NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 11 of 14
2. Four columns can be found in this menu. Go to the last column “Recipe File”,
select the correct recipe and click “Recipe Edit”. All recipes should be in
*.RCP format.
3. Check the recipe parameters to make sure the parameters are correct. The
tables below show the recipe parameters of “DESCUM.RCP” and
“Striper.RCP”.
Step
No.
Step
Function
Time
(sec)
Temperature
(
o
C)
Steady
Intn
Factor
Gas1
O2
SLPM
Gas2
N2
SLPM
RF
Power
(W)
Vac.
Pressure
(Torr)
END
Point
Detect
RF
1
Delay
70
25
1
0
0.45
0
1.3
0
OFF
2
Wait
120
100
1
0
0.45
300
1.3
0
ON
3
Delay
30
100
1
0.45
0
0
1.3
0
OFF
4
Delay
*300
200
1
0.45
0
300
1.3
0
ON
5
Finish
0
0
1
0
0
0
0
0
OFF
Table1.
Recipe parameters of “Striper.RCP”
Step
No.
Step
Function
Time
(sec)
Temperature
(
o
C)
Steady
Intn
Factor
Gas1
O2
SLPM
Gas2
N2
SLPM
RF
Power
(W)
Vac.
Pressure
(Torr)
END
Point
Detect
RF
1
Delay
70
25
1
0
0.45
0
1.3
0
OFF
2
Wait
140
70
1
0
0.45
300
1.3
0
ON
3
Delay
30
70
1
0.45
0
0
1.3
0
OFF
4
Delay
*60
70
1
0.45
0
150
1.3
0
ON
5
Finish
0
0
1
0
0
0
0
0
OFF
Table2
. Recipe parameters of “DESCUM.RCP”
* Remark: This is the process time for ashing.
4. If no recipe parameters are being changed, Click “Exit” and then click
“START PROCESS” to start the process.
5. If recipe parameters have to be changed, choose the boxes, change the