Agilent B1500A User’s Guide, Edition 10
2- 29
Introduction
Measurement Units
MFCMU - Multi Frequency CMU
This section describes typical specification of the multi frequency capacitance
measurement unit (CMU) for Agilent B1500A. The CMU performs the impedance
measurement and returns the specified measurement data such as Cp-G. Only one
module can be installed in one mainframe.
•
Measurement parameters: See Table 2-13.
•
AC signal, output frequency:
1 kHz to 5 MHz
Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to), 0.1 Hz (100 kHz to),
or 1 Hz (1 MHz to 5 MHz)
•
AC signal, output level:
10 mVrms to 250 mVrms, 1 mV resolution
•
DC bias:
0 to ± 25 V, using MFCMU internal DC bias
0 to ± 100 V, using SMU and SCUU (SMU CMU unify unit)
•
Measurement range:
For the fixed ranging mode, measurement range (impedance range) must be
specified to perform measurement. Table 2-14 shows the available measurement
ranges and the corresponding impedance value. And Figure 2-6 shows the
calculation example of the impedance vs frequency characteristics of a
capacitive load. Use these information to decide the measurement range.
Impedance
Z
is calculated by the following formula.
Z
= 1 / (2
f C
)
where
f
is frequency (Hz) and
C
is capacitance (F).
Summary of Contents for B1500A
Page 1: ...Agilent Technologies Agilent B1500A Semiconductor Device Analyzer User s Guide ...
Page 22: ...Agilent B1500A User s Guide Edition 10 Contents ...
Page 23: ...1 Getting Started ...
Page 41: ...2 Introduction ...
Page 74: ...2 34 Agilent B1500A User s Guide Edition 10 Introduction Measurement Units ...
Page 75: ...3 Installation ...
Page 132: ...3 58 Agilent B1500A User s Guide Edition 10 Installation About Plug in Modules ...
Page 133: ...4 Specifications ...
Page 179: ...5 Accessories and Options ...
