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Ohjekäsikirja

Käyttö

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TV 401/301 MS User Manual / 87-901-013-01

(A)

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HUOMIO!

Vältä kolhuja, heiluntaa tai äkkiliikkeitä turbopumpun toiminnan aikana, sillä
laakerit voivat vahingoittua. Käytä pumpun ilmansyöttöön ilmaa tai jalokaasua,
joissa ei ole pölyä tai hiukkasia. Erityisen aukon läpi syötettävän paineen tulee
olla alle 2 baaria (yli atmosfäärisen paineen). Pumput on varustettu
aggressiivisten kaasujen pumppausta varten aukolla, jonka läpi pumppuun
kuljetetaan jalokaasuja (typpi tai argon) laakereiden suojaamiseksi (katso
“Technical Information” -liite).

VAROITUS!

Kun pumppua käytetään myrkyllisten, paloherkkien tai radioaktiivisten
kaasujen pumppaamiseen, noudattakaa jokaiselle kaasulle sopivaa
menettelytapaa. Älkää käyttäkö pumppua räjähdysherkkien kaasujen lähellä.

TV 401/301 MSin käynnistys ja käyttö

TV 401/301 MSin käynnistykseen riittää, että se kytketään
sähköverkkoon. Sisäänrakennettu valvoja tunnistaa automaattisesti
lukitus- ja käynnistyssignaalit ja käynnistää pumpun.

Pumpun ensimmäinen käynnistys tapahtuu “Soft Start” -
menetelmällä, joka inaktivoituu automaattisesti käynnistysjakson
jälkeen. Siten pumpun seuraavat käynnistykset tapahtuvat ilman
“Soft Start” -toimintoa. Jotta käynnistys voitaisiin suorittaa
uudelleen “Soft Start” -menetelmällä, tulee yllämainittu tapa
aktivoida uudelleen ohjelmiston kautta (ks. kappale “RS 232
VIESTINNÄN KUVAUS” “Technical Information” -liitteessä).

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Summary of Contents for 869-8928R003

Page 1: ...sjon manual Bedienungshandbuch Ohjek sikirja Notice de mode d emploi Felhaszn l i k zik nyv Manual de istrucciones Podrecznik instrukcji Manual de istru es N vod k pou it Bedrijfshandleiding N vod na...

Page 2: ...re furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime co...

Page 3: ...TV 401 301 MS TV 401 301 MS User Manual 87 901 013 01 A 3 264 TV 401 301 MS...

Page 4: ...TV 401 301 MS 4 264 TV 401 301 MS User Manual 87 901 013 01 A...

Page 5: ...olecolari 14 Informazioni generali 15 Immagazzinamento 16 Preparazione per l installazione 17 Installazione 18 Uso20 Manutenzione 23 Smaltimento 24 2 Gebrauchsanleitung25 Sicherheitshinweise f r Turbo...

Page 6: ...41 Installation 42 Utilization 44 Entretien 47 Mis au rebut 48 4 Manual de istrucciones 49 Indicaciones de Seguridad para Bombas Turbomoleculares 50 Informaci n general 51 Almacenamiento 52 Preparaci...

Page 7: ...ing 73 Veiligheidsinstructies voor Turbomoleculaire pompen 74 Algemene informatie 75 Opslag 76 Uitpakken 77 Installatie 78 Gebruik 80 Onderhoud 83 Afvalverwerking 84 7 Istruktionsbog 85 Sikkerhedsanvi...

Page 8: ...rberedelser f r installationen 101 Installation 102 Anv ndning 104 Underh ll 107 Bortskaffning 108 9 Instruksjon Manual 109 Sikkerhetsanvisninger for Turbomolekyl r Pumper 110 Generell informasjon111...

Page 9: ...33 Biztons gi tmutat Turb molekul ris szivatty khoz 134 ltal nos inform ci k 135 T rol s 136 El k sz t s telep t sre 137 Telep t s 138 Haszn lat 140 Karbantart s 143 Megsemmis t s 144 12 Podrecznik In...

Page 10: ...cn informace 159 Uskladn n 160 P prava k instalaci 161 Instalace 162 Pou it 164 dr ba 167 Likvidace 168 14 N vod na Obsluhu 169 Bezpe nostn n vod pre Turbomolekul rne v vevy 170 V eobecn inform cie 17...

Page 11: ...e opadkov 192 16 Instructions for Use 193 Safety Guideline for Turbomolecular Pumps 194 General Information 195 Storage 196 Preparation for Installation 197 Installation 198 Use200 Maintenance 203 Dis...

Page 12: ...ng Kit Installation 239 Purge Valve Installation 242 Serial Cable Installation 243 TV 401 301 MS Controller Installation 245 Connection of the Fore Vacuum Pump 245 TV 401 301 MS Insertion and Extracti...

Page 13: ...Turbomolecolari 14 Informazioni generali 15 Immagazzinamento 16 Preparazione per l installazione 17 Installazione 18 Uso 20 Accensione ed Uso della TV 401 301 MS 21 Arresto della TV 401 301 MS 22 Arr...

Page 14: ...vata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore...

Page 15: ...i di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effet...

Page 16: ...atura NOTA Le note contengono informazioni importanti estrapolate dal testo Immagazzinamento Per garantire il massimo livello di funzionalit ed affidabilit delle pompe Turbomolecolari Agilent devono e...

Page 17: ...si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non la...

Page 18: ...stallazione sul sistema onde evitare eventuale inquinamento da polvere Installazione ATTENZIONE Togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Non aliment...

Page 19: ...Technical Information Il TV 401 301 MS pu essere installato in qualsiasi posizione Fissare il TV 401 301 MS in posizione stabile collegando la flangia di fissaggio della turbopompa ad una controflangi...

Page 20: ...S abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Per l installazione degli accessori opzionali vedere Technical Information Uso In questo p...

Page 21: ...ormation AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza d...

Page 22: ...controller incorporato arresta immediatamente la pompa AVVERTENZA Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella d...

Page 23: ...a sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un sistema rigenerato in sostituzione...

Page 24: ...solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di rac...

Page 25: ...f r Turbomolekularpumpen 26 Allgemeine Information 27 Lagerung 28 Vor der Installation 29 Installation 30 Gebrauch 32 Einschaltung und Gebrauch der TV 401 301 MS 33 Stoppen von Modell TV 401 301 MS 3...

Page 26: ...ohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und...

Page 27: ...ystem eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Der Pumpeffekt wird ber eine Hochgeschwindigke...

Page 28: ...en k nnten HINWEIS Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden Lagerung Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew...

Page 29: ...kung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TV 401 301 MS ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibr...

Page 30: ...n durch Staub zu vermeiden Installation VORSICHT Die Schutzkappe erst bei Anschluss der Turbopumpe an das System entfernen Die Turbopumpe nicht speisen wenn sie nicht ordnungsgem an das Vakuumsystem a...

Page 31: ...TV 401 301 MS kann in jeder beliebigen Position installiert werden Die TV 401 301 MS in einer stabilen Position befestigen wobei der Flansch der Turbopumpe an einen festen Gegenflansch angeschlossen...

Page 32: ...tung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vorgesehen wird F r die Installation der Optionsteile siehe im Anhang Technical Information Gebrauch In dies...

Page 33: ...icht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf hige...

Page 34: ...ten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp WARNUNG F r die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteil...

Page 35: ...se unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen werden der ein general berholtes System als Ersatz f r das defekte Sy...

Page 36: ...ctronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsyste...

Page 37: ...culaires 38 Indications Generales 39 Stockage 40 Preparation pour l installation 41 Installation 42 Utilization 44 Mise en marche et utilisation de la TV 401 301 MS 45 Arr t de la TV 401 301 MS 46 Ar...

Page 38: ...t une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rup...

Page 39: ...vide pouss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effe...

Page 40: ...ppareillage NOTE Les notes contiennent des renseignements importants extrapol s du texte Stockage Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Agilent il est in...

Page 41: ...ant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TV 401 301 MS et ne lui...

Page 42: ...ge clos jusqu au moment de l installation Installation ATTENTION Ne retirer le bouchon de protection qu au moment du branchement de la turbopompe au syst me Ne pas alimenter la turbopompe tant qu elle...

Page 43: ...primaire Cf sch ma dans Technical Information Le TV 401 301 MS peut tre install e dans n importe quelle position Assurer le TV 401 301 MS de fa on stable en fixant la collerette de la turbopompe une...

Page 44: ...ion appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 Pour l installation des accessoires en option se reporter Technical Information Utilization Ce paragraphe...

Page 45: ...l Information AVERTISSEMENT Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures typiques de chaque gaz Ne pas utiliser la pompe en pr sence...

Page 46: ...leur incorpor arr te imm diatement la pompe AVERTISSEMENT Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par un c ble d alimentation 3 fils voir le tableau des parties qui peuve...

Page 47: ...50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me endommag N...

Page 48: ...les pays de la Communaut euro p enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m na g res ou les d chets industriels ordinaires mais passer par un...

Page 49: ...mbas Turbomoleculares 50 Informaci n general 51 Almacenamiento 52 Preparaci n para la instalaci n 53 Instalaci n 54 Uso 56 Encendido y Uso de la TV 401 301 MS 57 Parada de la TV 401 301 MS 58 Parada d...

Page 50: ...una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre e...

Page 51: ...vac o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bom...

Page 52: ...tienen informaci n importante extra da del texto Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes in...

Page 53: ...pecial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de qu...

Page 54: ...el sistema para evitar su posible contaminaci n por polvo Instalaci n ATENCI N Retirar el tap n de protecci n s lo en el momento de conectar la bomba de turbina al sistema No alimentar la bomba de tur...

Page 55: ...a v ase diagrama en Technical Information El TV 401 301 MS puede instalarse en cualquier posici n Fijar el TV 401 301 MS en una posici n estable conectando la brida de fijaci n de la bomba de turbina...

Page 56: ...1 301 MS mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical I...

Page 57: ...o la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos Encendido y Uso de la...

Page 58: ...detiene inmediatamente la bomba ADVERTENCIA Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido p...

Page 59: ...erficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sust...

Page 60: ...dica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimient...

Page 61: ...para Bombas Turbomoleculares 62 Informa es gerais 63 Armazenagem 64 Prepara o para a instala o 65 Instala o 66 Utiliza o 68 Acendimento e Utiliza o da TV 401 301 MS 69 Paragem da TV 401 301 MS70 Parag...

Page 62: ...e Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o...

Page 63: ...troller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de a...

Page 64: ...anos aparelhagem NOTA As notas cont m informa es importantes destacadas do texto Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser...

Page 65: ...a apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para n o deixar cair o...

Page 66: ...instala o no sistema para evitar eventuais acumula es de p Instala o CUIDADO Retirar a tampa de prote o somente no momento de ligar a turbobomba ao sistema N o ativar a Turbobomba se n o est fixada co...

Page 67: ...301 MS deve ser ligado a uma bomba prim ria consultar esquema em Technical Information O TV 401 301 MS pode ser instalado em qualquer posi o Fixar o TV 401 301 MS em posi o est vel ligando o flange d...

Page 68: ...401 301 MS esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 Para a instala o dos acess rios opcionais consultar Technical Information Utiliza o Neste par g...

Page 69: ...hnical Information ATEN AO Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presen a de gases...

Page 70: ...e alimenta o O controller incorporado para imediatamente a bomba ATEN AO Para a seguran a do operador o controller Turbo V deve ser alimentado com um cabo de alimenta o com 3 fios ver a tabela das par...

Page 71: ...a seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent ou do Agilent advanced exchange service que permite obter um sistema regenerado que substitua a bomba com...

Page 72: ...pa ses da Comunidade Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolh...

Page 73: ...ties voor Turbomoleculaire pompen 74 Algemene informatie 75 Opslag 76 Uitpakken 77 Installatie 78 Gebruik 80 Inschakeling en gebruik van de TV 401 301 MS 81 Afzetten van de TV 401 301 MS 82 Noodstop 8...

Page 74: ...hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen...

Page 75: ...gen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect word...

Page 76: ...kingen bevatten belangrijke informatie die uit de tekst is gelicht Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgend...

Page 77: ...geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TV 401 301 MS niet kan vallen en g...

Page 78: ...ingebouwd zodat eventuele vervuiling door stof wordt voorkomen Installatie VOORZICHTIG Verwijder de beschermdop pas op het moment dat de turbopomp op het systeem wordt aangesloten De Turbopomp niet vo...

Page 79: ...hema in Technical information De TV 401 301 MS kan in alle standen worden ge nstalleerd Bevestig de TV 401 301 MS in een stabiele positie door de bevestigingsflens van de turbopomp aan een vaste steun...

Page 80: ...401 301 MS goed ge soleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn Geb...

Page 81: ...Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aa...

Page 82: ...ngebouwde controller stopt onmiddellijk de pomp WAARSCHUWING Voor de veiligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de besta...

Page 83: ...nder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agilent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter ve...

Page 84: ...pese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker w...

Page 85: ...olekyl re turbopumper 86 Generel Information 87 Opbevaring 88 Forberedelse f r installation 89 Installation 90 Anvendelse 92 Start og anvendelse af TV 401 301 MS 93 Stop af TV 401 301 MS 94 N dstop 94...

Page 86: ...en stor kinetisk energi der skyldes den h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stato...

Page 87: ...hed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpeeffekten opn s ved...

Page 88: ...askinskader BEM RK Dette g r opm rksom p vigtig information i teksten Opbevaring Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl...

Page 89: ...tion TV 401 301 MS leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at TV 401 301 MS ikke ta...

Page 90: ...alleres Herved forhindres at der kommer st v i pumpen Installation FORSIGTIG Beskyttelsesproppen m f rst fjernes n r turbopumpen sluttes til systemet Turbopumpen m aldrig aktiveres hvis den ikke er fa...

Page 91: ...s en hovedpumpe se skemaet Technical Information TV 401 301 MS kan installeres i en hvilken som helst position Fastg r TV 401 301 MS i en stabil position ved at slutte turbopumpens indl bsflange til e...

Page 92: ...ar en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudsty...

Page 93: ...ilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Star...

Page 94: ...yreenhed afbryder straks pumpen ADVARSEL For operat rens sikkerhed skal Turbo V controller en str mforsynes med et 3 tr det f dekabel se tabellen over de bestilbare stykker f dekablet skal v re udstyr...

Page 95: ...rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted eller Agilent advanced exchange service der udskifter...

Page 96: ...ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opf...

Page 97: ...l ra turbopumpar98 Allm n information 99 F rvaring 100 F rberedelser f r installationen 101 Installation 102 Anv ndning 104 Start och anv ndning av TV 401 301 MS 105 Att st nga av TV 401 301 MS 106 N...

Page 98: ...g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle...

Page 99: ...r och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp...

Page 100: ...ste f ljas exakt f r att inte risk f r maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och dri...

Page 101: ...S levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 401 301 MS inte tappas...

Page 102: ...erats i systemet f r att f rhindra att det kommer in damm eller annat i den Installation OBSERVER Ta bort skyddsproppen f rst n r turbopumpen ska anslutas till systemet S tt aldrig ig ng turbopumpen o...

Page 103: ...udpump se schemat i Technical information TV 401 301 MS kan installeras i valfri position F st TV 401 301 MS i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till en fast fl ns som m ste...

Page 104: ...Kontrollera att anordningen som r ansluten till TV 401 301 MS har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Inf...

Page 105: ...ilagan Technical information VARNING D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n...

Page 106: ...lkabeln ur v gguttaget Den inbyggda styrenheten avbryter omedelbart pumpens funktion VARNING F r operat rens s kerhet b r Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabel...

Page 107: ...n tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ers tta systemet med ett renoverat s...

Page 108: ...nionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste...

Page 109: ...or Turbomolekyl r Pumper 110 Generell informasjon 111 Lagring 112 Klargj re til installasjon 113 Installasjon 114 Bruk 116 Starte og bruke TV 401 301 MS 117 Stoppe TV 401 301 MS 118 N dstopp 118 Vedli...

Page 110: ...e Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av...

Page 111: ...av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste...

Page 112: ...ikke f lges kan f re til at utstyret skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pump...

Page 113: ...lsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 401 301 MS pakkes ut m du se til at det ikke slippes ned eller utsett...

Page 114: ...systemet slik at den ikke forurenses eller utsettes for nedst ving Installasjon FORSIKTIG Fjern beskyttelsesproppen f rst n r turbopumpen skal sluttes til systemet Turbopumpen m aldri aktiveres hvis...

Page 115: ...ical Information TV 401 301 MS kan monteres i en valgfri stilling TV 401 301 MS m installeres i en stabil posisjon og turbopumpens inngangsflens m koples til en fast motflens som er i stand til motst...

Page 116: ...nstruksjoner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 12...

Page 117: ...er og starter pumpen F rste igangsetting av pumpen skjer med MYK START som etter denne f rste igangsettingssyklusen desaktiveres slik at etterf lgende igangsettinger skjer uten MYK START For oppn en M...

Page 118: ...an bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overhold...

Page 119: ...verflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for...

Page 120: ...symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man...

Page 121: ...ipumppujen Turvaohjeet 122 Yleisi tietoja 123 Varastointi 124 Valmistelut asennusta varten 125 Asennus 126 K ytt 128 TV 401 301 MSin k ynnistys ja k ytt 129 TV 401 301 MSin pys ytt minen 130 H t pys y...

Page 122: ...m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai root...

Page 123: ...hji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeud...

Page 124: ...en vahingoittumiseen HUOM Huomautukset sis lt v t t rke tekstiss k sitelty tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettav...

Page 125: ...mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TV 401 301 MSin putoamista tai siihen kohdistu...

Page 126: ...ten v ltet n laitteen mahdollinen p lysaastuminen Asennus HUOMIO Poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n lk kytkek turbopumppuun s hk ellei sit ole kiinnitetty asianmukaisesti...

Page 127: ...e kytke p pumppuun ks Technical Information liitteen kaaviota TV 401 301 MS voidaan asentaa mihin tahansa asentoon Kiinnitt k Kiinnitt k TV 401 301 MS vakaaseen asentoon liitt m ll turbopumpun sis ntu...

Page 128: ...MS laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Technical Information liitett lis varusteiden asentamista varte...

Page 129: ...rkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell TV 401 301 MSin k ynnisty...

Page 130: ...nrakennettu valvoja pys ytt pumpun v litt m sti VAROITUS K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty tyyppi ja 3 lla...

Page 131: ...l mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoitt...

Page 132: ...kaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteese...

Page 133: ...mutat Turb molekul ris szivatty khoz 134 ltal nos inform ci k 135 T rol s 136 El k sz t s telep t sre 137 Telep t s 138 Haszn lat 140 A TV 401 301 MS bekapcsol sa s 141 A TV 401 301 MS 142 V szle ll t...

Page 134: ...g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a...

Page 135: ...kul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecs...

Page 136: ...ez s k rosod s t okozhatj k MEGJEGYZ S A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak T rol s A Agilent Turbomolecular szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k ve...

Page 137: ...csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje anna...

Page 138: ...egakad lyozva a por ltali szennyez d s b rmely form j t Telep t s FIGYELEM Ne t vol tsa el a v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt Ne t pl lja a turb szivatty t am g...

Page 139: ...tlakoztatni l sd Technical Information A TV 401 301 MS b rmely helyzetben telep thet R gz tse a TV 401 301 MS et stabil helyzetben a turb szivatty r gz t karim j t egy r gz tett ellenkarim ra csatlako...

Page 140: ...sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra meleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot VESZ LY Soha...

Page 141: ...t t s elind tja a szivatty t Az els szivatty ind t s l gy ind t s m dban t rt nik Amikor az ind t si ciklus befejez dik a l gy ind t s m d automatikusan tiltva van s a k vetkez ind t sok l gy ind t s...

Page 142: ...gyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget teg...

Page 143: ...org sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s hely...

Page 144: ...z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe...

Page 145: ...omolekularnych 146 Og lne informacje147 Magazynowanie 148 Przygotowanie do instalacji149 Instalacja 150 U ytkowanie 152 W czenie i U ytkowanie TV 401 301 21 NSF 153 Zatrzymanie systemu TV 401 301 21 N...

Page 146: ...i Obs ugi posiadaj wysok energi kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojan...

Page 147: ...rowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane popr...

Page 148: ...zegania mo e doj do uszkodzenia aparatury PRZYPIS S to wa ne informacje wyci gni te z tekstu Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekular...

Page 149: ...ypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadk...

Page 150: ...i na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em Instalacja UWAGA Zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu Nie zasila turbopompy je eli nie j...

Page 151: ...czony do g wnej pompy patrz schemat w dodatku Technical Information TV 401 301 21 NSF mo e by zainstalowany w jakiejkolwiek pozycji Zamocowa TV 401 301 21 NSF w stabilnej pozycji cz c ko nierz mocuj...

Page 152: ...posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information U ytkowanie W...

Page 153: ...n ZAGRO ENIE Kiedy pompa jest zastosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci g...

Page 154: ...nia Wbudowany sterownik zatrzyma natychmiast pomp ZAGRO ENIE Dla zagwarantowania bezpiecze stwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilaj cym o 3 przewodach zobacz tabel cz ci...

Page 155: ...a poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszko...

Page 156: ...j Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza e wyr b nim oznaczony nie mo e by przetworzony jako odpad razem z innymi domowymi lub przemys owymi odpadami lecz musi by sk adowany w...

Page 157: ...Turbomolekul rn v v vy 158 V eobecn informace 159 Uskladn n 160 P prava k instalaci 161 Instalace 162 Pou it 164 Zapnut a pou v n v v vy TV 401 301 MS 165 Vypnut v v vy TV 401 301 MSse roubovanou p ru...

Page 158: ...jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotor...

Page 159: ...rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp...

Page 160: ...hly po kodit za zen POZN MKA Pozn mky obsahuj d le it informace p evzat z textu Uskladn n Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Agilent mus te dodr...

Page 161: ...balu Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l...

Page 162: ...a do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem Instalace POZOR P ed p ipojen m turbomolekul rn v v vy do syst mu nesund vejte roubovac v ko Nezap nejte turbov v vu dokud nebude n...

Page 163: ...n mu erpadlu viz Technical Information V v vu TV 401 301 MS lze instalovat v libovoln poloze V v vu TV 401 301 MS upevn te v n jak stabiln poloze a p vodn p rubu turbov v vy p ipojte k pevn protip rub...

Page 164: ...tavec popisuje podrobnosti z kladn ch pracovn ch postup P ed pou it m syst mu prove te v echna elektrick a pneumatick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 120 C NEBE...

Page 165: ...do provozu Prvn spu t n v v vy je v re imu pozvoln ho rozb hu Jakmile bude rozb hov cyklus dokon en re im pozvoln ho rozb hu se automaticky vypne a dal starty ji budou prob hat bez pozvoln ho rozb hu...

Page 166: ...jen troj ilov m p vodn m kabelem viz tabulka d l kter lze doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m...

Page 167: ...o kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Agilent kter m e dodat n hradn repasovan za zen v m nou za porouchan POZN MKA P ed ode...

Page 168: ...ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n...

Page 169: ...bomolekul rne v vevy 170 V eobecn inform cie 171 Uchov vanie 172 Pr prava na in tal ciu 173 In tal cia 174 Pou itie 176 Zapnutie a pou itie zariadenia TV 401 301 MS177 Vypnutie zariadenia TV 401 301 M...

Page 170: ...vevy ak s n sledovne popisovan obsahuj ve k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rot...

Page 171: ...omolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn...

Page 172: ...sobi po kodenie zariadenia POZN MKA Pozn mky upozor uj na d le it inform cie z textu Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte...

Page 173: ...peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Agilent Po as vyba ovania syst mu dbajte na to aby zariadenie nespad...

Page 174: ...ostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom In tal cia POZOR Ochrann kryt odstr te tesne pred pripojen m turbov vevy k syst mu Turbov vevy nesp ajte k m nie je pripojen na v ku...

Page 175: ...ariadenie TV 401 301 MS m e by nain talovan v ubovo nej polohe Upevnite TV 401 301 MS do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k pevnej pr rube upevnenej tak aby vydr ala nam hanie...

Page 176: ...e z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 120 C NE...

Page 177: ...Prv spustenie v vevy prebehne v re ime Soft Start Jemn tart Po dokon en sp acieho cyklu sa re im Soft Start automaticky zablokuje a v etky nasleduj ce spustenia zariadenia prebehn bez re imu Soft Star...

Page 178: ...an pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m p...

Page 179: ...k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Agilent kde v m pokazen syst m vymenia POZN MKA Sk r...

Page 180: ...je smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako...

Page 181: ...Turbomolekularne rpalke 182 Splo ne informacije 183 Shranjevanje 184 Priprava za monta o 185 Monta a 186 Uporaba 188 Vklop in uporaba naprave TV 401 301 MS 189 Izklop naprave TV 401 301 MS 190 Zaustav...

Page 182: ...lednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja st...

Page 183: ...urbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje s...

Page 184: ...terih lahko pride do po kodbe opreme OPOMBA Opombe vsebujejo pomebne informacije iz besedila Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr a...

Page 185: ...monta o Naprava TV 401 301 MS je dobavljena v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne str...

Page 186: ...e v sistem S tem boste prepre ili onesna enje s prahom Monta a POZOR Za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem Ne dovajajte ni esar turbo rpalki dokler ta ni primerno pr...

Page 187: ...iklju iti na primarno rpalko glej Technical Information TV 401 301 MS lahko montirate v tevilne pozicije TV 401 301 MS namestite v stabilem polo aj tako da pove ete vhodno prirobnico turbo rpalke na p...

Page 188: ...uje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C SVARILO Turbo...

Page 189: ...Prvi zagon rpalke je v na inu mehkega zaganjanja Soft Start Ko se za etni cikel zaklju i se na in Soft Start samodejno onemogo i in na voljo so naslednji zagoni brez na ina Soft Start Za ponovno akti...

Page 190: ...a napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da...

Page 191: ...rtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjen sistem z no...

Page 192: ...EEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo...

Page 193: ...ine for Turbomolecular Pumps 194 General Information 195 Storage 196 Preparation for Installation 197 Installation 198 Use 200 Switching on and Use of TV 401 301 MS 201 TV 401 301 MS Switching off 202...

Page 194: ...contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact...

Page 195: ...ar pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pump...

Page 196: ...to the equipment NOTE Notes contain important information taken from the text Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the follow...

Page 197: ...special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of...

Page 198: ...in the system thus preventing any form of pollution by dust Installation CAUTION Do not remove the protective cap before connecting the turbopump to the system Do not supply the Turbopump until it is...

Page 199: ...be connected to a primary pump see Technical Information The TV 401 301 MS can be installed in any position Fix the TV 401 301 MS in a stable position connecting the turbopump fixing flange to a fixed...

Page 200: ...the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120...

Page 201: ...start up is in Soft Start mode When the start up cycle is finished the Soft Start mode automatically is disabled and the following start ups are without the Soft Start mode To re enable the Soft Start...

Page 202: ...rd see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to sati...

Page 203: ...wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down NOT...

Page 204: ...ymbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a diffe...

Page 205: ...Outline 212 Interconnections 216 Input Power Connector217 P3 Spare 217 P5 External Fan 218 J5 In Out 218 Signal Description 219 How to Connect the Output Open Collector of the Controller 223 How to C...

Page 206: ...Serial Cable Installation 243 TV 401 301 MS Controller Installation 245 Connection of the Fore Vacuum Pump 245 TV 401 301 MS Insertion and Extraction 246 Insertion Procedure 247 Extraction Procedure...

Page 207: ...l 87 901 013 01 A 207 264 Description of the TV 401 301 MS The TV 401 301 MS pumping system consists of a pump with a dedicated controller The TV 401 301 MS pump model is 869 8928R003 see the followin...

Page 208: ...e pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined disc...

Page 209: ...p microcomputer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase...

Page 210: ...10 8 Torr Inlet flange DN 100 Nominal rotational speed 60000 RPM Start up time 3 minutes Recommended forepump mechanical Agilent DS 302 dry pump Agilent SH 100 Operating position any Operating ambient...

Page 211: ...t RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional Pump power output 54 Vac 3 phases 150 W max 1010 Hz max nominal rotational speed 60...

Page 212: ...301 MS Outline 212 264 TV 401 301 MS User Manual 87 901 013 01 A TV 401 301 MS Outline The following figure shows the TV 401 301 MS outlines dimensions are in mm inches Figure 5 TV 401 301 MS outline...

Page 213: ...mation TV 401 301 MS Outline 17 TV 401 301 MS User Manual 87 901 013 01 A 213 264 The following figure shows the 869 8979M005 controller outline dimensions are in inches mm Figure 6 TV 401 301 NSF con...

Page 214: ...rmation TV 401 301 MS Outline 214 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 7 Graph of nitrogen pumping speed vs inlet pressure Main port Figure 8 Graph of nitrogen pumping speed vs inlet p...

Page 215: ...ation TV 401 301 MS Outline 17 TV 401 301 MS User Manual 87 901 013 01 A 215 264 Figure 9 Graph of compression ratio vs foreline pressure Main Port Figure 10 Graph of compression ratio vs foreline pre...

Page 216: ...17 Technical Information Interconnections 216 264 TV 401 301 MS User Manual 87 901 013 01 A Interconnections The following figure shows the TV 401 301 MS interconnections Figure 11...

Page 217: ...er Manual 87 901 013 01 A 217 264 Input Power Connector The following figure shows the input power connector Figure 12 P3 Spare Figure 13 This is a dedicated 24 Vdc spare connector note that it can be...

Page 218: ...dicated 24 Vdc connector to supply the optional external fan J5 In Out Figure 15 This connector carries all the input and output signals to remote control the TV 401 301 MS It is a 15 pins D type conn...

Page 219: ...ANALOG SIGNAL OUT 15 GROUND PROGRAMMABLE ANALOG SIGNAL OUT Signal Description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to...

Page 220: ...speed is set to High Speed 1010 Hz max and settable by window 120 If a continuous signal is applied pin 5 fixed at 24 V and pin 6 fixed to ground the pump speed is set to Low Speed The Low Speed frequ...

Page 221: ...is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold v...

Page 222: ...shold 980 Hz hysteresis 2 activation type low level delay time 0 second RELAY CONTACT this output signal is the repetition of the PROGRAMMABLE SET POINT output signal When the PROGRAMMABLE SET POINT s...

Page 223: ...ect the Output Open Collector of the Controller Here below there are examples of typical connections of the input of TV 401 301 MS to an external system Two cases are considered 1 the customer supplie...

Page 224: ...17 Technical Information J5 In Out 224 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 19 Case 1...

Page 225: ...Technical Information J5 In Out 17 TV 401 301 MS User Manual 87 901 013 01 A 225 264 Figure 20 Case 2 with relay utilisation...

Page 226: ...utilisation How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the...

Page 227: ...Technical Information J5 In Out 17 TV 401 301 MS User Manual 87 901 013 01 A 227 264 Using internal 24 Vdc supply Figure 22 Using external 24 Vdc supply Figure 23...

Page 228: ...a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 401 301 MS Tab 4 PIN N SIGNAL NAME 1 5 V OUT 2 TX RS232 3 RX RS232 4 A RS422 Optional 5 GND 6 A RS485...

Page 229: ...is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 960...

Page 230: ...graph COM Command 0x30 to read the window 0x31 to write into the window DATA an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not pre...

Page 231: ...gic window Numeric 6 bytes After a read instruction of a numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been successfu...

Page 232: ...rce PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Con...

Page 233: ...C Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destinatio...

Page 234: ...38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL TYPE...

Page 235: ...Start write only in Stop condition YES 1 NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold expressed in Hz mA or s default 980 103 R W N Set Point del...

Page 236: ...output voltage signal proportional to frequency or power 0 frequency 1 power default 0 117 R W N Low Speed frequency Hz 750 to Maximum rotationl frequency win 121 default 750 120 R W N Rotational freq...

Page 237: ...voltage duty cycle 203 R N Driving frequency in Hz 204 R N Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 206 R N Error co...

Page 238: ...ault 0 NOTE 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command...

Page 239: ...ater Cooling Kit Installation Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbe...

Page 240: ...013 01 A CAUTION The items of the plastic model kit must be assembled as shown in the following figure Figure 28 The assembled kit must be screwed into the suitable holes of the pump body with a reco...

Page 241: ...avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling syste...

Page 242: ...le to protect the pump bearings against particulate and corrosive gases that could move into the pump see Accessories and Spare Parts table To install the gas purge valve it is necessary to unscrew th...

Page 243: ...Figure 31 Serial Cable Installation The supplied serial cable must be installed when the TV 401 301 MS or the optional vent valve has to be controlled by means of a remote computer The cable is insta...

Page 244: ...17 Technical Information Serial Cable Installation 244 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 32...

Page 245: ...on the controller casing see controller outline drawing Connection of the Fore Vacuum Pump A KF 16 flange is available to connect the TV 401 301 MS pump to the fore vacuum pump A vacuum approved pipe...

Page 246: ...Needed TV 401 301 MS pump PN 869 8928R003 in the following the pump supplied with O rings already mounted in the factory Quantity 6 screws M6 20 8 mm black with spherical tip resistance class 10 9 or...

Page 247: ...extraction flange Insertion smooth holes 6 RED CIRCLES 60 extraction M6 threaded holes 3 BLUE RHOMBS 120 Insertion Procedure 1 Insert the pump into the chamber carefully and without tilting it Align...

Page 248: ...xtraction 248 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 35 2 When the axial distance between the pump flange and chamber flange is about 4 mm engage 6 sphere screws with washers RED CIRCLES...

Page 249: ...e torque wrench set 10 Nm WARNING Do not screw in the M4 screws present on the pump flange at a smaller diameter and marked with yellow enamel 4 Screw in the 6 sphere screws clockwise into the notched...

Page 250: ...ual 87 901 013 01 A Figure 37 5 Get the pump flange in contact with the chamber flange and close the sphere screws 10 Nm Extraction Procedure 1 Use a torque wrench locked at a torque value 10 Nm 2 Uns...

Page 251: ...ARNING Do not unscrew in the M4 screws present on the pump flange at a smaller diameter and marked with yellow enamel 3 Engage 3 sphere screws into the M6 threaded holes present on the pump flange blu...

Page 252: ...Technical Information TV 401 301 MS Insertion and Extraction 252 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 39 5 When the pump is free pull it out of the chamber carefully Fig 40 turn turn t...

Page 253: ...Technical Information TV 401 301 MS Insertion and Extraction 17 TV 401 301 MS User Manual 87 901 013 01 A 253 264 Figure 40 6 Remove the 3 M6 screws from the pump flange...

Page 254: ...to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply...

Page 255: ...to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the T...

Page 256: ...onsumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be ov...

Page 257: ...d by Agilent s specialist Accessories and Spare Parts Tab 8 Description Part number Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Navigator Softwar...

Page 258: ...17 Technical Information Accessories and Spare Parts 258 264 TV 401 301 MS User Manual 87 901 013 01 A...

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Page 264: ...6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 China Agilent Technologies China Co Ltd Vacuum Products Division No 3...

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