totalizer reaches its maximum value and resets to zero This alarm is permanently configured as a latching type...

Page 44: ...oftware applications Flow Calibration Options In addition to the factory calibration polynomial the following calibration options are provided to modify the factory calibration Gas Correction Factor C...

Page 45: ...the totalizer in Non Volatile Memory will be 5 seconds 3 8 7 Flow Output Conditioning When this feature is enabled and a change in setpoint is detected the Flow Out signal will equal setpoint for a c...

Page 46: ...3 14 Section 3 Operation Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 47: ...f MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s 4 1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks SLAMf Digital MFC s and MFM s If an in...

Page 48: ...to be functioning but cannot achieve Setpoint verify that there is sufficient inlet pressure and pressure drop at the controller to provide the required flow Bench Troubleshooting 1 Establish a prope...

Page 49: ...ly all particulate matter from the device Should contamination persist subject all wetted1 components to ultrasonic cleaning Following this purge the device thoroughly with dry nitrogen gas once again...

Page 50: ...ENSOR SCHEMATIC PIN NO FUNCTION 1 Heater Upstream 2 Temperature Sensor Su Downstream 3 Temperature Sensor Sd 4 Sensor Common 5 Heater Common 6 Thermistor 7 Thermistor Table 4 1 Sensor Troubleshooting...

Page 51: ...t signal follows Setpoint Control valve leaks or is stuck Clean the control valve or return the device at higher Setpoints but will not open to the factory Section 4 1 2 go below 2 Output signal follo...

Page 52: ...4 6 Section 4 Maintenance Troubleshooting Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 53: ...eutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolgreichen Test...

Page 54: ...tion Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Eq...

Page 55: ...t du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utili...

Page 56: ...gsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italian...

Page 57: ...til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument...

Page 58: ...ltava maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual...

Page 59: ...Installation and Operation Manual X TMF SLAMf MFC eng Part Number 541B032AAG August 2009 Brooks Digital MFC s and MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 60: ...e rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Me...

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