Agilent Technologies TwisTorr 305-IC SF, User Manual

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Technical Information
210 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual
Technical specification
The following tables list the main technical data of the TwisTorr 305-ICQ & 305-IC SF.
Table 1 TwisTorr 305-ICQ Technical Specification
TwisTorr 305-ICQ - Technical data
Pumping speed
N
2
He
H
2
Ar
ISO 100
250 l/s
255 l/s
220 l/s
250 l/s
Max gas flow rate (N
2
): 380 sccm
Note: value refer to water-cooling pump version with:
• water temperature between 15°C and 20°C (non condensing,)
• backing pump with pumping speed equal or above 5 m
3
/h
Compression ratio
N
2
He
H
2
2 x 10
8
1 x 10
5
2 x 10
4
Max foreline pressure tolerance N
2
16 mbar
Note: foreline Tolerance defined as the pressure at which the turbopump still produces a
compression of 100. For continuous operation, water cooling is recommended (water temperature
between 15°C and 20°C).
Base pressure with recommended forepump < 1 x 10
-10
mbar
(< 1 x 10 -10 Torr)
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test
dome bake-out, with a Turbopump fitted with a
ConFlat flange and using the recommended
pre-vacuum pump)
Inlet flange CFF 8" O.D. ISO 160
CFF 6” O.D ISO 100
Foreline flange KF16 NW (KF25 – optional)
Max Rotation Speed 60600 rpm (1010 Hz driving frequency)
Start-up time < 3 minutes (it can be longer in case of soft
start active)
Recommended forepump Mechanical pump: DS102, DS302
Dry Pump: IDP-3 (no gas flow), IDP-7, IDP10