Agilent Technologies TPS-compact X3580-64000, User Manual

Page: 248 / 312

16 Instructions for Use
Use
248/312 TPS-compact User Manual / 87-901-010-01 (F )
Use
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of the
system. While heating the vacuum chamber, the temperature of the
inlet flange must not exceed 120 °C with ConFlat flanging and 80 °C
with ISO flanging.
WARNING! Never use the pumping system when the turboinlet flange is not connected to
the vacuum chamber or is not blanked.
WARNING! Do not touch the turbopump or any of its accessories during the heating
process. The high temperatures may cause burns.
WARNING! Avoid impacts or harsh movements of the pump when in operation. The
bearings may become damaged and damages to the persons or the things
could be taken place.