
118
5977 Series MSD Operation Manual
4
Operating in Chemical Ionization (CI) Mode
Familiarize yourself with the measurements on
your
system under operating
conditions and watch for
changes
that may indicate a vacuum or gas flow
problem. Measurements will vary by as much as 30% from one MSD and gauge
controller to the next.
Table 20
Mass flow controller settings and typical pressure readings
MFC
Pressure (Torr)
(%)
Methane
Ammonia
EI/PCI/NCI MSD
(Turbo pump)
EI/PCI/NCI MSD
(Turbo pump)
10
5.5
×
10
–5
5.0
×
10
–5
15
8.0
×
10
–5
7.0
×
10
–5
20
1.0
×
10
–4
8.5
×
10
–5
25
1.2
×
10
–4
1.0
×
10
–4
30
1.5
×
1
–4
1.2
×
10
–4
35
2.0
×
10
–4
1.5
×
10
–4
40
2.5
×
10
–4
2.0
×
10
–4
Summary of Contents for G7035A
Page 1: ...Agilent Technologies Agilent 5977 Series MSD Operation Manual ...
Page 30: ...30 5977 Series MSD Operation Manual 1 Introduction ...
Page 88: ...88 5977 Series MSD Operation Manual 3 Operating in Electron Ionization EI Mode ...
Page 170: ...170 5977 Series MSD Operation Manual 6 CI Maintenance ...
Page 171: ......