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6
Operating in CI Mode
The CI Flow Control Module
138
7000/7010 Series TQ GC/MS Operating Manual
When a CI system is installed along with a JetClean system, the MFC is shared
by both systems. By design, its use is restricted to one of these systems at a
time. In this case, the Gas B supply is dedicated to hydrogen used for source
cleaning. For detailed information on the JetClean system refer to the
JetClean
Operating manual
installed on your PC along with this manual.
The
Open
and
Closed
states are shown in the monitors as
Opened and Closed
.
Table 12 CI system MFC state
Result
Gas A flow
Gas B flow
Purge
with Gas A
Purge
with Gas B
Pump out
flow module
Standby, vented,
or EI mode
Gas A
Open
Closed
Open
Closed
Closed
Closed
Gas B
Closed
Open
Closed
Open
Closed
Closed
MFC
On
setpoint
On
setpoint
On
100%
On
100%
On
100%
Off
0%
Shutoff valve
Open
Open
Open
Open
Open
Closed