39
Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
5
Modellisting Model 58.. Series
BROOKS SMART MASS FLOW PRODUCTS
SMART MASS FLOW METERS / CONTROLLERS
BASE MODEL NUMBER
DESCRIPTION
5860S/BA
MASS FLOW METER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.
5860S/BC
MASS FLOW METER; F.S. FLOWRANGES: 0.008 - 30 ln/min.
5861S/BD
MASS FLOW METER; F.S. FLOWRANGES: 20 - 100 ln/min.
5863S/BE
MASS FLOW METER; F.S. FLOWRANGES: 100 - 200 ln/min.
5863S/BF
MASS FLOW METER; F.S. FLOWRANGES: 200 - 300 ln/min.
5863S/BG
MASS FLOW METER; F.S. FLOWRANGES: 300 - 400 ln/min.
5863S/BH
MASS FLOW METER; F.S. FLOWRANGES: 400 - 500 ln/min.
5863S/BJ
MASS FLOW METER; F.S. FLOWRANGES: 500 - 600 ln/min.
5863S/BK
MASS FLOW METER; F.S. FLOWRANGES: 600 - 700 ln/min.
5863S/BL
MASS FLOW METER; F.S. FLOWRANGES: 700 - 800 ln/min.
5863S/BM
MASS FLOW METER; F.S. FLOWRANGES: 800 - 900 ln/min.
5863S/BN
MASS FLOW METER; F.S. FLOWRANGES: 900 - 1000 ln/min.
5863S/B1
MASS FLOW METER; F.S. FLOWRANGES: 1001 - 1100 ln/min.
5863S/B2
MASS FLOW METER; F.S. FLOWRANGES: 1101 - 1300 ln/min.
5863S/B3
MASS FLOW METER; F.S. FLOWRANGES: 1301 - 1600 ln/min.
5863S/B4
MASS FLOW METER; F.S. FLOWRANGES: 1601 - 1900 ln/min.
5863S/B5
MASS FLOW METER; F.S. FLOWRANGES: 1 901 - 2200 ln/min.
5863S/B6
MASS FLOW METER; F.S. FLOWRANGES: 2201 - 2500 ln/min.
5850S/BA
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.
5850S/BC
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.008 - 30 ln/min.
5851S/BD
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 20 - 100 ln/min.
5853S/BE
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 100 - 200 ln/min.
5853S/BF
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 200 - 300 ln/min.
5853S/BG
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 300 - 400 ln/min.
5853S/BH
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 400 - 500 ln/min.
5853S/BJ
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 500 - 600 ln/min.
5853S/BK
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 600 - 700 ln/min.
5853S/BL
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 700 - 800 ln/min.
5853S/BM
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 800 - 900 ln/min.
5853S/BN
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 900 - 1000 ln/min.
5853S/B1
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1001 - 1100 ln/min.
5853S/B2
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1101 - 1300 ln/min.
5853S/B3
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1301 - 1600 ln/min.
5853S/B4
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1601 - 1900 ln/min.
5853S/B5
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1 901 - 2200 ln/min.
5853S/B6
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 2201 - 2500 ln/min.
MECHANICAL CONNECTIONS
1A
WITHOUT ADAPTORS (9/16"-18" UNF)
(ONLY FOR 5850/60/51/61/53/63)
1B
1/4"
TUBE COMPRESSION FITTINGS
(ONLY FOR 5850/60/51/61)
1C
1/8"
TUBE COMPRESSION FITTINGS
(ONLY FOR 5850/60/51/61)
1D
3/8"
TUBE COMPRESSION FITTINGS
(ONLY FOR 5851/61)
1E
1/4"
VCR
(ONLY FOR 5850/60/51/61)
1F
1/4"
VCO
(ONLY FOR 5850/60/51/61)
1G
1/4"
NPT
(ONLY FOR 5850/60/51/61)
1H
6mm
TUBE COMPRESSION FITTINGS
(ONLY FOR 5850/60/51/61)
1J
10mm
TUBE COMPRESSION FITTINGS
(ONLY FOR 5850/60/51/61)
1K
1/4"
BSP (F)
(ONLY FOR 5850/60/51/61)
1Y
½"
BSP (F)
(ONLY FOR 5853/63)
1Z
1"
BSP (F)
(ONLY FOR 5853/63)