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Technical Information
Maintenance
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VacIon Plus 300 pumps User Manual
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87-900-103-01 (H)
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When venting the pump use clean, dry nitrogen. This will avoid
water absorption on the pump surfaces and make subsequent
pump downs easier.
Maintenance
WARNING!
The high voltage present in the high voltage cable which connects the control
unit to the ion pump, can cause severe injury or death. Before mounting the
high voltage connector of the cable on the pump high voltage feedthrough, or
before removing it, be sure the main power is removed from the control unit.
Before removing the high voltage connector of the cable from the control unit,
be sure the main power is removed from the control unit. Wait at least 10
seconds after removing the main power from the control unit, to allow
capacitors to discharge completely.
VacIon Plus pumps are maintenance free. In case of life time expiry
or premature failure of the pump, please contact your nearest Agilent
sales/service office for repair.
The VacIon Plus 300 pumps are designed with exchangeable high-
voltage feedthrough and pump elements.
Summary of Contents for 9191610
Page 3: ...VacIon Plus 300 VacIon Plus 300 pumps User Manual 87 900 103 01 H 3 98 VacIon Plus 300...
Page 4: ...VacIon Plus 300 4 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
Page 8: ...Contents 8 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
Page 56: ...4 Installation Procedure Disposal 56 98 VacIon Plus 300 pumps User Manual 87 900 103 01 H...
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