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Installation and Operation Manual

X-DPT-Profibus-Interface-eng

PN 541-C-068-AAG

November, 2008

BROOKS MF-SERIES

SMART MASS FLOW METERS / CONTROLLERS

BASE MODEL NUMBER

DESCRIPTION

MF60S/AA

MASS FLOW METER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.

MF60S/AC

MASS FLOW METER; F.S. FLOWRANGES: 0.008 - 30 ln/min.

MF61S/AD

MASS FLOW METER; F.S. FLOWRANGES: 20 - 100 ln/min.

MF63S/AE

MASS FLOW METER; F.S. FLOWRANGES: 100 - 200 ln/min.

MF63S/AF

MASS FLOW METER; F.S. FLOWRANGES: 200 - 300 ln/min.

MF63S/AG

MASS FLOW METER; F.S. FLOWRANGES: 300 - 400 ln/min.

MF63S/AH

MASS FLOW METER; F.S. FLOWRANGES: 400 - 500 ln/min.

MF63S/AJ

MASS FLOW METER; F.S. FLOWRANGES: 500 - 600 ln/min.

MF63S/AK

MASS FLOW METER; F.S. FLOWRANGES: 600 - 700 ln/min.

MF63S/AL

MASS FLOW METER; F.S. FLOWRANGES: 700 - 800 ln/min.

MF63S/AM

MASS FLOW METER; F.S. FLOWRANGES: 800 - 900 ln/min.

MF63S/AN

MASS FLOW METER; F.S. FLOWRANGES: 900 - 1000 ln/min.

MF64S/AO

MASS FLOW METER; F.S. FLOWRANGES: 18 - 80 m3n/h. (1,5")

MF64S/AP

MASS FLOW METER; F.S. FLOWRANGES: 60 - 140 m3n/h. (2")

MF64S/AR

MASS FLOW METER; F.S. FLOWRANGES: 140 - 320 m3n/h. (3")

MF64S/AS

MASS FLOW METER; F.S. FLOWRANGES: 240 - 540 m3n/h. (4")

MF64S/AT

MASS FLOW METER; F.S. FLOWRANGES: 540 - 1250 m3n/h. (6") [2D]

MF64S/AU

MASS FLOW METER; F.S. FLOWRANGES: 970 - 2160 m3n/h. (8") [2D]

MF50S/AA

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.

MF50S/AC

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.008 - 30 ln/min.

MF51S/AD

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 20 - 100 ln/min.

MF53S/AE

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 100 - 200 ln/min.

MF53S/AF

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 200 - 300 ln/min.

MF53S/AG

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 300 - 400 ln/min.

MF53S/AH

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 400 - 500 ln/min.

MF53S/AJ

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 500 - 600 ln/min.

MF53S/AK

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 600 - 700 ln/min.

MF53S/AL

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 700 - 800 ln/min.

MF53S/AM

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 800 - 900 ln/min.

MF53S/AN

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 900 - 1000 ln/min.

MECHANICAL CONNECTIONS

WITHOUT ADAPTORS (9/16"-18" UNF)

(ONLY FOR 5850/60/51/61/53/63)

1/4"

TUBE COMPRESSION FITTINGS

(ONLY FOR 5850/60/51/61)

1/8"

TUBE COMPRESSION FITTINGS

(ONLY FOR 5850/60/51/61)

3/8"

TUBE COMPRESSION FITTINGS

(ONLY FOR 5851/61)

1/4"

VCR

(ONLY FOR 5850/60/51/61)

1/4"

VCO

(ONLY FOR 5850/60/51/61)

1/4"

NPT

(ONLY FOR 5850/60/51/61)

6mm

TUBE COMPRESSION FITTINGS

(ONLY FOR 5850/60/51/61)

10mm

TUBE COMPRESSION FITTINGS

(ONLY FOR 5850/60/51/61)

1/4"

BSP (F)

(ONLY FOR 5850/60/51/61)

½"

BSP (F)

(ONLY FOR 5853/63)

BSP (F)

(ONLY FOR 5853/63)

Modellisting Model MF Series

Summary of Contents for 5850 S

Page 1: ...Operation Manual X DPT Profibus Interface eng PN 541 C 068 AAG November 2008 Profibus DP Interface for use with Brooks Smart Mass Flow Meters models 5860S 5861S 5863S 5864S Mass Flow Controllers model...

Page 2: ...stomeetmanynationalandinternationalstandards Becausethese instrumentsaresophisticatedtechnicalproducts youmustproperlyinstall useandmaintainthemtoensuretheycontinueto operatewithintheirnormalspecifica...

Page 3: ...micals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance re...

Page 4: ...on address selection 18 3 4 Zero pushbutton 19 3 5 Supported baud rates 19 3 6 Profibus network wiring 20 3 6 1 Profibus network wiring requirements 20 3 6 2 Line termination requirements 21 3 6 3 Spe...

Page 5: ...5 3 Diagnostics Fatal system error bits 32 Table 5 4 Diagnostics Primary non fatal system error alarm bits 33 Table 5 5 Diagnostics Secondary non fatal system error alarm bits 34 Table 5 6 Diagnostics...

Page 6: ...ating point format Appendix C Warranty Repair sheet It is recommended that this manual is read in its entirety before connecting the device to the network and attempting to operate it over the network...

Page 7: ...nector Piggyback Exchangeable board on top of and connected to the main board This board provides the communications functionality and holds the program and data memory PNO Profibus Nutzer Organizatio...

Page 8: ...are false Word Combination of 2 bytes or 16 bits Represents 1 value or 16 situations bitmapped Examples Value binary 00010001 00110011 4404 decimal Bitmapped binary 00010001 00010111 bits 0 1 2 4 8 an...

Page 9: ...ing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability A report should be submitted to your...

Page 10: ...om one of the following locations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument c...

Page 11: ...Flow Controller Meter Model Model Min full scale Max full scale Unit 5850 MF50 5860 MF60 0 003 30 ln min 5851 MF51 5861 MF61 20 100 ln min 5853 MF53 5863 MF63 100 2500 1000 ln min MF64 18 2160 mn 3 hr...

Page 12: ...speeds of up to 12 Mbaud Both piggyback boards are interchangeable and provide the same control analogue I O diagnostics and alarm functions as well as accuracy and per formance Also since the databas...

Page 13: ...tion can be obtained when needed providing information on device and process integrity as well as communication integrity Additional features not available on the standard communication protocol inclu...

Page 14: ...re not used the installed piggyback will have to provide a separate interface connector to allow connection to the network In the case of the Profibus DP interface for the Brooks Smart Mass Flow Meter...

Page 15: ...DP piggyback is installed these pins are not connected The minimum requirement to operate the device on a Profibus network is the connection of the power supply lines pin 5 15 Vdc to 28Vdc and pin 9 p...

Page 16: ...us DP piggyback board is equipped with a separate female 9 pin sub D connector The connector type as well as the pin layout is compatible with the preferred connector as stated in the Profibus standar...

Page 17: ...the top of the cover plate The minimum requirement to operate the device on a Profibus network is the connection of the power supply lines labeled 24V and GND Figure 3 3 MF Profibus Main Power Connec...

Page 18: ...the netowork a slave device will require the assignment of a unique communication address or station address This must be done prior to being connected to the network The slave address can be 126 at...

Page 19: ...tion address to send command to a sub group of devices on a network Refer to sectionAppendixAfor more informa tion 3 4 ZERO PUSHBUTTON only for 5800 series In order to be able to initiate a sensor zer...

Page 20: ...m 3278 feet 93 75 kBaud 640 sec 60 Tbit 1200m 3934 feet 45 45 kBaud 8 8 msec 400 Tbit 1200m 3934 feet 19 2 kBaud 3 125 msec 60 Tbit 1200m 3934 feet 9600 Baud 6 25 msec 60 Tbit 1200m 3934 feet Tbit is...

Page 21: ...nvenient means are usually provided to connect the cable shield to the protective ground Refer to the Profibus User Organization for more information on availability of these connectors Profibus Inter...

Page 22: ...ng or ending at any station connector Therefore stub lines should also not be used when operating the network at high baud rates The value of each inductor is determined to be 120 nH assuming the tota...

Page 23: ...provided 1 BIMF5801 GSD Smart Mass Flow Controllers MFC 2 BIMF5861 GSD Smart Mass Flow Meters MFM and can be found on the www profibus com web site or requested at your Brooks Sales representative 4...

Page 24: ...ibration 10 Failsafe state 11 Primary non fatal alarms 12 Secondary non fatal alarms 13 Non fatal ambient alarms 14 Softstart selection 15 Softstart data sec 16 Flow unit 17 Temperature unit 18 Totali...

Page 25: ...nt overrange 4 bit 1 0 disabled 1 enabled Flow out of range 5 bit 1 0 disabled 1 enabled Output out of range 6 bit 1 0 disabled 1 enabled Valve out of range 11 7 bit 0 0 reserved Secondary non fatal a...

Page 26: ...ed 15 reserved 16 g sec Gram per second 17 g min Gram per hour 18 g hr Gram per hour 19 kg sec Kilogram per second 20 kg min Kilogram per minute 21 kg hr Kilogram per hour 22 Lb sec Pound per second 2...

Page 27: ...ror 1 bit 1 0 disabled 1 enabled Temperature Sensor Error 2 bit 1 0 disabled 1 enabled Analogue Output Error 3 bit 1 0 reserved 4 bit 1 0 disabled 1 enabled Flow out of range 5 bit 1 0 disabled 1 enab...

Page 28: ...r hour 10 ft3 sec Cubic feet per second 11 ft3 min Cubic feet per minute 12 ft3 hr Cubic feet per hour 13 reserved 14 reserved 15 reserved 16 g sec Gram per second 17 g min Gram per hour 18 g hr Gram...

Page 29: ...tput bytes for the data exchange mode is compared The entry takes place via identifier bytes A configuration telegram can contain one or more identifiers In case of the Brooks Mass Flow products the s...

Page 30: ...d dragged into the slave module slot 3 Now the slave configuration is done and can be saved compiled downloaded into the S7 controller Byte Code Description 1 0xC1 Special identifier with one length b...

Page 31: ...ange message Table 5 1 below summarizes the diagnostic data bytes to be send at the event of an error change If all bits in all bytes are 0 these data bytes will not be send A short message indicates...

Page 32: ...extended diagnostics byte the fatal system errors These error bits all indicate a fatal system alarm prevent the device from correct operation The occurrence of one of these fatal alarms will cause a...

Page 33: ...5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Valve Analogue Flow Setpoint Analogue Temp Flow Reserved out of output sensor over output out sensor sensor range error of range range of range error error 0 0 OK 0 OK...

Page 34: ...rror occurs if the flow signal exceeds the high flow alarm limit set in the database The alarm will disappear if the signal drops below the high flow limit again 3 Totalizer overflow The totalizer ove...

Page 35: ...eds the minimum operating temperature again 5 Flow obstruction error This error may occur if the valve out of range alarm is also set It indicates a possible obstruction of gas flow although the valve...

Page 36: ...t description byte byte size type Flow flow 0 3 4 floating point Tot totalizer 4 7 4 floating point CMD command 8 1 unsigned byte I O memory map Mass Flow Controller bimf5801 gsd module 3 Maximum Conf...

Page 37: ...For all module types the input and output data are defined as consistent data meaning that the input or output data stream belongs together and cannot be split in separate partitions When using PLC pr...

Page 38: ...is given 2 At line no 107 the slave is reacting with the diagnostic message including the 5 manufacturing specific bytes In this case all bytes are 00 which indicates no alarm sources are active 3 Fir...

Page 39: ...0 008 30 ln min 5851S BD MASS FLOW CONTROLLER F S FLOWRANGES 20 100 ln min 5853S BE MASS FLOW CONTROLLER F S FLOWRANGES 100 200 ln min 5853S BF MASS FLOW CONTROLLER F S FLOWRANGES 200 300 ln min 5853...

Page 40: ...IN DN25PN40 ONLY FOR 5853 63 2N DIN DN40PN40 ONLY FOR 5853 63 2O DIN DN50PN40 ONLY FOR 5853 63 2P ANSI 150 LBS ONLY FOR 5853 63 2R ANSI 300 LBS ONLY FOR 5853 63 2S ANSI 1 150 LBS ONLY FOR 5853 63 2T A...

Page 41: ...RATE A 0 ANALOG I O AND RS 232 9600 BAUD B RS232 C RS485 D 0 PROFIBUS DP PNO CERTIFIED 831 A 023 and 541 C 068 AAG E 0 PROFIBUS DP not CERTIFIED 831 A 021 and 541 C 062 AAG F CARDEDGE CONNECTOR ONLY 0...

Page 42: ...TED DEDUCT 1 STANDARD CALIBRATION INCLUDED 2 STORAGE OF MULTIPLE CAL CURVES ADD PER AVAILABLE CALIBRATION GAS 9 SPECIFY POWER SUPPLY INPUT A 15 Vdc B 24 Vdc Standard selection C 15 Vdc only Z SPECIFY...

Page 43: ...METER F S FLOWRANGES 970 2160 m3n h 8 2D MF50S AA MASS FLOW CONTROLLER F S FLOWRANGES 0 003 0 008 ln min MF50S AC MASS FLOW CONTROLLER F S FLOWRANGES 0 008 30 ln min MF51S AD MASS FLOW CONTROLLER F S...

Page 44: ...ANSI 150 LBS ONLY FOR MF53 63 2R ANSI 300 LBS ONLY FOR MF53 63 2S ANSI 1 150 LBS ONLY FOR MF53 63 2T ANSI 1 300 LBS ONLY FOR MF53 63 2U ANSI 1 150 LBS ONLY FOR MF53 63 2V ANSI 1 300 LBS ONLY FOR MF53...

Page 45: ...S DIFF 2BAR MF5853 SERIES 3 NORMALLY CLOSED PRESS DIFF 2BAR MF5853 SERIES 4 NORMALLY OPENED MF5850 ONLY 9 SPECIFY BROOKS MF SERIES SMART MASS FLOW METERS CONTROLLERS BASE MODEL NUMBER DESCRIPTION ELEC...

Page 46: ...NG SPECIFY VALUES SEC 1 ENHANCEMENTS 0 UNCALIBRATED DEDUCT 1 STANDARD CALIBRATION INCLUDED SEE OPTION C 2 STORAGE OF MULTIPLE CAL CURVES ADD PER AVAILABLE CALIBRATION GAS 9 SPECIFY POWER SUPPLY INPUT...

Page 47: ...nd The failsafe state determines how the MFC is acting if in previous described situations no setpoint value is coming through anymore Per default the unit is using selection 1 and internally reset it...

Page 48: ...trol command message any subsequent setpoint entered through the network will not be processed Up on the reception of global control command message with the Unsync bit set the last entered setpoint w...

Page 49: ...ll float Hence the name floating point Don worry about these hexadecimal repre sentation of the floating points You never should translate this hexadecimal values manual into more readable values This...

Page 50: ...can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for th...

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