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CONFIDENTIAL
AIXTRON
- Dokumentation
Safety
System Manual
Appendix
CRIUS II
2
2.13
Appendix
2.13.1 Material Safety Data Sheets (MSDS)
Material safety data sheets contain safety relevant information on materials.
The end user is responsible for obtaining the material safety data sheets for
all used materials: Process gases, coating materials, pump oils, cleaning
agents, etc. Material safety data sheets can be obtained as follows:
•
Suppliers of chemicals generally include material safety data sheets with
the delivered chemicals
•
Material safety data sheets are available on the Internet. Example:
Enter «msds argon» into a search engine for safety relevant information on
argon.
Read the material safety data sheets thoroughly and follow all directions.
2.13.2 Electromagnetic compatibility
The electrical equipment of the CRIUS II was designed and built in accor-
dance with the directives relating to electromagnetic compatibility.
The CRIUS II complies with the requirements of the electromagnetic compat-
ibility standards. With respect to electromagnetic compatibility, the system is
intended for use in an industrial environment according to the EN 61000 stan-
dards.
Use in other environments, e.g. residential areas, requires additional electro-
magnetic compatibility measures.
2.13.3 Emission of gases and chemical substances
The exhaust gases of the CRIUS II (vacuum pumps, reactor) must be purified
by a suitable scrubber to prevent dangerous gases or vapor from escaping into
the environment.
