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Bird 4421 RF Power Meter

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About This Manual

This manual covers the Bird 4421 RF Power Meter, Bird 4020 Series 

Power Sensors, Bird 4027A Series Precision Power Sensors, and Bird 

4027F Series Precision Filtered Power Sensors. Specific models include:

This instruction book is arranged so that essential safety information 

appears in the front of the book. Reading the Safety Precautions before 

operating the equipment is strongly advised.

The remainder of this manual is divided into Chapters and Sections. At 

the start of each chapter, a general overview describes its contents.

Operation

First time users should read Chapter 1 – Introduction and Chapter 2 – 

Installation to get an overview of equipment capabilities and installation. 

Experienced operators can refer to Chapter 3 – Operating Instructions. 

All instructions necessary to manually operate the equipment appear in 

this chapter. If the power meter is equipped with a IEEE-488 GPIB 

Interface refer to Chapter 4 – IEEE-488 GPIB Interface. For the RS-232 

Interface refer to Chapter 5 – RS-232 Interface.

Maintenance

All personnel should be familiar with preventative maintenance found in 

Chapter 6 – Maintenance. If a failure should occur, the troubleshooting 

section will aid in isolating and repairing the failure. A list of 

replacement parts with part numbers is also in this chapter.

Changes To This Manual

We have made every effort to ensure this manual is accurate. If you 

should discover any errors, or if you have suggestions for improving this 

manual, please send your comments to our factory. This manual may be 

periodically updated. When inquiring about updates to this manual refer 

to the part number and revision level on the title page.

Power Meter

4421

4020 Series 

Sensors

4021

4022

4024

4025

4027A Series 

Sensors

4027A250K

4027A400K

4027A800K

4027A2M

4027A4M

4027A10M

4027A12M

4027A25M

4027A35M

4027A60M

4027A100M

4027A150M

4027F Series 

Sensors

4027F2M

4027F10M

Summary of Contents for THRULINE 4021

Page 1: ...ENSORS 4020 SERIES 4027A SERIES AND 4027F SERIES Copyright 2003 by Bird Electronic Corporation Instruction Book Part Number 920 4421 Rev G Thruline is a Registered Trademark of Bird Electronic Corpora...

Page 2: ...This page intentionally left blank...

Page 3: ...line while RF power is present Do Not Service or Adjust Alone Under no circumstances should any person reach into an enclosure for the purpose of service or adjustment of equipment except in the prese...

Page 4: ...G Warning notes call attention to a procedure which if not correctly performed could result in personal injury CAUTION Caution notes call attention to a procedure which if not correctly performed coul...

Page 5: ...the unit CAUTION Ensure that the 115 230 voltage selector on the 4421 s rear panel is set to the proper voltage before ac power is applied CAUTION The Bird 4421 must be powered off when connecting or...

Page 6: ...CE SERVICING INSTRUCTIONS ARE FOR USE BY SERVICE TRAINED PERSONNEL ONLY TO AVOID DANGEROUS ELECTRIC SHOCK DO NOT PERFORM ANY SERVICING UNLESS QUALIFIED TO DO SO SERVICIO LAS INSTRUCCIONES DE SERVICIO...

Page 7: ...CIFICATO DAL PRODUTTORE LA PROTEZIONE DI SICUREZZA POTREBBE VENIRNE COMPROMESSA BE SURE THE 115 230V AC VOLTAGE SELECTOR IS SET TO THE PROPER LINE VOLTAGE AND THE CORRECT AC LINE FUSE IS INSTALLED BEF...

Page 8: ...appear in this chapter If the power meter is equipped with a IEEE 488 GPIB Interface refer to Chapter 4 IEEE 488 GPIB Interface For the RS 232 Interface refer to Chapter 5 RS 232 Interface Maintenance...

Page 9: ...y and Power Ranges 3 4020 Series 3 4027A Series 3 4027F Series 3 Installation 5 Interface Module 5 Sensor Connection 6 RF Line Connection 6 Handle Operation 6 230V AC Power 7 Setting AC Voltage 7 AC L...

Page 10: ...iption 27 Cable Connector 27 Indicators 27 Setup 28 DIP Switch 28 Auto Baud 28 Talker Only Mode 29 Command Syntax 29 General Bus Commands 30 Device Dependent Commands 32 Maintenance 39 Troubleshooting...

Page 11: ...1 to be installed in a standard 19 panel for rack mount applications IEEE 488 GPIB Bus Interface Module P N 4421 488 Allows the 4421 to be remotely controlled over an IEEE 488 general purpose interfac...

Page 12: ...repeatability allowing consistent amounts of RF energy to be applied to the etch process over many etch cycles 4027A Sensors are accurate to 1 at specified calibration frequencies and power levels Fi...

Page 13: ...re 2 Power Sensor Outline Drawing Model Frequency Range Power Range 4021 1 8 32 MHz 300 mW 1 kW 4022 25 1000 MHz 300 mW 1 kW 4024 1 5 32 MHz 3 W 10 kW 4025 100 kHz 2 5 MHz 3 W 10 kW 4027A250K 250 400...

Page 14: ...Bird 4421 RF Power Meter 4...

Page 15: ...le edges with the side guides in the meter and slide the interface module into the access slot 4 Press on the front edge of the module until it seats fully 5 Screw the module into place with the acces...

Page 16: ...d 4421 can be set to four different positions see Figure 4 To adjust the handle press the center buttons on both sides Releasing the buttons will lock the handle into position CAUTION Changing the sen...

Page 17: ...n the drum will be visible through the window 3 Replace the voltage selector drum and close the cover AC Line Connectors To make the ac line cord compatible with European style sockets users must inst...

Page 18: ...Bird 4421 RF Power Meter 8...

Page 19: ...o measure standing wave ratio SWR indicator turns on Value displayed will be between 1 0 and 199 9 MIN MAX Used after pressing FWD RFL SWR or dBm Displays the minimum maximum measured value of the pre...

Page 20: ...capability the power meter will sound a warning buzzer Figure 7 Error Codes Symbol Explanation Value greater than overrange limit of function Value less than underrange limit of function Figure 8 Func...

Page 21: ...commands that apply to the Bird 4421 Operators should understand IEEE standard 488 1978 and have basic computer programming skills before attempting to write any programs CAUTION During remote operati...

Page 22: ...ace module uses a standard IEEE 488 cable connector Pin assignments are listed in Figure 9 Figure 9 IEEE 488 Pin Assignments Pin Designation Type 1 D101 Data 2 D102 Data 3 D103 Data 4 D104 Data 5 EOI...

Page 23: ...odule Capabilities Code Name Description SH1 Source Handshake Can handshake data or command bytes when the unit is acting as a source AH1 Acceptor Can handshake the bus when it is acting as the accept...

Page 24: ...4 and 2 NOTE The primary address is used by the controller to refer to specific devices on the bus When programming the controller the address in the program must be the same as the address set on th...

Page 25: ...dent commands can be sent as a single string as long as like command categories are not repeated for example PNFCFDT3TRG This string sets up the 4421 to send no prefixes read forward dBm make one read...

Page 26: ...al operation Remarks Issuing a GTL command while the device is in Local Lockout mode does not clear the lockout condition The REMOTE indicator turns off The LISTEN indicator remains on Local LOckout L...

Page 27: ...dition listed in Figure 13 Selective Device Clear SDC Function Resets the status of a selected device to an initialized state Remarks Only the device addressed will be cleared The 4421 returns to the...

Page 28: ...Figure 14 IEEE Status Byte Description Bit Name Condition 6 SRQ Set if a service request is generated by the 4421 If an SRQ has been received by the controller and this bit is cleared other instrumen...

Page 29: ...ff stay at present range Terminators YT Two terminators CR LF YO One terminator CR YN No terminator Prefixes PY Prefix YES PN Prefix NO Triggers T0 Continuous on TALK T1 One shot on TALK T2 Continuous...

Page 30: ...returned in Watts or dBm Standing Wave Ratio SW Return Loss RL Function Selects SWR or return loss match measurement mode Remarks Measurement results are returned in VSWR or dB MiNimum Value MN MaXimu...

Page 31: ...nator message can be terminated by EOI Remarks Many controllers use the terminator sequence to recognize the end of an input string Using incorrect terminators can lock the bus Figure 16 Measurement R...

Page 32: ...the measurement type y U indicates underflow the value sent is 000 y O indicates overflow the value sent is 199 9 y N indicates normal the value sent is a normal on scale reading y 4421 indicates the...

Page 33: ...values of the desired SRQ trigger bits For example M12 would set the SRQ for both operation complete and underrange values 8 and 4 Set xx to 00 to never generate an SRQ Remarks If a status bit is mask...

Page 34: ...gure 21 When an error occurs an error is also flagged in the status serial poll byte and a SRQ may be generated See SRQ Mask on page 23 All flags will revert to their non error states after the U1 com...

Page 35: ...ollers to lock unless another terminator is used When enabled EOI is only asserted at the end of a multiple byte string VCO Valid Command Option Set when no IDDCO is received PS Self Test Pass Set whe...

Page 36: ...Bird 4421 RF Power Meter 26 Writable Store Wxxxxxx Function Storage for six bytes of ASCII data Remarks Data stored is lost when the 4421 is turned off Data is sent back as part of the U2 status word...

Page 37: ...e the interface module s connector A null modem kit should be used for rewiring instead Indicators The bottom line of the power meter s display shows indicators describing the status of the Bird 4421...

Page 38: ...7 and 8 to ON 2 Connect a controller to the power meter 3 Turn the power meter on Figure 24 RS 232 Interface Default DIP Switch Settings Switch Function Description 1 Stop Bit ON 1 Stop Bit OFF 2 Sto...

Page 39: ...e information is sent to the bus Command Syntax The Bird 4421 accepts two types of commands General bus commands are commands such as Initialize INT that apply to any RS 232 interfaced device Device d...

Page 40: ...transmit a reading to the controller Remarks A measurement must have already been triggered placing a reading in the output buffer To send a reading whenever a measurement is triggered set DIP switch...

Page 41: ...w control y XO enables flow control y XF disables flow control Remarks When data is being sent from the power meter to the computer and flow control is enabled data transmission will be suspended when...

Page 42: ...wave RD Reflected dBm SW Standing wave ratio RL Return loss MN Minimum value MX Maximum value Range RYY Auto range on R00 to R17 Manual ranges RNN Auto range off stay at present range Terminators YT T...

Page 43: ...rned in Watts or dBm Standing Wave Ratio SW Return Loss RL Function Selects SWR or return loss match measurement mode Remarks Measurement results are returned in VSWR or dB MiNimum Value MN MaXimum Va...

Page 44: ...y N for no terminator Remarks Many controllers use the terminator sequence to recognize the end of an input string Using incorrect terminators can lock the bus Figure 28 Measurement Ranges Command Po...

Page 45: ...el number Triggers Tx Function Selects the condition which will trigger a reading see Figure 30 Remarks Failure to trigger device before requesting a reading will lock the bus Fastest reading rate is...

Page 46: ...nd the possible error messages are shown in Figure 32 All flags will revert to their non error states after the U1 command is sent Figure 31 Machine Status Word Format Header Measurement Function Rang...

Page 47: ...Remarks Data stored is lost when the 4421 is turned off Data is sent back as part of the U2 status word PS Self test Pass Set when a self test has been initiated by the J0 command and the test result...

Page 48: ...Bird 4421 RF Power Meter 38...

Page 49: ...cannot list all malfunctions that may occur or corrective actions If a malfunction is not listed or is not corrected by the listed corrective actions contact a qualified service center WARNING Disconn...

Page 50: ...o not respond Test the push buttons see Push Button Test on page 41 Are they defective Return meter for service Every segment on the display is lit Return meter for service IEEE 488 Interface Module d...

Page 51: ...ta then the power sensor is malfunctioning Push Button Test This test checks that the push buttons and display are functioning properly If a push button is malfunctioning return the power meter 1 Disc...

Page 52: ...8 Turn the power meter OFF Repair Fuse To replace the power meter fuse y Open the ac module door on the power meter rear panel See Figure 35 y Remove the fuse drawer and fuse y Install the new fuse an...

Page 53: ...struments returned must be shipped prepaid and to the attention of Bird Service Center Bird Service Center 30303 Aurora Road Cleveland Solon Ohio 44139 2794 Phone 440 519 2298 Fax 440 519 2326 E mail...

Page 54: ...t cells 15 W max NEDA Type 10014 Battery Life Minimum 8 hours continuous usage Battery Charger Built in battery charger Drained batteries require approximately 28 hours to recharge Display LCD 3 digit...

Page 55: ...ected at frequency of measurement within rated range Operating Power Supplied by power meter via sensor cable Connectors Customer specified See Available Connectors on page 50 Emissions Immunity EMC D...

Page 56: ...Hz 1 GHz 1 5 32 MHz 100 kHz 2 5 MHz Accuracy Fwd 3 Insertion VSWR Insertion Loss 4021 4024 4025 4022 1 05 0 05 dB max 1 05 0 05 dB max 25 512 MHz 1 10 0 13 dB max 512 MHz 1 GHz Directivity Minimum 402...

Page 57: ...027A150M 250 400 kHz 250 kHz 400 550 kHz 400 kHz 800 950 kHz 900 kHz 1 5 2 5 MHz 2 0 MHz 3 5 MHz 4 0 MHz 10 15 MHz 13 56 MHz 10 15 MHz 13 56 MHz 25 30 MHz 27 12 MHz 35 45 MHz 40 0 MHz 45 65 MHz 60 0 M...

Page 58: ...ejection Minimum 4027F2M 4027F10M frequency 3 8 MHz 30 dB 3 6 3 8 MHz 26 dB frequency 25 MHz 30 dB Low Frequency Rejection Minimum 4027F10M Only frequency 1 MHz 30 dB AM Rejection 5 kW 10 AM 5 10 kW 1...

Page 59: ...ng Storage 32 to 122 F 0 to 50 C 4 to 122 F 20 to 50 C Dimensions 6 5 L x 4 5 W 165 1 x 114 3 mm Weight 0 5 lbs 0 227 kg nominal RS 232 Interface Module Logic Levels Meets all EIA Standard RS 232 C sp...

Page 60: ...Changing the sensor s connectors will invalidate calibration data and may reduce the maximum power rating of the unit Connector P N Connector P N Connector P N BNC Female 4240 125 LT Female 4240 018...

Page 61: ...f our plant and shall not apply to any goods or parts thereof furnished by Buyer or acquired from others at Buyer s request and or to Buyer s specifications Routine regularly required calibration is n...

Page 62: ...of the following standards y European Standard EN 61326 1 1997 Electronic Equipment for Measurement Control and Laboratory Use EMC Requirements These standards are in accordance with EMC Directive 89...

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