32
Chapter 6. Specifications
z
Maximum measurable flow rate and output voltage for various gas types
The tables below show output corresponding to the maximum mea-
surable flow rate when 0–5 V analog output scaling is selected.
Gas type
CMS9500
CMS0002
Maximum mea-
surable flow rate
[mL/min]
Output voltage
[V]
Setting and dis-
play resolution
[mL/min]
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Air/nitrogen
500
5
1
2
5
0.01
Argon
500
5
1
2
5
0.01
Carbon dioxide (CO
2
)
250
2.5
1
1
2.5
0.01
Oxygen*
2
500
5
1
2
5
0.01
Fuel gas 13A
400
4
1
1.5
3.75
0.01
Methane
500
5
1
2
5
0.01
Propane
140
1.4
1
0.5
1.25
0.005
Butane
100
1
1
0.4
1
0.005
User-specified
*
1
5
1
*
1
5
0.01 *
3
Gas type
CMS0005
CMS0020
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Maximum mea-
surable flow rate
[L/min]
Output voltage
[V]
Setting and dis-
play resolution
[L/min]
Air/nitrogen
5
5
0.01
20
5
0.1
Argon
5
5
0.01
20
5
0.1
Carbon dioxide (CO
2
)
3.3
3.3
0.01
10
2.5
0.1
Oxygen*
2
5
5
0.01
20
5
0.1
Fuel gas 13A
4
4
0.01
15
3.75
0.1
Methane
5
5
0.01
20
5
0.1
Propane
1.7
1.7
0.01
5
1.25
0.05
Butane
1.25
1.25
0.01
5
1.25
0.05
User-specified
*
1
5
0.01
*
1
5
0.1 *
3
Summary of Contents for Micro Flow CMS 0200
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