Asyst Technologies VersaPort 2200, Technical Manual

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Released Rev. C 2000-1252-01 Page 185
VersaPort 2200 Technical Manual
Appendix B: Communications Software
ASCII Serial Text Interface
a
where: YY = WARNING or FATAL,
Fatal error is non-recoverable
Warning is recoverable
XXXXXXXXXX = alarm ASCII text, 60 chars. maximum
For a complete listing of alarm messages, please see the definition of ALTX in “Table
20Data Dictionary” on page 150 .
Examples:
(ECA) New Equipment Constant Acknowledge Host
<−
Load Port
Description:
The Load Port uses this message to either acknowledge or deny the Host's request
for a new equipment constant. Equivalent SECS: S2F16.
Primary/Secondary:
Secondary; this is a response to an ECS message.
Structure:
ECA<space>XX<CR><LF>
Where XX = Equipment acknowledge code
Alarm message received Motion aborted because
ARS WARNING Cassette not
present (CR)(LF)
Cassette is missing
ARS FATAL Port door failed to
open (CR)(LF) Either pod-door motor failed to move or pod-door sensor
has failed
ARS FATAL Wafer protrusion
sensor malfunction (CR)(LF) Wafer protrusion sensor is mis-aligned or not
functioning
T
ABLE
23 Equipment Constant Acknowledgments
(XX) Description (ref. SECS EAC)
OK New equipment data is accepted 0
UNKNOWN_DATA New data is rejected, data value does not exist 1
BUSY New data is rejected, Load Port is busy 2
OUT_OF_RANGE New data is rejected, data out of range 3
UNKNOWN_ECID New data is rejected, equipment ID is unknown 4
ALARM Load Port in alarm state 7
DENIED New data is rejected for other reasons Others