1-6
Section 1 - Introduction
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Brooks
®
Digital MFC's and MFM's
Figure 1-1 Open Collector Alarm Output
Figure 1-2 General Wiring
Valve Override Signal Specifications (Analog I/O Versions only)
Input Impedence: 800 k
Ω
Absolute Max. Input: -25 Vdc > VOR > 25 Vdc
(without damage)
5 Volt Reference Signal (Analog I/O versions only)
A 5 Vdc reference output is provided to the customer for use in generating
a setpoint and/or Valve Override signal. The current drive of this output is
very limited and must be used with care.
Min. Load Resistance: 2 k
Ω
(2.5 mA maximum)
Accuracy: +1.0%
