Bird 4421 RF Power Meter
2
Power Sensors
Power sensors are available with a variety of connectors; see
“Available Connectors” on page 50 for a complete list. Since the
accuracy is critically dependent on the connectors used at calibration,
do not remove or change the connectors.
4020 Series
Bird 4020 Series Power Sensors are designed for lab or field use and
are accurate to within ±3% of reading.
4027A Series
Bird 4027A Series Power Sensors are designed for use in
semiconductor processing and calibration applications. Stringent
calibration provides long-term unit-to-unit repeatability, allowing
consistent amounts of RF energy to be applied to the etch process
over many etch cycles. 4027A Sensors are accurate to ±1% at
specified calibration frequencies and power levels.
Figure 1
Bird 4421 Meter
Outline Drawing
1. Operating Push Buttons
2. LCD
3. ON/OFF Push Button
4. Handle
5. Central Button
6. AC Line Module
7. Access Door
8. Voltage Selector
9. Master ON/OFF Switch
10. Power Sensor Socket
11. Interface Module Access
FUSE
AC SUPPLY
1 ON
0 OFF
POWER
SENSOR
MODEL 4421 RF POWER METER
AUTO
RANGE
UP
DOWN
SWR
RFL
FWD
MIN
MAX
dBm
LIGHT
ON / OFF
REAR
6
7
8
9
10
11
12-1/4” (312 mm)
4
5
SIDE
10-1/8” (257 mm)
4-1/4”
(108 mm)
1
2
3
FRONT
CAUTION
Changing the sensor’s connectors will invalidate calibration data,
and may reduce the maximum power rating of the unit.
Summary of Contents for THRULINE 4021
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