Asyst Technologies VersaPort 2200, Technical Manual

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Released Rev. C 2000-1252-01 Page 33
VersaPort 2200 Technical Manual
Chapter 2: Theory of Operation
Specifications and Outline Drawing
a
Specifications and Outline Drawing
T
ABLE
4 VersaPort Specifications
Platform Mount BOLTS Configuration
Wafer Size 200mm 200mm
Height
19.25 inches
NOTE- Does not include 0.75
inch mounting hardware
requirement.
1385mm (54.53 in.)
Width 370.84mm (14.60 in.)
BOLTS interface = 470mm
(18.50 in.)
Depth 396.24mm (15.60 in.) 415.3mm (16.35 in.)
Weight (without
SMIF-Pod)
~15.87 Kg (~35 lbs.) ~56.70 Kg (~125 lbs.)
Port Plate Height
while operating (at
Stage position)
448.31mm (17.65 in.) from base
NOTE- Height requirements for
rear shroud and Pod are shown
in Outline drawings.
1188.5mm (46.79 in.)
NOTE- Height requirements for
rear shroud and Pod are shown
in Outline drawings.
Port Plate Height at
Home position
158.75mm (6.25 in.) 900mm (35.43 in.)
Speed ~76.2mm (~3.0 in.) per second (constant velocity)
Mounting
Customer-supplied mounting
platform.
See Outline drawing for
specifications.
Direct mount to Process Tool
using a SEMI E63 BOLTS
interface frame.
Power
24 vdc (+10%, -5%) from external source
1.5 Amps standby; 3.0 Amps typical during operation; 4.0 Amps
maximum
Laser
Diode laser; Wavelength = 670nm
Laser Power <1mW (Class II)
NOTE- VersaPort is a Class I laser product when used with a
SMIF-Pod.
See
“Laser Safety” on page 9 for a complete description.
Communications Serial RS-233C, SECSI/II, ASCII, Parallel
Environmental
Operating Temperature 10°to 40° C
Operating Humidity
10%- 75%
Storage Temperature -10° to +55° C
Storage Humidity 5%- 90%
Cleanliness
Performs better-than-Class 1 (in accordance with FED-STD-209E)
Maximum allowable particle concentration = 1 particle/cu.ft at 0.5µ,
or 35 particles/cu.ft. at 0.1µ.
Agency Approvals CE Mark, SEMI S2