1-4
Section 1 - Introduction
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Brooks
®
Digital MFC's and MFM's
PHYSICAL:
Materials of Construction
Wetted parts - stainless steel with Viton
®
fluoroelastomers or Buna-N
Optional: Kalrez
®
, Teflon
®
/Kalrez and EPDM
Outline Dimensions
Refer to Figures 1-6 through 1-13.
Process Connections
Refer to Figures 1-6 through 1-13.
ELECTRICAL CHARACTERISTICS:
Electrical Connections
Analog I/O Pin Connections (See Figure 1-5)
Analog/RS-485 version: 15-pin D-Connector, male
Digital I/O:
DeviceNet : 5-pin Micro-Connector, male
F
OUNDATION
Fieldbus: 4-pin Micro-Connector, male
Power Supply Voltage
Analog option: (13.5-27 Vdc), 15 Vdc nominal
Digital I/O:
DeviceNet I/O: 11-25 Vdc
F
OUNDATION
Fieldbus I/O: 14-27 Vdc
Power Requirements
Watts, typ.
Watts, max.
Analog I/O option, No valve:
1.6
1.8
Analog I/O option, With valve:
3.6
4.0
Digital I/O option No valve:
3.6
4.0
Digital I/O option With valve:
6.9
7.6
Reference Conditions
Due to effects of pressure and temperature on the compressibility of gases, specific reference conditions must be used when
reporting volumetric flow rates in mass flow terms. For example, the unit of measure SCCM (standard cubic centimeters per
minute) refers to a volumetric gas flow at a standard reference condition, NOT the actual volumetric gas flow at the actual
operating pressure and temperature. The key point is that the MASS FLOW of the gas is fixed, but the reference volumetric
flow can be reported differently based upon the standard reference condition used in the calculation.
Throughout the world, there are differences in terminology when describing reference conditions for gases. The words
“normal conditions” and “standard conditions” are sometimes used interchangeably to describe the reference STP (Standard
Temperature and Pressure) for gases. Further note that temperature and pressure values for standard or normal reference
conditions vary in countries and industries worldwide. For example, the Semiconductor Equipment Manufacturing Industry
(SEMI) defines standard temperature and pressure conditions as 273.15 K (0 °C) and 101,325 Pa (760 torr). The main
concern is that no matter what words are used for descriptive purposes, a gas mass flow rate must have a defined standard
pressure and temperature reference condition when performing a volumetric conversion.
