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AIXTRON
- Dokumentation
CONFIDENTIAL
165
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System Manual
Maintenance
CRIUS II
Vacuum system
Fig. 6-24
Control panel (example)
2
Check the following values:
•
Water flow
•
Nitrogen flow
•
Operating temperature
3
Adjust the values if necessary
6.11.3 Checking the KF clamps
1
Open the corresponding doors to access the vacuum system
2
Check all KF clamps for correct mounting
3
If necessary, tighten the KF clamps
Fig. 6-25
KF clamps
NOTE:
Wait at least 4 hours after switching the process pump on. Then the
pump has reached the operating temperature and is ready for operation.