Thruline RF Power Meter, Model 4421
3
Power Sensors
Power sensors are available with a variety of connectors; see
"Available Connectors" on page 52
for a
complete list. Since the accuracy is critically dependent on the connectors used at calibration, do not remove or
change the connectors.
4020 Series
Bird 4020 Series Power Sensors are designed for lab or field use and are accurate to within ±
3%(1
) of reading.
4027A Series
Bird 4027A Series Power Sensors are designed for use in semiconductor processing and calibration applications.
Stringent calibration provides long-term unit-to-unit repeatability, allowing consistent amounts of RF energy to be
applied to the etch process over many etch cycles. 4027A Sensors are accurate to ±
1%(1
) at specified calibration
frequencies and power levels.
4027F Series
Bird 4027F Series Power Sensors are similar to the 4027A series. However, additional filtering allows the 4027F to
ignore harmonics of the signal being measured. The 4027F is also less sensitive to AM components of the signal.
4027F Sensors are accurate to ±
1%(2
) at specified calibration frequencies and power levels.
Figure
2
Power Sensor Outline Drawing, 4020, 4027A, 4027F, & 4028A Series
4028 Series
Bird 4028 Series Power Sensors are high power sensors otherwise similar to the 4027A series. 4028A sensors are
based on a 7/8” line, 4028B sensors use a 1-5/8” line, and 4028C sensors use a 3-1/8” line. 4028 Sensors are
accurate to ±
2% at specified calibration frequencies and power levels.
CAUTION
Changing the sensor’s connectors will invalidate calibration data, and may reduce the
maximum power rating of the unit.
