Agilent Technologies 969-6500, User Manual

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18
Technical Information
Technical Specification
264/306 Turbo-V 903 Pumping System User Manual / 87-901-016-01 (A)
Technical Specification
Table 1 Technical Specification
Pumping speed
N2:
He:
680 l/s
700 l/s
Compression ratio
N2:
He:
> 5 x 10
6
6 x 10
3
Base pressure with
recommended forepump
<
1 x 10
-7
mbar
( < 1 x 10
-7
Torr)
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after
the completion of test dome bake-out, with a
Turbopump fitted with a ConFlat flange and using the
recommended pre-vacuum pump)
Inlet flange Custom ISO 160 F
Foreline flange KF 25
Rotational speed 48000 rpm
Start-up time < 6 minutes
Recommended forepump DS 402, TriScroll 300
Operating position any
Cooling requirements Natural air convection
Forced air or water optional
Operating ambient
temperature +10 °C to +45 °C
Bakeout temperature 80° C at inlet flange max.
Vibration level (displacement) < 0.01 μ m at inlet flange
Lubricant permanent lubrication
Cooling requirements Forced air
Noise level FAN off = < 50 dB(A) at 1 meter
FAN on = < 55 dB(A) at 1 meter
Power supply Input for TV903
Pumping System Power
Supply (969-6501):
Input
voltage:
200 - 240 Vac (± 10%)