Asyst Technologies VersaPort 2200, Technical Manual

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Released Rev. C 2000-1252-01 Page 71
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP1 – Align Laser Detector System
a
_____3. When the beam is centered in the wafer protrusion mirror, tighten the bottom
screw with spring until the coils just touch (see Figure 21 on page 67 ). Do not
over-tighten.
_____4. Check to see that the beam is still centered on the protrusion mirror. If
necessary, adjust the beam again using the two adjustment screws- not the
screws with spring.
_____5. Tighten the top screw with springs until the coils just touch.
_____6. Check again to verify the beam is still centered on the protrusion mirror. If
necessary, make any small adjustments with the two adjustment
(non-springed) screws. Loosen the springed screws and repeat the
adjustment if beam is not centered on wafer protrusion mirror.
_____7. Verify both bottom and top screws with springs are tight.
Adjust Wafer Protrusion Sensor
WARNING
LASER HAZARD
L
ASER RADIATION PRESENT WHEN POWER APPLIED AND
INTERLOCK DEFEATED
. A
VOID DIRECT EYE EXPOSURE
.
_____1. At the PC:
_____a. From the MANUAL Menu select F5 (GOTO POS).
WARNING
MECHANICAL HAZARD
A
PINCH HAZARD EXISTS AT THE PORT PLATE AS IT LOWERS
TO THE PORT DOOR
. K
EEP HANDS AWAY FROM THE PORT
PLATE PATH
_____b. At the Target Pos (inch) line, enter 2.8. Press Enter three times to accept
the Speed and Acceleration values and move the port plate to a position
2.8 inches above the port door.
_____2. Select F4 (DAC menu). Use the arrow keys to select Sensor Alignment and
press Enter .
_____3. From the SENSOR ALIGNMENT Menu, use the arrow key to select Protrude
Sensor .