Asyst Technologies VersaPort 2200, Technical Manual

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Page 192 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Appendix B: Communications Software
ASCII Serial Text Interface
a
Examples:
(HCA) Host Command Acknowledge Host
<−
Load Port
Description:
Reply to Host command. Acknowledge Host command or return error code. Equiva-
lent SECS: S2F42.
Primary/Secondary:
Secondary; this is a response to an HCS message.
Structure:
HCA<space>XX<CR><LF>
Where XX = Multi-character reply message.
Action ASCII Code
Request for Load Port status FSR<space>FC=0<CR><LF>
Request for cassette map FSR<space>FC=2<CR><LF>)
Load Port replies to Host’s status request
(FSR, form code = 0): Parallel interlocks
disabled, Pod is present, VersaPort ready for
new command, VersaPort at Home, port is
unlocked, port-lifter not at down limit,
port-lifter at up limit, port-lifter not at stage
position, seater at Home port-lifter is below
slot number 1, port-lifter position is 0 mil
below Home.
“FSD0<space>PIO=OFF<space>PIP=TRUE<
space>READY=TRUE<space>HOME=TRU
E
PRTST=UNLK<space>ELDN=FALSE<space
>ELUP=TRUE<space>ELSTAGE=FALSE
SEATER=HOME<space>MODE=AUTO<spa
ce>SLOTPOS=0<space>EVPORTS=0(CR)(L
F)”
Load Port replies to Host’s status request
(FSR, form code =1): FSD1<space>“6005-1030-10<space>REV<sp
ace>?(CR)(LF)”
Load Port replies to Host’s status request
(FSR, form code =2): Slots 1 to 10 are empty,
slots 11 to 18 are filled with wafers, slots 19
and 20 have a crossed wafer, and the status of
slots 21 to 25 are unknown at the moment
(those slot positions have not yet gone past the
sensors).
“FSD2<space>S1=E<space>S2=E<space>S3
=E<space>S4=E<space>S5=E<space>S6=E<
space>S7=E<space>S8=E<space>S9=E
S10=E<space>S11=F<space>S12=F<space>S
13=F<space>S14=F<space>S15=F<space>S1
6=F<space>S17=F<space>S18=F
S19=C<space>S20=C<space>S21=U<space>
S22=U<space>S23=U<space>S24=U<space>
S25=U(CR)(LF)”
T
ABLE
27
Host Command Replies
(XX) Description (ref. SECS
HCACK)
ALARM Command rejected, Load Port in alarm state 7
BUSY Command rejected, Load Port is busy 6
CANNOT_PERFORM
Command rejected. Configuration of serial port is
wrong.
2
DENIED Command rejected for other reason(s)
1, 5, 8, 9, 10,
11, 64, 68, 69
INVALID_ARG Command rejected, at least one invalid parameter 3